Table of Contents: Vol. 48, No. 6 (2009)

Special Issue: Microprocesses and Nanotechnology

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• DUV, VUV, EUV Lithography and Metrology
• Electron- and Ion-Beam Lithography
• Resist Materials and Processing
• Nanodevices
• Nanofabrication
• Nanomaterials
• Nano Tool
• Nanoimprint, Nanoprint and Rising Lithography
• Bio MEMS, Lab on a Chip
• Microsystem Technology and MEMS

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DUV, VUV, EUV Lithography and Metrology

06FA01 : Progress in Extending Immersion Lithography for the 32 nm Node and Beyond

Harry Sewell, Alek Chen, Jo Finders, and Mircea Dusa
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (570K)]

06FA02 : Lithographic Performance of Extreme Ultravolet Full-Field Exposure Tool at Selete

Kazuo Tawarayama, Hajime Aoyama, Takashi Kamo, Shunko Magoshi, Yuusuke Tanaka, Seiichiro Shirai, and Hiroyuki Tanaka
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (883K)]

06FA03 : Focus Monitor Using Asymmetric Diffraction Rays by Off-Axis Monopole Illumination

Takashi Sato, Soichi Inoue, Kentaro Kasa, Yumi Nakajima, Satoshi Nagai, and Kazuya Sato
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (157K)]

06FA04 : Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height

Tsuneo Terasawa, Takeshi Yamane, Toshihiko Tanaka, Teruo Iwasaki, Osamu Suga, and Toshihisa Tomie
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (327K)]

06FA05 : Kernel Count Reduction in Model Based Optical Proximity Correction Process Models

Jianliang Li, Xiaohai Li, Robert Lugg, and Lawrence S. Melvin III
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (288K)]

06FA06 : Effect of Attenuated Phase Shift Mask Structure on Extreme Ultraviolet Lithography

Hyun-Duck Shin, Chang Young Jeoung, Tae Geun Kim, Sangsul Lee, In-Sung Park, and Jinho Ahn
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (428K)]

06FA07 : Study of Critical Dimensions of Printable Phase Defects Using an Extreme Ultraviolet Microscope

Yoshito Kamaji, Kei Takase, Takahiro Yoshizumi, Takashi Sugiyama, Toshiyuki Uno, Takeo Watanabe, and Hiroo Kinoshita
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (496K)]

06FA08 : Transmission Measurement Using Extreme Ultraviolet Light for the Development of Extreme Ultraviolet Resist

Ryuji Ohnishi, Takeo Watanabe, Yasuyuki Fukushima, Masafumi Osugi, and Hiroo Kinoshita
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (246K)]

Electron- and Ion-Beam Lithography

06FB01 : Development of Multibeam Electron Beam Direct Writing System Using Third-Order Imaging Technique

Takashi Fuse, Tadashi Kotsugi, Koji Takeya, Hidetoshi Kinoshita, and N. William Parker
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (186K)]

06FB02 : Continuous-Stage-Movement Blankingless Electron-Beam Lithography for Patterned Media Template Fabrication

Takeshi Miyazaki, Kunito Hayashi, Kazuhiko Kobayashi, Yukio Kuba, Hisayuki Morita, Hideyuki Nita, and Hideyuki Ohyi
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (607K)]

06FB03 : Effect of Annealing on Mechanical Properties of Materials Formed by Focused Au or Si Ion-Beam-Induced Chemical Vapor Deposition Using Phenanthrene

Takuma Yo, Hideaki Tanaka, Takahiro Nagata, Naoki Fukata, Toyohiro Chikyow, Akira Sakai, and Junichi Yanagisawa
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (448K)]

06FB04 : The Application of Disturbance Response Decoupling to the Vibration Control of an Electron Beam Lithography System

Fu-Cheng Wang, Yu-Chia Tsao, and Jia-Yush Yen
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (288K)]

