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Japanese Journal of Applied Physics

Volume 50, Number 6, June 2011

Special Issue: Microprocesses and Nanotechnology

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Editors
Foreword

Review paper

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06GA01 : Lithography — Green and Getting Greener
Harry J. Levinson
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (329K)]

DUV, VUV, EUV lithography and metrology

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06GB01 : Using FlexRay in Computational Lithography
Robert Socha, Wenjin Shao, Youri van Dommelen, Dorothe Oorschot, Henry Meggens, Venu Vellanki, Paul van Adrichem, Xu Xie, Justin Gau, Rafael Aldana, Fei Du, Ronald Goossens, Zongchang Yu, Liesbeth Reijnen, Roel Knops, Koen Schreel, Stephen Hsu, Luoqi Chen, and Keith Gronlund
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (1143K)]
06GB02 : In-situ Contamination Thickness Measurement by Novel Resist Evaluation System at NewSUBARU
Naohiro Matsuda, Takeo Watanabe, Tetsuo Harada, Hiroo Kinoshita, Hiroaki Oizumi, and Toshiro Itani
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (1046K)]
06GB03 : Critical Dimension Measurement of an Extreme-Ultraviolet Mask Utilizing Coherent Extreme-Ultraviolet Scatterometry Microscope at NewSUBARU
Tetsuo Harada, Masato Nakasuji, Masaki Tada, Yutaka Nagata, Takeo Watanabe, and Hiroo Kinoshita
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (683K)]
06GB04 : Improvement of Flare Modeling and Derivation for Extreme Ultraviolet Optics
Masayuki Shiraishi, Tetsuya Oshino, Katsuhiko Murakami, and Hiroshi Chiba
Published June 20, 2011 (9 pages)
[Abstract] [Full Text PDF (1052K)]
06GB05 : Nonlinear Behavior of Decrease in Reflectivity of Multilayer Mirrors for Extreme Ultraviolet Lithography Optics by High-Flux Extreme Ultraviolet Irradiation in Various Vacuum Environments
Masahito Niibe, Keigo Koida, Yukinobu Kakutani, Takahiro Nakayama, Shigeru Terashima, Akira Miyake, Hiroyoshi Kubo, Shuichi Matsunari, Takashi Aoki, and Shintaro Kawata
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (619K)]
06GB06 : Low Energy Xe+ Ion Beam Machining of the Ultralow Expansion Glass Substrates for Aspherical Extreme Ultraviolet Lithography Projection Optics
Hironori Endo, Junya Yamada, Shahjada A. Pahlovy, and Iwao Miyamoto
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (973K)]
06GB07 : Impact of Process-Effect Correction Strategies on Variability of Critical Dimension and Electrical Characteristics in Extreme Ultraviolet Lithography
Philip C. W. Ng, Sheng-Wei Chien, Bo-Sen Chang, Kuen-Yu Tsai, Yi-Chang Lu, Jia-Han Li, and Alek C. Chen
Published June 20, 2011 (9 pages)
[Abstract] [Full Text PDF (1042K)]
06GB08 : Application of Extreme Ultraviolet Lithography to Test Chip Fabrication
Kazuo Tawarayama, Yumi Nakajima, Suigen Kyoh, Hajime Aoyama, Kentaro Matsunaga, Satoshi Tanaka, and Shunko Magoshi
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (1334K)]
06GB09 : Effect of Electron Density on Extreme Ultraviolet Output of a Z-Pinch Xe Discharge Produced Plasma Source
Bin Huang, Yasuhiro Takimoto, Masato Watanabe, and Eiki Hotta
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (591K)]
06GB10 : Transmission Grating Fabrication for Replicating Resist Patterns of 20 nm and Below
Yuya Yamaguchi, Yasuyuki Fukushima, Tetsuo Harada, Takeo Watanabe, and Hiroo Kinoshita
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (858K)]
06GB11 : New Design Based Metrology for Fast Detection of Crucial Lithographic Defects
Duck-Hyung Hur, Tae-Heon Kim, Chul-Hong Park, Sang-Hoon Lee, Moon-Hyun Yoo, and Jun-Dong Cho
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (1131K)]

Electron- and ion-beam lithography

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06GC01 : Charge Modeling for Metal Layer on Insulating Substrate
Nobuhiro Okai, Tasuku Yano, and Yasunari Sohda
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (1009K)]
06GC02 : Effect of Low-Energy Ga Ion Implantation on Selective Growth of Gallium Nitride Layer on Silicon Nitride Surfaces Using Metal Organic Chemical Vapor Deposition
Kazuya Isiizumi, Jun Kikkawa, Yoshiaki Nakamura, Akira Sakai, and Junichi Yanagisawa
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (1994K)]