06FB05 : Simulation of Fogging Electrons in Electron Beam Lithography

Masatoshi Kotera and Takeshi Maekawa
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (302K)]

Resist Materials and Processing

06FC01 : Pattern Freezing Process Free Litho–Litho–Etch Double Patterning

Tomoyuki Ando, Masaru Takeshita, Ryoichi Takasu, Yoshihiro Yoshii, Jun Iwashita, Shogo Matsumaru, Sho Abe, and Takeshi Iwai
Published June 22, 2009 (10 pages)
[Abstract] [Full Text PDF : (702K)]

06FC02 : Extreme Ultraviolet Resist Outgassing Quantification Verification by Resist Film Analysis

Shinji Kobayashi, Julius Joseph Santillan, Hiroaki Oizumi, and Toshiro Itani
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (222K)]

06FC03 : Effect of Molecular Structure on Depth Profile of Acid Generator Distribution in Chemically Amplified Resist Films

Takehiro Fukuyama, Takahiro Kozawa, Kazumasa Okamoto, Seiichi Tagawa, Makiko Irie, Takeyoshi Mimura, Takeshi Iwai, Junichi Onodera, Ichiro Hirosawa, Tomoyuki Koganesawa, and Kazuyuki Horie
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (222K)]

06FC04 : Micro Roll-to-Roll Patterning Process and Its Application on Flexible Display

Cheng-Yao Lo, Johanna Kiitola-Keinänen, Olli-Heikki Huttunen, Jarno Petäjä, Jukka Hast, Arto Maaninen, Harri Kopola, Hiroyuki Fujita, and Hiroshi Toshiyoshi
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (831K)]

06FC05 : Correlation between C₃₇ Parameters and Acid Yields in Chemically Amplified Resists upon Exposure to 75 keV Electron Beam

Kenichiro Natsuda, Takahiro Kozawa, Kazumasa Okamoto, Akinori Saeki, and Seiichi Tagawa
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (170K)]

06FC06 : Dynamics of Radical Cation of Poly(4-hydroxystyrene) and Its Copolymer for Extreme Ultraviolet and Electron Beam Resists

Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, and Seiichi Tagawa
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (154K)]

06FC07 : Studies of the Photo Acid Generator Material Design for Chemically Amplified Photoresists

Yoshiyuki Utsumi, Takehiro Seshimo, Yoshitaka Komuro, Akiya Kawaue, Keita Ishiduka, Kensuke Matsuzawa, Hideo Hada, and Junichi Onodera
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (255K)]

06FC08 : Decomposition Analysis of Chemically Amplified Resists for Improving Critical Dimension Control

Daiju Shiono, Hideo Hada, Taku Hirayama, Junichi Onodera, Takeo Watanabe, and Hiroo Kinoshita
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (189K)]

06FC09 : Reactivity of Halogenated Resist Polymer with Low-Energy Electrons

Hiroki Yamamoto, Takahiro Kozawa, Akinori Saeki, Seiichi Tagawa, Takeyoshi Mimura, Hiroto Yukawa, and Junichi Onodera
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (157K)]

06FC10 : Effect of Amine Additive in Photoacid Generator Bonded Resist for Extreme Ultraviolet and Electron Beam Lithography

Tomomi Nakahara, Takeo Watanabe, Hiroo Kinoshita, Takayasu Mochizuki, Yoshiyuki Takahara, Yoshinobu Uozumi, and Kouji Nakagawa
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (411K)]

Nanodevices

06FD01 : Boolean Logic Gates Utilizing GaAs Three-Branch Nanowire Junctions Controlled by Schottky Wrap Gates

Shaharin Fadzli Bin Abd Rahman, Daisuke Nakata, Yuta Shiratori, and Seiya Kasai
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (453K)]

06FD02 : Unipolar Resistance Switching in Polymeric Resistance Random Access Memories

Mijung Kim and Ohyun Kim
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (230K)]

06FD03 : Novel Nano-structured Metal–Semiconductor–Metal Photodetector with High Peak Voltage

Tomoko Borsa, Dylan F. Williams, Paul D. Hale, and Bart Van Zeghbroeck
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (413K)]

06FD04 : Nanomold Fabrication and Nanoimprint Devices Using Advanced Blu-ray Disc Technology

Sohmei Endoh and Kazuya Hayashibe
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (337K)]

06FD05 : Deep-Etched Photonic Crystal Laser Structure of InP-Based Asymmetric Multiple Quantum Wells

Jiun-Cheng Bai, Chun-Yang Chen, Chien-Liang Chiu, Jin-Yuan Hsin, Eu-Ying Lin, and Tsong-Sheng Lay
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (219K)]

06FD06 : Characteristics of Pentacene Organic Field-Effect Transistors with Self-Assembled-Monolayer-Treated HfO₂ Gate Oxide

Sunwoo Lee, Sang Seol Lee, Jung Ho Park, In-Sung Park, and Jinho Ahn
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (570K)]

06FD07 : Analysis of Quantum Effects on Backscattering from Drain Region of Double-Gate Metal–Oxide–Semiconductor Field-Effect Transistor

Toshiyuki Tsutsumi and Kazutaka Tomizawa
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (512K)]

06FD08 : Transport Properties of a DNA-Conjugated Single-Wall Carbon Nanotube Field-Effect Transistor

JongSeung Hwang, Duk Soo Kim, Doyeol Ahn, and Sung Woo Hwang
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (201K)]

06FD09 : Effects of Geometrical Fin Parameters on Transfer Characteristics in Triple-Gate Fin Field Effect Transistors

Jae-Joon Song, Dae-hyun Moon, and Ohyun Kim
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (227K)]

06FD10 : Conduction Path Fluctuation in Silicon Two-Dimensional Tunnel Junction Array

Koki Matsushita and Anri Nakajima
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (203K)]

06FD11 : Charge Trapping Characteristics of Variable Oxide Thickness Tunnel Barrier with SiO₂/HfO₂ or Al₂O₃/HfO₂ Stacks for Nonvolatile Memories

Kwan-Su Kim, Myung-Ho Jung, Goon-Ho Park, Jongwan Jung, and Won-Ju Cho
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (390K)]

06FD12 : Simulation of Nanoscale Two-Bit Not-And-type Silicon–Oxide–Nitride–Oxide–Silicon Nonvolatile Memory Devices with a Separated Double-Gate Fin Field Effect Transistor Structure Containing Different Tunneling Oxide Thicknesses

Se Woong Oh, Sang Su Park, Dong Hun Kim, Hyun Woo Kim, and Tae Whan Kim
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (364K)]

06FD13 : Smart Gas Sensor and Noise Properties of Single ZnO Nanowire

Soo-Han Choi, Seong-Min Yee, Hyun-Jin Ji, Jae-Wan Choi, Young-Seung Cho, and Gyu-Tae Kim
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (334K)]

06FD14 : Electrical Characterization of Screen-Printed Conductive Circuit with Silver Nanopaste

Jong-Woong Kim and Seung-Boo Jung
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (1363K)]

Nanofabrication

06FE01 : Graphite Shell Film Formation Induced by Eduction Phenomenon of Ga Implanted by Focused Ion Beam

Reo Kometani, Toshinari Ichihashi, Shin'ichi Warisawa, and Sunao Ishihara
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (207K)]

06FE02 : Hierarchically Organized Micro/Nano-Structures of TiO₂

Ivan Turkevych, Yuriy Pihosh, Koujirou Hara, Zhong-Sheng Wang, and Michio Kondo
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (282K)]

06FE03 : Silicon Crystal Nanowires Produced by Metal-Induced Lateral Crystallization

Gou Nakagawa and Tanemasa Asano
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (617K)]