Resist materials and processing

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06GD01 : A New Method for Line Width Roughness Mitigation
K. Subramanya Mayya, Kang Yool, Hochul Kim, and Han-Ku Cho
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (1159K)]
06GD02 : A Highly Sensitive Inorganic Resist for Directly Fabricating Thermally Stable Oxide Pattern on Si Substrate by Low-Energy Electron-Beam Direct Writing
Kazuhiro Matsuda, Shoji Ushio, Yuki Hirokawa, Taiki Gotou, and Tadaaki Kaneko
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (697K)]
06GD03 : Dynamics of Radical Cation of Poly(styrene acrylate)-Based Chemically Amplified Resist for Extreme Ultraviolet and Electron Beam Lithography
Yasuharu Tajima, Kazumasa Okamoto, Takahiro Kozawa, Seiichi Tagawa, Ryoko Fujiyoshi, and Takashi Sumiyoshi
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (259K)]
06GD04 : Theoretical Study of Photoacid Generators for Extreme Ultraviolet Resist
Masayuki Endo and Seiichi Tagawa
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (941K)]

Nanocarbon

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06GE01 : Preparation of Ultrahigh-Density Magnetic Nanowire Arrays beyond 1 Terabit/Inch2 on Si Substrate Using Anodic Aluminum Oxide Template
Tomohiro Shimizu, Kazumo Aoki, Yoshinori Tanaka, Toshifumi Terui, and Shoso Shingubara
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (305K)]
06GE02 : Highly Conductive Vertically Aligned Carbon Nanotubes Grown on Mg0.3Zn0.7O Thin Film Template Using Thermal Chemical Vapour Deposition Method
Muhamad Salina, Mohamad Hafiz Mamat, Suriani Abu Bakar, Rafidah Ahmad, Yosri Mohd Siran, Syahril Anuar M. Rejab, Ahmad Jais Asis, Shaharudin Tahiruddin, and Mohamad Rusop
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (659K)]
06GE03 : Robust Noise Characteristics in Carbon Nanotube Transistors Based on Stochastic Resonance and Their Summing Networks
Yasufumi Hakamata, Yasuhide Ohno, Kenzo Maehashi, Koichi Inoue, and Kazuhiko Matsumoto
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (950K)]
06GE04 : Thickness Control of Graphene Overlayer via Layer-by-Layer Growth on Graphene Templates by Chemical Vapor Deposition
Ryota Negishi, Hiroki Hirano, Yasuhide Ohno, Kenzo Haehashi, Kazuhiko Matsumoto, and Yoshihiro Kobayashi
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (500K)]
06GE05 : First-Principles Simulation on Piezoresistivity in Alpha and Beta Silicon Carbide Nanosheets
Koichi Nakamura, Toshiyuki Toriyama, and Susumu Sugiyama
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (809K)]
06GE06 : Fabrication and Characteristics of Nanoscale Stacked-Tunneling-Junctions on Graphite Flake Using Focused Ion Beam
Gunasekaran Venugopal, Gui Shik Kim, and Sang-Jae Kim
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (472K)]
06GE07 : Highly Sensitive Electrical Detection of Sodium Ions Based on Graphene Field-Effect Transistors
Yasuyuki Sofue, Yasuhide Ohno, Kenzo Maehashi, Koichi Inoue, and Kazuhiko Matsumoto
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (951K)]
06GE08 : Flexible Sensing Arrays Fabricated with Carbon Nanofiber Composite Thin Films for Posture Monitoring
Fuh-Yu Chang, Ruoh-Huey Wang, Yu-Hsien Lin, Tse-Min Chen, Yueh-Feng Lee, Shu-Jiuan Huang, and Chia-Ming Liu
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (769K)]
06GE09 : Thermal Dissipation of High-Brightness Light Emitting Diode by Using Multiwalled Carbon Nanotube/SiC Composites
Bing-Jing Li, Chih-Hsiang Chang, Yun-Kuin Su, and Kwang-Jow Gan
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (532K)]
06GE10 : Enormous Shrinkage of Carbon Nanotubes under Low-Energy Electron Beam Irradiation with Uniaxial Tensile Stress
Ryuichi Ueki, Takeshi Hikata, Soichiro Ookubo, Risa Utsunomiya, Teruaki Matsuba, and Jun-ichi Fujita
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (619K)]
06GE11 : Organic Electrolyte Based Pulsed Nanoplating and Fabrication of Carbon Nanotube Network Transistors
Myung Gil Kang, Dong Hoon Hwang, Tae Geun Kim, Jong Seung Hwang, Doyeol Ahn, Dongmok Whang, and Sung Woo Hwang
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (686K)]
06GE12 : Study of Graphene Growth by Gas-Source Molecular Beam Epitaxy Using Cracked Ethanol: Influence of Gas Flow Rate on Graphitic Material Deposition
Fumihiko Maeda and Hiroki Hibino
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (312K)]
06GE13 : Fabrication of p–n–p Graphene Structure and Observation of Current Oscillation
Keita Konishi and Kanji Yoh
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (554K)]
06GE14 : Proposal of Graphene Bandgap Control by Hexagonal Network Formation
Liumin Zou, Keita Konishi, and Kanji Yoh
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (775K)]

Nanodevices

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06GF01 : Nonvolatile Resistive Memory Device Based on Poly(3,4-ethylenedioxythiophene):Poly(styrene sulfonate) Thin Film for Transparent and Flexible Applications
Jungmoo Lee and Ohyun Kim
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (891K)]
06GF02 : Development of Hybrid Photovoltaic Cells by Incorporating CuInS2 Quantum Dots into Organic Photoactive Layers
Minwoo Nam, Sehan Lee, Jaehyun Park, Sang-Wook Kim, and Kee-Keun Lee
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (854K)]
06GF03 : Novel Nanowire-Based Flip-Flop Circuit Utilizing Gate-Controlled GaAs Three-Branch Nanowire Junctions
Hiromu Shibata, Yuta Shiratori, and Seiya Kasai
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (879K)]
06GF04 : Single-Electron Stochastic Resonance Using Si Nanowire Transistors
Katsuhiko Nishiguchi and Akira Fujiwara
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (837K)]
06GF05 : Performance of an Ultraviolet Photoconductive Sensor Using Well-Aligned Aluminium-Doped Zinc-Oxide Nanorod Arrays Annealed in an Air and Oxygen Environment
Mohamad Hafiz Mamat, Zuraida Khusaimi, Musa Mohamed Zahidi, and Mohamad Rusop Mahmood
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (606K)]
06GF06 : Enhanced Optical and Electrical Properties of Inorganic Electroluminescent Devices Using the Top-Emission Structure
Jin-Young Kim, Taewon Jeong, Shang Hyeun Park, Min Jong Bae, Sunjin Song, Jeonghee Lee, Intaek Han, Donggeun Jung, Chunli Liu, and SeGi Yu
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (656K)]
06GF07 : Effect of TiO2 Nanoparticle Modification on Ultraviolet Photodetection Properties of Al-Doped ZnO Nanowire Network
Kang-Pil Kim, Daeic Chang, Sang Kyoo Lim, Soo-Keun Lee, Hong-Kun Lyu, and Dae-Kue Hwang
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (774K)]
06GF08 : Investigating the Role of Dye Dipole on Open Circuit Voltage in Solid-State Dye-Sensitized Solar Cells
Shyam S. Pandey, Kyung-Young Lee, Azwar Hayat, Yuhei Ogomi, and Shuzi Hayase
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (461K)]
06GF09 : Dye-Sensitized Solar Cell with Photoanode Made with Polystyrene-Ball-Embedded TiO2 Pastes
Yu-Ching Hsu, Tony Chang Chi Wu, I-Chun Cheng, Jian-Zhang Chen, and Mu-Rong Yang
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (490K)]
06GF10 : Physical Model for High-to-Low Resistive Switching of Gold Nanogap Junction
Yasuhisa Naitoh, Hiroshi Suga, and Masayo Horikawa
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (584K)]
06GF11 : Threshold Current Density of the Resistance Switching in Pt Nanogap Electrode
Hiroshi Suga, Touru Sumiya, Masayo Horikawa, Somu Kumaragurubaran, Tetsuo Shimizu, and Yasuhisa Naitoh
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (649K)]
06GF12 : Nickel Nanocrystals Embedded in Metal–Alumina–Nitride–Oxide–Silicon Type Low-Temperature Polycrystalline-Silicon Thin-Film Transistor for Low-Voltage Nonvolatile Memory Application
Terry Tai-Jui Wang, Yu-Cheng Liu, Chien-Hung Wu, Tien-Lin Lu, Ing-Jar Hsieh, and Cheng-Tzu Kuo
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (918K)]
06GF13 : Electrical Characteristics of WSi2 Nanocrystal Capacitors with Barrier-Engineered High-k Tunnel Layers
Hyo Jun Lee, Dong Uk Lee, Eun Kyu Kim, Hee-Wook You, and Won-Ju Cho
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (804K)]
06GF14 : Tunnel Field-Effect Transistors with Extremely Low Off-Current Using Shadowing Effect in Drain Implantation
Takahiro Mori, Tetsuji Yasuda, Tatsuro Maeda, Wataru Mizubayashi, Shin-ichi O’uchi, Yongxun Liu, Kunihiro Sakamoto, Meishoku Masahara, and Hiroyuki Ota
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (385K)]
06GF15 : Patterning Strategy for Monoelectronic Device Platform in a Complementary Metal Oxide Semiconductor Technology
Sebastien Pauliac-Vaujour, Romain Wacquez, Christian Vizioz, Thierry Chevolleau, Mathieu Pierre, Bernard Previtali, Corinne Comboroure, Nadine Bove, Benoit Roche, Maud Vinet, Xavier Jehl, Marc Sanquer, and Pierre Sixt
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (889K)]
06GF16 : Simplified Model of the Effect of Source/Drain Doping Gradient on Capacitance and Resistance in a Double-Gate Metal–Oxide–Semiconductor Field-Effect Transistor
Dae-hyun Moon, Jae-Joon Song, and Ohyun Kim
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (827K)]
06GF17 : High-Voltage Schottky Barrier Diode on Silicon Substrate
Min-Woo Ha, Cheong Hyun Roh, Dae Won Hwang, Hong Goo Choi, Hong Joo Song, Jun Ho Lee, Jung Ho Park, Ogyun Seok, Jiyong Lim, Min-Koo Han, and Cheol-Koo Hahn
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (872K)]
06GF18 : Characterization of Low-Frequency Noise in GaAs Nanowire Field-Effect Transistors Controlled by Schottky Wrap Gate
Kensuke Miura, Yuta Shiratori, and Seiya Kasai
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (1116K)]
06GF19 : Thermal Stability of Pd Gate in Pseudomorphic InGaAs Heterostructures
Tomotsugu Ishikura, Zhixin Cui, Takashi Matsuda, and Kanji Yoh
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (395K)]
06GF20 : A Theoretical Study of a Novel Single-Electron Refrigerator Fabricated from Semiconductor Materials
Hiroya Ikeda and Faiz Salleh
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (742K)]
06GF21 : Low-Frequency Contact Noise of GaN Nanowire Device Detected by Cross-Spectrum Technique
Liang-Chen Li, Kuo-Hsun Huang, Jia-An Wei, Yuen-Wuu Suen, Ting-Wei Liu, Chia-Chun Chen, Li-Chyong Chen, and Kuei-Hsien Chen
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (727K)]