06FE04 : Solution Conductivity as a Key Factor for Thin Silica Coating on Colloidal Silver

Ken-ichi Nomura, Shinji Fujii, Yoshimichi Ohki, Koichi Awazu, Makoto Fujimaki, Nobuko Fukuda, and Tsutomu Hirakawa
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (168K)]

06FE05 : Effect of Reflow Oxidation on Si Surface Roughness during High-Temperature Annealing

Koji Araki, Hiromichi Isogai, Ryuji Takeda, Koji Izunome, Yoshiaki Matsushita, Naota Takahashi, and Xinwei Zhao
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (430K)]

06FE06 : Formation and Characterization of Periodic Arrays of Nickel Silicide Nanodots on Si(111) Substrates

Shao-Liang Cheng, Chien-Hsun Wang, and Hui Chen
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (326K)]

06FE07 : Fabrication of a Spin-Polarized Electron Source with a Single Magnetite Whisker

Morihiro Okada, Shigekazu Nagai, Youichiro Neo, Koichi Hata, and Hidenori Mimura
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (448K)]

06FE08 : Nanohole Arrays Fabricated on Gold Surfaces by Total Wet Nanopatterning through Block Copolymer Masks

Ryoko Watanabe, Kaori Ito, Tomokazu Iyoda, and Hiroshi Sakaguchi
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (255K)]

06FE09 : Smooth and Vertical Profile Dry Etching of Si Using XeF₂ Plasma

Akihiro Matsutani, Hideo Ohtsuki, and Fumio Koyama
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (134K)]

Nanomaterials

06FF01 : Tunneling-Injection Single-Photon Emitter Using Charged Exciton State

Toshiyuki Miyazawa, Toshihiro Nakaoka, Kazuya Takemoto, Shinichi Hirose, Shigekazu Okumura, Motomu Takatsu, Tatsuya Usuki, Naoki Yokoyama, and Yasuhiko Arakawa
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (178K)]

06FF02 : High-Brightness Spin-Polarized Electron Source Using Semiconductor Photocathodes

Tomohiro Nishitani, Masao Tabuchi, Yoshikazu Takeda, Yuji Suzuki, Kazuya Motoki, and Takashi Meguro
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (212K)]

06FF03 : Ink-Jet Printing of a Single-Walled Carbon Nanotube Thin Film Transistor

Haruya Okimoto, Taishi Takenobu, Kazuhiro Yanagi, Yasumitsu Miyata, Hiromichi Kataura, Takeshi Asano, and Yoshihiro Iwasa
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (182K)]

06FF04 : Application of Carbon-Nanotube-Composite Japanese Washi Paper to Authentication Systems

Keisuke Watanabe and Takahide Oya
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (248K)]

06FF05 : Deposition of Nanoparticle-Aggregated ZnO Thin Films by Drop Coating Method

Kasilingam Senthilkumar, Hirosi Okamoto, Masayuki Tokunaga, Obuliraj Senthilkumar, and Yasuhisa Fujita
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (207K)]

06FF06 : Synthesis of Brushlike Carbon Nanotubes Using Wet-Processed Catalyst

Takeshi Nagasaka, Masahiro Yamamura, Masaki Kondo, Yoshito Watanabe, Kyoko Akasaka, Kaori Hirahara, and Yoshikazu Nakayama
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (264K)]

06FF07 : Band Gap Variation of Mn Doped ZnO Films Prepared by Spray Pyrolysis Technique

Munisamy Subramanian, Vijayalakshmi Selvaraj, Pugajendy Ilanchezhiyan, Ganesan Mohan Kumar, Ramasamy Jayavel, and Tetsuo Soga
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (558K)]

06FF08 : Carrier Dynamics of Deep-Level States in InGaN/GaN Multiquantum Wells

Hooyoung Song, Jin Soak Kim, Eun Kyu Kim, Yong Gon Seo, Sung-Min Hwang, and Keun Man Song
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (234K)]