Nanofabrication

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06GG01 : The Impact of Y Addition into TiO2 on Electronic States and Resistive Switching Characteristics
Akio Ohta, Yuta Goto, Mohd Fairuz Kazalman, Guobin Wei, Hideki Murakami, Seiichiro Higashi, and Seiichi Miyazaki
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (1178K)]
06GG02 : Fabrication of Metal Embedded Nano-Cones for Single Quantum Dot Emission
Jae-Hoon Huh, Claus Hermannstädter, Kouichi Akahane, Hirotaka Sasakura, Nahid A. Jahan, Masahide Sasaki, and Ikuo Suemene
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (843K)]
06GG03 : Multilayered Thin Metal Film Deposition by Sequential Operation of Nanosilicon Electron Emitter in Metal–Salt Solutions
Toshiyuki Ohta, Bernard Gelloz, and Nobuyoshi Koshida
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (593K)]
06GG04 : Orientation-Controlled and Long-Range-Ordered Self-Assembled Nanodot Array for Ultrahigh-Density Bit-Patterned Media
Takashi Akahane, Miftakhul Huda, Takuro Tamura, You Yin, and Sumio Hosaka
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (665K)]
06GG05 : Annealing Effect of W Incorporated Diamond-Like Carbon Fabricated by Ga Focused Ion Beam Chemical Vapor Deposition
Akira Wada, Tsuneo Suzuki, Masahito Niibe, Haruhiko Ito, and Kazuhiro Kanda
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (481K)]
06GG06 : Fabrication of 10-nm-Order Block Copolymer Self-Assembled Nanodots for High-Density Magnetic Recording
Miftakhul Huda, Takashi Akahane, Takuro Tamura, You Yin, and Sumio Hosaka
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (588K)]
06GG07 : Inductively Coupled Plasma Etching of Silicon Using Solid Iodine as an Etching Gas Source
Akihiro Matsutani, Hideo Ohtsuki, and Fumio Koyama
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (823K)]
06GG08 : Nanosize Patterning with Nanoimprint Lithography Using Poly(vinyl alcohol) Transfer Layer
In-Sung Park, William T. Nichols, and Jinho Ahn
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (521K)]
06GG09 : Morphological and Electrical Properties of Self-Textured Aluminum-Doped Zinc Oxide Films Prepared by Direct Current Magnetron Sputtering for Application to Amorphous Silicon Solar Cells
Young Baek Kim, Bum Ho Choi, Jong Ho Lee, and Jin Hyeok Kim
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (595K)]
06GG10 : A Colloidal Route to Detection of Organic Molecules Based on Surface-Enhanced Raman Spectroscopy Using Nanostructured Substrate Derived from Aerosols
Masao Gen, Hideo Kakuta, Yoshihito Kamimoto, and I. Wuled Lenggoro
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (1252K)]
06GG11 : Nanograting Fabrication on the Surface of Silicon and Gallium Arsenide Using Femtosecond Laser Pulses
Dae-jin Kim, Tae-hong Kim, Woo-young Jang, Ki-Soo Lim, Myeongkyu Lee, and Ik-Bu Sohn
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (739K)]
06GG12 : Nanofabrication of Nickel Stamp for Replication of Polymer Multilevel Nanolens Arrays via Modified Two-Step Anodization Process
Kyoung Je Cha, Bong-Kee Lee, and Dong Sung Kim
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (788K)]
06GG13 : Fabrication of Polymer Micropyramid/Nanolens Combined Structures Using Microstructured Nanodimpled Aluminum Stamp
Kyoung Je Cha, Bong-Kee Lee, and Dong Sung Kim
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (642K)]
06GG14 : Electron Transport Properties of Pt Nanoarch Fabricated by Electron-Beam-Induced Deposition
Fujio Wakaya, Kunio Takamoto, Tsuyoshi Teraoka, Katsuhisa Murakami, Satoshi Abo, and Mikio Takai
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (489K)]
06GG15 : Large Magnetoresistance Switching Phenomena in Nanoconduction Path Formed with Dielectric Breakdown of SiO2 Multilayered with Ferromagnetic Film
Yuichi Shiotani, Kohei Shimomura, Tomohiro Shimizu, and Shoso Shingubara
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (563K)]