06FF09 : Continuous Synthesis of Carbon Nanotubes Using a Plasma-Enhanced Chemical Vapor Deposition System at Atmospheric Pressure

Seok Seung Shin, Bum Ho Choi, Young Mi Kim, and Young Baek Kim
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (460K)]

06FF10 : Synthesis of Functionalized Carbon Nanotubes/Phenolic Nanocomposites and Its Electrical and Thermal Conductivity Measurements

Chie Gau, Shuo-Ying Chen, Hsin-Luen Tsai, Syh-Tsang Jenq, Cheng-Ching Lee, Yu-Der Chen, and Ting-Hua Chien
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (390K)]

06FF11 : Formation of Planar Magic Ag Nanostructures

Ya-Ping Chiu and Bo-Chao Huang
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (295K)]

06FF12 : Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition

Katsuhisa Murakami, Naoki Matsubara, Satoshi Ichikawa, Toshiya Kisa, Takahito Nakayama, Kunio Takamoto, Fujio Wakaya, Mikio Takai, Silke Petersen, Brigitte Amon, and Heiner Ryssel
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (218K)]

06FF13 : Functionalization of a Polymer Using Nanoparticles Immobilized in Supercritical Carbon Dioxide

Yutaka Kuwahara, Minoru Morita, Tomohito Nagami, Akio Tanaka, Tomoki Iwanaga, Kaoru Kumamaru, Tsuyoshi Sawada, Mitsuru Sasaki, Motonobu Goto, and Masaki Sato
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (205K)]

06FF14 : Self-Assembled Two-Dimensional Array of Gold Nanoparticles with Different Size for the Sensing Application

Wan-Chao Li, Sang-Eun Park, Jongsung Kim, and Sang-Wha Lee
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (939K)]

06FF15 : Fine and Large Coulomb Diamonds in a Silicon Quantum Dot

Tetsuo Kodera, Thierry Ferrus, Toshihiro Nakaoka, Gareth Podd, Michael Tanner, David Williams, and Yasuhiko Arakawa
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (322K)]

Nano Tool

06FG01 : Adhesion Control between Resist and Photomask Blank

Masaaki Kurihara, Sho Hatakeyama, Kouji Yoshida, Makoto Abe, Daisuke Totsukawa, Yasutaka Morikawa, Hiroshi Mohri, Morihisa Hoga, Naoya Hayashi, Hiroyuki Ohtani, and Masamichi Fujihira
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (179K)]

06FG02 : In-situ Visualization and Two Dimensional Mapping of Local Electric Field at Probe Apex Using Scanning Electron Optical System

Jun-ichi Fujita, Yuta Ikeda, and Ikumi Suzuki
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (610K)]

06FG03 : Molecular Dynamics Simulations for Molecular Linear Motor Inside Nanotube

Yoshinori Ueno, Hiroshi Somada, Kaori Hirahara, Yoshikazu Nakayama, and Seiji Akita
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (179K)]

06FG04 : Effect of Gaseous Dissipation of Oscillating Cantilevered Carbon Nanotubes

Shun Fukami, Takayuki Arie, and Seiji Akita
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (176K)]

06FG05 : Fabrication and Characteristics of Micro-Electro-Mechanical-System-Based Tilt Sensor

Ju Chan Choi and Seong Ho Kong
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (764K)]

06FG06 : Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy

Kojiro Tamaru, Keiichiro Nonaka, Masao Nagase, Hiroshi Yamaguchi, Shin'ichi Warisawa, and Sunao Ishihara
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (374K)]

06FG07 : Evaluation of Thermal–Mechanical Vibration Amplitude and Mechanical Properties of Carbon Nanopillars Using Scanning Electron Microscopy

Keiichiro Nonaka, Kojiro Tamaru, Masao Nagase, Hiroshi Yamaguchi, Shin'ichi Warisawa, and Sunao Ishihara
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (412K)]