Nanomaterials

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06GH01 : Ferromagnetic MnAs Nanocluster Composites Position-Controlled on GaAs (111)B Substrates toward Lateral Magnetoresistive Devices
Keita Komagata, Shinjiro Hara, Shingo Ito, and Takashi Fukui
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (821K)]
06GH02 : Silicon Beam Microelectromechanical Systems Resonator with a Sliding Electrode
Tomohiro Oka, Takuya Ishino, Hiroshi Tanigawa, and Kenichiro Suzuki
Published June 20, 2011 (8 pages)
[Abstract] [Full Text PDF (1334K)]
06GH03 : Self-Aligned Formation of Nanoscale Phase Change Materials for Nonvolatile Memory Application
Seung-Yun Lee, Soun Jung, Sung-Min Yoon, and Young Sam Park
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (797K)]
06GH04 : Controllable Growth of Vertically Aligned Aluminum-Doped Zinc Oxide Nanorod Arrays by Sonicated Sol–Gel Immersion Method depending on Precursor Solution Volumes
Mohamad Hafiz Mamat, Zuraida Khusaimi, Musa Mohamed Zahidi, Suriani Abu Bakar, Yosri Mohd Siran, Syahril Anuar Md Rejab, Ahmad Jaril Asis, Shawaluddin Tahiruddin, Saifollah Abdullah, and Mohamad Rusop Mahmood
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (824K)]
06GH05 : Nanostructured ZnO/Conjugated Polymer for p–n Heterojunctions
Chun Mei Yang, Min Hsiung Hon, and Ing Chi Leu
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (1050K)]
06GH06 : A Three-Dimensional Nanostructure Consisting of Hollow TiO2 Spheres Fabricated by Atomic Layer Deposition
Wen-Jen Lee, Min-Hsiung Hon, Yi-Wen Chung, and Jian-Hong Lee
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (805K)]
06GH07 : Distinctive Feature of Ripening During Growth Interruption of InGaAs Quantum Dot Epitaxy Using Bi as a Surfactant
Hiroshi Okamoto, Takehiko Tawara, Kouta Tateno, Hideki Gotoh, Hidehiko Kamada, and Tetsuomi Sogawa
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (612K)]
06GH08 : Effect of Silicon Doping on the Photoluminescence and Photoreflectance Spectra of Catalyst-Free Molecular Beam Epitaxy–Vapor Liquid Solid Grown GaAs Nanowires on (111)Si Substrate
Akio Suzuki, Takayuki Mori, Atsuhiko Fukuyama, Tetsuo Ikari, Ji-Hyun Paek, and Masahito Yamaguchi
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (513K)]
06GH09 : Determination of Exciton Binding Energy of GaInNAs Quantum Well Structures by Piezoelectric Photothermal Spectroscopy Compared with Photoreflectance Measurements
Koshiro Kashima, Atsuhiko Fukuyama, Kentaro Sakai, Hirosumi Yokoyama, Masahiko Kondow, and Tetsuo Ikari
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (377K)]
06GH10 : Accurate Electronic Structures of Eu-Doped SiAlON Green Phosphor with a Semilocal Exchange–Correlation Potential
Dong Su Yoo, Jeong Ho Ryu, Sung-Ho Lee, Hyun Cho, and Yong-Chae Chung
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (398K)]
06GH11 : Upconversion Emission in Er and Cr Co-Doped KNbO3 Phosphors
Tae-hong Kim, Dae-jin Kim, Woo-young Jang, Ayoung Moon, Ki-Soo Lim, and Myeongkyu Lee
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (745K)]
06GH12 : Combinatorial Investigation of ZrO2-Based Dielectric Materials for Dynamic Random-Access Memory Capacitors
Yuji Kiyota, Kenji Itaka, Yuta Iwashita, Tetsuya Adachi, Toyohiro Chikyow, and Atsushi Ogura
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (485K)]
06GH13 : Paramagnetic Properties of Size-Controlled Squid Ink Particles Dispersed in Water
Toshihiko Matsuura, Yuhei Shimoyama, Takanori Kobayashi, Yoshihiro Taya, and Takashi Ueno
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (515K)]

Nano tools

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06GJ01 : Electromechanical Displacement Detection With an On-Chip High Electron Mobility Transistor Amplifier
Yasuhiko Oda, Koji Onomitsu, Reo Kometani, Shin-ichi Warisawa, Sunao Ishihara, and Hiroshi Yamaguchi
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (513K)]
06GJ02 : Adsorption and Diffusion of Li and Ni on Graphene with Boron Substitution for Hydrogen Storage: Ab-initio Method
Hong-Lae Park, Dong Su Yoo, and Yong-Chae Chung
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (751K)]
06GJ03 : Production of Double-Layered Metal Nanocups for Artificial Nanospace of Biomolecular Reaction
Hyonchol Kim, Masahito Hayashi, Hideyuki Terazono, Hiroyuki Takei, and Kenji Yasuda
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (416K)]
06GJ04 : Grating Pitch Measurement Beyond the Diffraction Limit with Modified Laser Diffractometry
Shan-Peng Pan, Tzong-Shi Liu, Min-Ching Tasi, and Huay-Chung Liou
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (774K)]
06GJ05 : Method for Determining the Angle in Two Dimension Nanoscale: Pitch Grating
Shan-Peng Pan, Tzong-Shi Liu, Min-Ching Tasi, and Huay-Chung Liou
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (753K)]
06GJ06 : Signal Processing Using Karhunen–Loève Expansion for Wafer Focus Measurement in Lithography
Satoru Oishi, Hideki Ina, and Tomoyuki Miyashita
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (661K)]

Nanoimprint, nanoprint, and rising lithography

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06GK01 : Fabrication of Multi-Functional Optical Films by Using a Ultraviolet Curing Roll-to-Roll System
Cheng-Hsin Chuang, Sung-Wen Tsai, Jeng-Feng Lin, and Chang-Pen Chen
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (921K)]
06GK02 : Fluorescent Microscopy Proving Resin Adhesion to a Fluorinated Mold Surface Suppressed by Pentafluoropropane in Step-and-Repeat Ultraviolet Nanoimprinting
Kei Kobayashi, Shoichi Kubo, Hiroshi Hiroshima, Shinji Matsui, and Masaru Nakagawa
Published June 20, 2011 (10 pages)
[Abstract] [Full Text PDF (997K)]
06GK03 : Study on Quartz Multitier Mold Fabrication Using Gray Scale Laser Beam Lithography
Sung-Won Youn, Sang-Cheon Park, Qing Wang, Kenta Suzuki, and Hiroshi Hiroshima
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (889K)]
06GK04 : Fabrication Processes for Capacity-Equalized Mold with Fine Patterns
Kenta Suzuki, Sung-Won Youn, Qing Wang, Hiroshi Hiroshima, and Yasushiro Nishioka
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (1004K)]
06GK05 : Effect of Dropping Hydrofluoroether in Thermal Nanoimprint on Polycarbonate
Harutaka Mekaru and Hiroshi Hiroshima
Published June 20, 2011 (7 pages)
[Abstract] [Full Text PDF (1436K)]
06GK06 : Highly Uniform Fabrication of Diffraction Gratings for Distributed Feedback Laser Diodes by Nanoimprint Lithography
Yukihiro Tsuji, Masaki Yanagisawa, Hiroyuki Yoshinaga, Naoko Inoue, and Toshio Nomaguchi
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (957K)]
06GK07 : Fabrication of Zero-Mode Waveguide by Ultraviolet Nanoimprint Lithography Lift-Off Process
Junichi Wada, Shou Ryu, Yuji Asano, Taro Ueno, Takashi Funatsu, Takao Yukawa, Jun Mizuno, and Takashi Tanii
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (696K)]
06GK08 : Effects of Granularity of Complementary Patterns in a Capacity-Equalized Mold Used for UV Nanoimprint Lithography
Qing Wang, Hiroshi Hiroshima, Sung-Won Youn, and Kenta Suzuki
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (710K)]
06GK09 : Study on Change in UV Nanoimprint Pattern by Altering Shrinkage of UV Curable Resin
Hiroshi Hiroshima and Kenta Suzuki
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (748K)]
06GK10 : Resist Pattern Inspection Using Fluorescent Dye-Doped Polystyrene Thin Films in Reactive-Monolayer-Assisted Thermal Nanoimprint Lithography
Shoichi Kubo, Yuko Sato, Yoshihiko Hirai, and Masaru Nakagawa
Published June 20, 2011 (9 pages)
[Abstract] [Full Text PDF (1088K)]
06GK11 : Effects of Resist Thickness and Viscoelasticity on the Cavity Filling Capability in Bilayer Thermal Embossing
Yang Xu, Fujio Tsumori, Takuya Toyooka, Hidetoshi Kotera, and Hideshi Miura
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (636K)]
06GK12 : Optically Transparent and Refractive Index-Tunable ZrO2/Photopolymer Composites Designed for Ultraviolet Nanoimprinting
Shimpei Kudo, Koichi Nagase, Shoichi Kubo, Okihiro Sugihara, and Masaru Nakagawa
Published June 20, 2011 (7 pages)
[Abstract] [Full Text PDF (843K)]
06GK13 : Degradation of Perfluorotrichlorosilane Antisticking Layers: The Impact on Mold Cleaning, Ultraviolet-Nanoimprinting, and Bonded Ultraviolet-Nanoimprint Molds
Robert Kirchner, Lichao Teng, Bo Lu, Barbara Adolphi, and Wolf-Joachim Fischer
Published June 20, 2011 (8 pages)
[Abstract] [Full Text PDF (1084K)]