06FG08 : Evaluation Method of the Quality Factor of Micromechanical Resonators Using Electron Beams

Hiroki Ashiba, Shin'ichi Warisawa, and Sunao Ishihara
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (339K)]

06FG09 : First-Principles Simulation on Orientation Dependence of Piezoresistance Properties in Silicon Nanowires

Koichi Nakamura, Yoshitada Isono, Toshiyuki Toriyama, and Susumu Sugiyama
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (330K)]

Nanoimprint, Nanoprint and Rising Lithography

06FH01 : Fine Pattern Fabrication by the Molded Mask Method (Nanoimprint Lithography) in the 1970s

Susumu Fujimori
Published June 22, 2009 (7 pages)
[Abstract] [Full Text PDF : (670K)]

06FH02 : Direct Imprinted Conductive Patterns using Nanosilver Colloid-Applied UV Curable Resist

Jun-Hyuk Choi, Soon-Won Lee, Jun-Ho Jeong, Dae-Geun Choi, Ji-Hye Lee, and Eung-Sug Lee
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (392K)]

06FH03 : Molecular Dynamics Study to Identify Mold Geometry Effect on the Pattern Transfer in Thermal Nanoimprint Lithography

Seunghwa Yang, Suyoung Yu, and Maenghyo Cho
Published June 22, 2009 (7 pages)
[Abstract] [Full Text PDF : (892K)]

06FH04 : Design and Fabrication of Structural Color Filters with Polymer-Based Guided-Mode Resonant Gratings by Nanoimprint Lithography

Yoshiaki Kanamori, Hiroki Katsube, Tomonobu Furuta, Shoji Hasegawa, and Kazuhiro Hane
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (1597K)]

06FH05 : Replication of Three-Dimensional Rotary Micromechanism by Membrane-Assisted Transfer Molding

Shoji Maruo, Takuya Hasegawa, and Naoki Yoshimura
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (485K)]

06FH06 : Development of Ni–P-Plated Inconel Alloy Mold for Imprinting on Pyrex Glass

Harutaka Mekaru, Chieko Okuyama, Tomoyuki Tsuchida, Manabu Yasui, Takeshi Kitadani, Michiru Yamashita, Jun-ichi Uegaki, and Masaharu Takahashi
Published June 22, 2009 (10 pages)
[Abstract] [Full Text PDF : (1110K)]

06FH07 : Study on Molding of a Nanostructured Plastic Plate and Its Surface Properties

Yeong-Eun Yoo, Tae Hoon Kim, Doo-Sun Choi, Hak-Joo Lee, Seong Joo Choi, and Sun Kyung Kim
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (766K)]

06FH08 : Assessing Aptitude of Plated Ni–W Film as Mold Materials for Borosilicate Glass

Manabu Yasui, Yu Motoizumi, Satoru Kaneko, Kiyohito Hirai, Koh-ichi Sugimoto, Yasuo Hirabayashi, Masaharu Takahashi, and Ryutaro Maeda
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (2320K)]

06FH09 : Microstructuring of 45-µm-Deep Dual Damascene Openings in SU-8/Si by UV-Assisted Thermal Imprinting with Opaque Mold

Sung-Won Youn, Akihisa Ueno, Masaharu Takahashi, and Ryutaro Maeda
Published June 22, 2009 (7 pages)
[Abstract] [Full Text PDF : (1006K)]

06FH10 : Simulation and Experimental Study on Recovery of Polymer during Hot Embossing

Peng Jin, Yulong Gao, Tingting Liu, Jiubin Tan, Zhe Wang, and Haoran Zhou
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (589K)]

06FH11 : Application of Nanoimprint Lithography to Fabrication of Distributed Feedback Laser Diodes

Masaki Yanagisawa, Yukihiro Tsuji, Hiroyuki Yoshinaga, Naoya Kono, and Kenji Hiratsuka
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (154K)]