Bio MEMS, lab on a chip

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06GL01 : Application of Organosilane Monolayer Template to Quantitative Evaluation of Cancer Cell Adhesive Ability
Takashi Tanii, Kosuke Sasaki, Kota Ichisawa, Takanori Demura, Yuichi Beppu, Hoan Anh Vu, Hoan Thanh Chi, Hideaki Yamamoto, and Yuko Sato
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (482K)]
06GL02 : Off-Axis Diffractive Focusing Reflectors for Refractive Index Sensing in Microfluidic Devices
Hiroaki Nishiyama, Yu-ichi Sagawa, Norihiro Furukawa, Shintaro Okamoto, Yoshinori Hirata, and Junji Nishii
Published June 20, 2011 (3 pages)
[Abstract] [Full Text PDF (547K)]
06GL03 : Continuous Concentration and Separation of Microparticles Using Dielectrophoretic Force in a V-Shaped Electrode Array
Masahito Hayashi, Tomoyuki Kaneko, and Kenji Yasuda
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (519K)]
06GL04 : Hydrophilicity of Surfactant-Added Poly(dimethylsiloxane) and Its Applications
Hui Tak Kim, Jeong Koo Kim, and Ok Chan Jeong
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (833K)]
06GL05 : Fabrication of Microfluidic Platform with Optimized Fluidic Network toward On-Chip Parallel Systematic Evolution of Ligands by Exponential Enrichment Process
Tae Kyung Kim, Sang Wook Lee, Ji-Young Ahn, Thomas Laurell, So Youn Kim, and Ok Chan Jeong
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (793K)]
06GL06 : Improvement of Particle Alignment Control and Precise Image Acquisition for On-Chip High-Speed Imaging Cell Sorter
Akihiro Hattori, , and Kenji Yasuda
Published June 20, 2011 (8 pages)
[Abstract] [Full Text PDF (1174K)]
06GL07 : Image-Based Identification of Single Neurons for Noninvasive Imaging Purification
Hideyuki Terazono, Masahito Hayashi, Hyonchol Kim, Akihiro Hattori, Tomoyuki Kaneko, and Kenji Yasuda
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (391K)]
06GL08 : Extended-Gate Metal Oxide Semiconductor Field Effect Transistor-Based Biosensor for Detection of Deoxynivalenol
Insu Kwon, Hee-Ho Lee, Jinhyeon Choi, Jang-Kyoo Shin, Sang-Ho Seo, Sung-Wook Choi, and Hyang Sook Chun
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (762K)]
06GL09 : Development of a Wireless Love Wave Biosensor Platform for Multi-functional Detection
Taehyeon Song, Seung Yeon Song, Hyun C. Yoon, and Keekeun Lee
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (1106K)]
06GL10 : Tunable Microchip Design for Solvent-Based Bonding of Poly(methyl methacrylate) Substrates by Capillary Force Inequality
Junggi Min, Hoyoung Yun, Tae Gyu Park, Yeon June Kang, and Dong-Chul Han
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (860K)]
06GL11 : Programmable Dielectrophoretic Chip for Cell Manipulations
Cheng-Hsin Chuang, Yao-Wei Huang, Yao-Tung Wu, and Ting-Feng Wu
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (932K)]
06GL12 : Effect of Flow Rates on Generation of Monodisperse Clay–Poly(N-isopropylacrylamide) Embolic Microspheres Using Hydrodynamic Focusing Microfluidic Device
Kyungsup Han, Sona Lee, Kyoung Duck Seo, Sung-Up Choi, Jonghwi Lee, Jaehwi Lee, Byung Kook Kwak, Hae-Jin Choi, and Dong Sung Kim
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (611K)]
06GL13 : Demonstration of Three-Dimensional DNA Trapping Using Electric Force and Hydrodrag Force
Yoshiaki Ukita, Lassoued Mouez, Yuichi Tomizawa, and Yuzuru Takamura
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (835K)]
06GL14 : Enhanced Fluorescence by Controlled Surface Roughness of Plastic Biochip
Dong-Jin Kim, Jung-Hwan Lee, Si-Hyeong Cho, Muhammad Rizwan, R. Prasanna Venkatesh, Bong Guen Chung, and Jin-Goo Park
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (656K)]
06GL15 : Three-Dimensional Molding Based on Microstereolithography Using Beta-Tricalcium Phosphate Slurry for the Production of Bioceramic Scaffolds
Takashi Torii, Makoto Inada, and Shoji Maruo
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (730K)]