06FH12 : Thermal Nanoimprint of a Polystyrene and Poly(4-vinylpyridine) Double-Layer Thin Film and Visualization Determination of Its Internal Structure by Transmission Electron Microscopy

Masaru Nakagawa, Noriyoshi Kamata, Tomokazu Iyoda, and Shinji Matsui
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (235K)]

06FH13 : Molecular Dynamics Study of Nanoimprint Lithography for Glass Materials

Kazuhiro Tada, Yoshihisa Kimoto, Masaaki Yasuda, Hiroaki Kawata, and Yoshihiko Hirai
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (472K)]

06FH14 : Deformation Mechanisms of Bilayer Structures for Reducing Imprinting Force

Chung Han Yao, Min Huei Cheng, and Cheng Kuo Sung
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (258K)]

06FH15 : Characteristics of Antisticking Layer Formed by CHF₃ Plasma Irradiation for Nanoimprint Molds

Makoto Okada, Ken-ichiro Nakamatsu, Yuji Kang, Kazuhiro Kanda, Yuichi Haruyama, and Shinji Matsui
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (322K)]

06FH16 : Thermal Imprint Lithography onto Filler Incorporated Composite Resin

Sangmoon Lee, Jungbok Kwak, Yongsoo Oh, and Hwan-Soo Lee
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (636K)]

06FH17 : Grating Substrates Fabricated by Nanoimprint Lithography for Fluorescence Microscopy

Naoko Akashi, Keiko Tawa, Yoshiro Tatsu, Kenji Kintaka, and Junji Nishii
Published June 22, 2009 (7 pages)
[Abstract] [Full Text PDF : (564K)]

06FH18 : Homogeneity of Residual Layer thickness in UV Nanoimprint Lithography

Hiroshi Hiroshima and Hidemasa Atobe
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (389K)]

06FH19 : Optical Characteristics of Moth-Eye Structures on Poly(methyl methacrylate) and Polycarbonate Sheets Fabricated by Thermal Nanoimprinting Processes

Hung-Yin Tsai and Chia-Jen Ting
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (443K)]

06FH20 : Mold Design and Fabrication for Surface Relief Gratings by Glass Nanoimprint

Toshiharu Mori, Yoshihisa Kimoto, Haruya Kasa, Kenji Kintaka, Norihito Hotou, Junji Nishii, and Yoshihiko Hirai
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (360K)]

06FH21 : Seamless Pattern Fabrication of Large-Area Nanostructures Using Ultraviolet Nanoimprint Lithography

Shingo Kataza, Kentaro Ishibashi, Mitsunori Kokubo, Hiroshi Goto, Jun Mizuno, and Shuichi Shoji
Published June 22, 2009 (3 pages)
[Abstract] [Full Text PDF : (526K)]

Bio MEMS, Lab on a Chip

06FJ01 : Noise Reduction of Carbon Nanotube Field-Effect Transistor Biosensors by Alternating Current Measurement

Yasuki Yamamoto, Yasuhide Ohno, Kenzo Maehashi, and Kazuhiko Matsumoto
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (243K)]

06FJ02 : Microfluidic and Label-Free Multi-Immunosensors Based on Carbon Nanotube Microelectrodes

Yuichi Tsujita, Kenzo Maehashi, Kazuhiko Matsumoto, Miyuki Chikae, Yuzuru Takamura, and Eiichi Tamiya
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (304K)]

06FJ03 : Development of an All-Fluoroplastic Microfluidic Device Applied as a Nanoliter Sample Injector

Takaomi Sato, Kentaro Kawai, Masaki Kanai, and Shuichi Shoji
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (299K)]

06FJ04 : Fabrication of Si Nanowire Field-Effect Transistor for Highly Sensitive, Label-Free Biosensing

Takashi Kudo, Toshihiro Kasama, Takeshi Ikeda, Yumehiro Hata, Shiho Tokonami, Shin Yokoyama, Takamaro Kikkawa, Hideo Sunami, Tomohiro Ishikawa, Masato Suzuki, Kiyoshi Okuyama, Tetsuo Tabei, Kensaku Ohkura, Yasuhisa Kayaba, Yuichiro Tanushi, Yoshiteru Amemiya, Yoshinori Cho, Tomomi Monzen, Yuji Murakami, Akio Kuroda, and Anri Nakajima
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (207K)]

06FJ05 : Wirelessly Driven and Battery-Free Love Wave Biosensor Based on Dinitrophenyl Immobilization

Haekwan Oh, Wen Wang, Keekeun Lee, Hyun C. Yoon, and Sangsik Yang
Published June 22, 2009 (7 pages)
[Abstract] [Full Text PDF : (769K)]

06FJ06 : Detection of Zearalenone Using a Metal–Oxide–Semiconductor Field-Effect-Transistor-Based Biosensor Employing a Pt Reference Electrode

Byounghyun Lim, Byunghyun Cho, Jang-Kyoo Shin, Ho-Jin Choi, Sang-Ho Seo, Sung-Wook Choi, and Hyang Sook Chun
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (427K)]

Microsystem Technology and MEMS

06FK01 : Fabrication of Three-Dimensional Transparent SiO₂ Microstructures by Microstereolithographic Molding

Makoto Inada, Daisuke Hiratsuka, Junichi Tatami, and Shoji Maruo
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (215K)]

06FK02 : Fabrication of a Field Emitter Array with a Built-in Einzel Lens

Masayoshi Nagao, Tomoya Yoshida, Seigo Kanemaru, Yoichiro Neo, and Hidenori Mimura
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (391K)]

06FK03 : Silicon Beam Resonator Utilizing the Third-Order Bending Mode

Mitsuhiro Okada, Hironori Nagasaki, Akimasa Tamano, Kazuya Niki, Hiroshi Tanigawa, and Kenichiro Suzuki
Published June 22, 2009 (8 pages)
[Abstract] [Full Text PDF : (308K)]

06FK04 : Fabrication of Cantilevers by Two-Step Transfer Process without Lithography

Hiroaki Kawata, Kenichi Ryugou, Saki Ohta, Masaaki Yasuda, and Yoshihiko Hirai
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (362K)]

06FK05 : Fabrication of Photonic Bandgap Fiber Gas Cell Using Focused Ion Beam Cutting

Xuefeng Li, Joanna Pawłat, Jinxing Liang, Guan Xu, and Toshitsugu Ueda
Published June 22, 2009 (5 pages)
[Abstract] [Full Text PDF : (308K)]

06FK06 : Improvement of Specimen Preparation Process for Bulge Test Using the Combination of XeF₂ and Deep Reactive Ion Etching

Chung-Lin Wu, Ming-Chuen Yip, and Weileun Fang
Published June 22, 2009 (6 pages)
[Abstract] [Full Text PDF : (1318K)]

06FK07 : A Micromachined Flexible Hollow Cathode Discharge Device

Geunyoung Kim, Kang-il Kim, Sang Sik Yang, and Soo-ghee Oh
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (304K)]

06FK08 : Analysis and Fabrication of Ampere-Force Actuated Bistable Curved Beam

Ivransa Zuhdi Pane and Tanemasa Asano
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (214K)]

06FK09 : Enhanced Sensitivity of Novel Surface Acoustic Wave Microelectromechanical System-Interdigital Transducer Gyroscope

Wen Wang, Haekwan Oh, Keekeun Lee, Sungjin Yoon, and Sangsik Yang
Published June 22, 2009 (8 pages)
[Abstract] [Full Text PDF : (840K)]

06FK10 : Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Ken Kunitomo, and Toshitsugu Ueda
Published June 22, 2009 (4 pages)
[Abstract] [Full Text PDF : (372K)]

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