Microsystem technology and MEMS

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06GM01 : Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell Using Micromirror
Xuefeng Li, Jinxing Liang, Hiroshi Oigawa, and Toshitsugu Ueda
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (738K)]
06GM02 : Fabrication of a Flexible Array for Tactile Sensors with Microcantilevers and the Measurement of the Distribution of Normal and Shear Forces
Daiki Hirashima, Tatsuya Uematsu, Masayuki Sohgawa, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, and Haruo Noma
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (1057K)]
06GM03 : Microelectromechanical Systems Resonator Utilizing Torsional-to-Transverse Vibration Conversion
Masaya Kiso, Mitsuhiro Okada, Akimasa Tamano, Hideaki Fujiura, Hideo Miyauchi, Kazuya Niki, Hiroshi Tanigawa, and Kenichiro Suzuki
Published June 20, 2011 (7 pages)
[Abstract] [Full Text PDF (1383K)]
06GM04 : Field Emission Ion Source Using a Carbon Nanotube Array for Micro Time-of-Flight Mass Spectrometer
Kyusung Han, Yuri Lee, Dohan Jun, Soonil Lee, Kwang Woo Jung, and Sang Sik Yang
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (1094K)]
06GM05 : Microjoining of LSI Chips on Poly(ethylene naphthalate) Using Compliant Bump
Takanori Shuto, Naoya Watanabe, Akihiro Ikeda, Takao Higashimachi, and Tanemasa Asano
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (573K)]
06GM06 : Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections
Jinxing Liang, Xuefeng Li, Hongsheng Li, Yunfang Ni, Kunyu Li, Libin Huang, and Toshitsugu Ueda
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (730K)]
06GM07 : Torsion Fatigue Testing of Polycrystalline Silicon Cross-Microbridge Structures
Jeng-Nan Hung, Hong Hocheng, and Kazuo Sato
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (934K)]
06GM08 : Crosstalk Reduction of Tactile Sensor Array with Projected Cylindrical Elastomer over Sensing Element
Masayuki Sohgawa, Tatsuya Uematsu, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, and Haruo Noma
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (1366K)]
06GM09 : Flexible Polyimide Micropump Fabricated Using Hot Embossing
Hiroki Komatsuzaki, Kenta Suzuki, Yingwei Liu, Tatsuya Kosugi, Ryuta Ikoma, Sung-Won Youn, Masaharu Takahashi, Ryutaro Maeda, and Yasushiro Nishioka
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (780K)]
06GM10 : Novel Fabrication Method of Microcoil Springs Using Laser-Scan Helical Patterning and Nickel Electroplating
Toshiyuki Horiuchi, Hidetoshi Ishii, Yasuhide Shinozaki, Tetsuya Ogawa, and Kesao Kojima
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (706K)]
06GM11 : Fabrication of Mutilayered Microgear Using a Vertically Modularized and Sectioned Micromold System by X-ray Micromachining Process
Jong Hyun Kim, Suk Sang Chang, Geunbae Lim, and Bong-Kee Lee
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (1087K)]
06GM12 : Resistance Formed in Thermoplastic Resin Substrate by Laser-Assisted Micro Powder Jet Implantation
Katsuhiko Suzuki, Taku Saito, Toru Sugai, Shouta Watanabe, Shoutaroh Kameya, Kaichi Miura, and Tsunemoto Kuriyagawa
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (939K)]
06GM13 : Convection-Based Tilt Sensor with Minimized Temperature Fluctuation
Ju Chan Choi and Seong Ho Kong
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (3751K)]
06GM14 : Improved Performances of Acoustic Energy Harvester Fabricated Using Sol/Gel Lead Zirconate Titanate Thin Film
Shu Kimura, Syungo Tomioka, Satoshi Iizumi, Kyohei Tsujimoto, Tomohisa Sugou, and Yasushiro Nishioka
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (603K)]
06GM15 : Fabrication of Focus-Variable Fluidic Microlens Using Single Casting
Trung-Dung Dang, Cheol-Woo Park, and Gyu-Man Kim
Published June 20, 2011 (6 pages)
[Abstract] [Full Text PDF (1230K)]
06GM16 : Evanescent-Wave-Driven Microrotors Produced by Two-Photon Microfabrication
Soichiro Murakami, Masaki Ikegame, Kazuaki Okamori, and Shoji Maruo
Published June 20, 2011 (4 pages)
[Abstract] [Full Text PDF (805K)]
06GM17 : Design and Fabrication of Highly Manufacturable Microelectromechanical Systems Test Sockets for Ball Grid Array Integrated Circuit Packages
Chanseob Cho, Sangwon Kim, Daeyoung Kong, Jaewoo Nam, Bonghwan Kim, and Jonghyun Lee
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (1339K)]
06GM18 : Eutectic Solder Bonding for Highly Manufacturable Microelectromechanical Systems Probe Card
Bonghwan Kim
Published June 20, 2011 (5 pages)
[Abstract] [Full Text PDF (765K)]
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