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Japanese Journal of Applied Physics

Volume 51, Number 1, January 2012

Special Issue: Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials

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Editors
Foreword

Plasma production and characterization

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01AA01 : Floating Wire for Enhancing Ignition of Atmospheric Pressure Inductively Coupled Microplasma
Shinya Kumagai, Hirotaka Asano, Masaru Hori, and Minoru Sasaki
Published January 20, 2012 (6 pages)
[Abstract] [Full Text PDF (945K)]
01AA02 : Radio Frequency Plasma Transition Caused by Gas Puffing and/or Direct Current Biasing Using Multiturn Internal Antenna
Toshihiko Yamauchi, Seiji Kobayashi, Hideyuki Sugibayashi, Toshiyuki Tachibana, Shunya Naitoh, Yoshinori Kanno, and Toshihito Hiruta
Published January 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1096K)]
01AA03 : Quartz Sensor Measurement for N2–H2 Plasmas
Atsushi Suzuki and Shuichi Asahina
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (645K)]
01AA04 : Numerical Simulation of Laser Induced Weakly Ionized Helium Plasma Process by Lattice Boltzmann Method
Xiaobo Zhang, Yoshihiro Deguchi, and Jiping Liu
Published January 20, 2012 (6 pages)
[Abstract] [Full Text PDF (373K)]

Etching process/nanostructure fabrication

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01AB01 : A Low Damage Etching Process of Sub-100 nm Platinum Gate Line for III–V Metal–Oxide–Semiconductor Field-Effect Transistor Fabrication and the Optical Emission Spectrometry of the Inductively Coupled Plasma of SF6/C4F8
Xu Li, Haiping Zhou, Richard J. W. Hill, Martin Holland, and Iain G. Thayne
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (908K)]
01AB02 : Damage Analysis of Plasma-Etched n-GaN Crystal Surface by Nitrogen K Near-Edge X-ray Absorption Fine Structure Spectroscopy
Masahito Niibe, Takuya Kotaka, Retsuo Kawakami, Takeshi Inaoka, Kikuo Tominaga, and Takashi Mukai
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (486K)]
01AB03 : Anisotropic Graphite Erosion in Low-Temperature and High-Density Deuterium Plasma
Masahiro Teraoka, Noriyasu Ohno, Shin Kajita, Toshihiro Nishiwaki, Atsushi M. Ito, and Hiroaki Nakamura
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (754K)]
01AB04 : Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Selective Ashing of Resist Layer Combined with Ultraviolet Curing
Shinya Kumagai, Akiyoshi Hikita, Takuya Iwamoto, Takashi Tomikawa, Masaru Hori, and Minoru Sasaki
Published January 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1106K)]
01AB05 : Low-Temperature Fabrication of Germanium Nanostructures by Ion Irradiation: Effect of Supplied Particle Species
Ako Miyawaki, Toshiaki Hayashi, Tomoharu Tokunaga, Akari Hayashi, Yasuhiko Hayashi, and Masaki Tanemura
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (437K)]

Thin film deposition process

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01AC01 : Deposition of SiO2 Thin Films on Polycarbonate by Atmospheric-Pressure Plasma
Mikitoshi Kasuya, Shinji Yasui, and Mikio Noda
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1350K)]
01AC02 : Epitaxial Indium Tin Oxide Film Deposited on Sapphire Substrate by Solid-Source Electron Cyclotron Resonance Plasma
Satoru Kaneko, Hironori Torii, Masayasu Soga, Kensuke Akiyama, Motoaki Iwaya, Mamoru Yoshimoto, and Takao Amazawa
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (762K)]
01AC03 : Low Temperature Plasma Enhanced Chemical Vapor Deposition-Synthesized Electrochromic MoOxCy Thin Films for Flexible Electrochromic Devices
Yung-Sen Lin and Jhen-Yi Lai
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (704K)]
01AC04 : Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation
Setsuo Nakao, Tetsuo Soga, Tsutomu Sonoda, Tokuhiro Asada, and Naoki Kishi
Published January 20, 2012 (7 pages)
[Abstract] [Full Text PDF (708K)]
01AC05 : Anisotropic Bond Orientation of Amorphous Carbon by Deposition
Seiki Saito, Atsushi M. Ito, Arimichi Takayama, and Hiroaki Nakamura
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (955K)]
01AC06 : Preparation of MAX-Phase-Containing Ti–Si–C Thin Films by Magnetron Sputtering Using Elemental Targets
Tsutomu Sonoda, Setsuo Nakao, and Masami Ikeyama
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (391K)]
01AC07 : Electrical Properties of Cr–N Films Deposited by Sputtering: Application to Cryogenic Temperature Sensors
Kazuo Satoh, Yoshiharu Kakehi, Mayumi Uno, Yoshiaki Sakurai, Tsutom Yotsuya, and Takekazu Ishida
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (665K)]
01AC08 : Cu(ReTaNx) Copper Alloy Films Suitable for Electronic-Device Manufacturing-Process Simplification
Chon-Hsin Lin
Published January 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1138K)]
01AC09 : Enhanced Flyer Acceleration by Varying the Ion Beam–Plasma Interaction Field
Thanat Rungsirathana, Vorathit Rungsetthaphat, Shogo Azuma, and Nobuhiro Harada
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (440K)]
01AC10 : Observation of Phenomena After Pulsed Laser Irradiation of Solid with Optical Wave Microphone
Fumiaki Mitsugi, Tomoaki Ikegami, Toshiyuki Nakamiya, and Yoshito Sonoda
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (611K)]

Solar cell materials deposition

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01AD01 : Effect of Nitridation of Si Nanoparticles on the Performance of Quantum-Dot Sensitized Solar Cells
Giichiro Uchida, Kosuke Yamamoto, Muneharu Sato, Yuki Kawashima, Kenta Nakahara, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (862K)]
01AD02 : Combinatorial Deposition of Microcrystalline Silicon Films Using Multihollow Discharge Plasma Chemical Vapor Deposition
Kazunori Koga, Takeaki Matsunaga, Yeonwon Kim, Kenta Nakahara, Daisuke Yamashita, Hidefumi Matsuzaki, Kunihiro Kamataki, Giichiro Uchida, Naho Itagaki, and Masaharu Shiratani
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (629K)]
01AD03 : Deposition of Cluster-Free B-doped Hydrogenated Amorphous Silicon Films Using SiH4+B10H14 Multi-Hollow Discharge Plasma Chemical Vapor Deposition
Kazunori Koga, Kenta Nakahara, Yeon-Won Kim, Takeaki Matsunaga, Daisuke Yamashita, Hidefumi Matsuzaki, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, and Masaharu Shiratani
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (600K)]
01AD04 : Growth of ZnTe:O Thin Films by Oxygen-Plasma-Assisted Pulsed Laser Deposition
Sang Woo Pak, Jooyoung Suh, Dong Uk Lee, and Eun Kyu Kim
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (536K)]

Plasma/laser applications in biology and medicine

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01AE01 : Growth Enhancement of Radish Sprouts Induced by Low Pressure O2 Radio Frequency Discharge Plasma Irradiation
Satoshi Kitazaki, Kazunori Koga, Masaharu Shiratani, and Nobuya Hayashi
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (718K)]
01AE02 : A Comparative Histological Study of Bone Healing in Rat Calvarial Defect Using the Erbium-Doped Yttrium Aluminum Garnet Laser and Rotary Instruments
Mi-Kyung Jung, Su-Gwan Kim, Ji-Su Oh, Seung-Chan Jin, Sook-Young Lee, Eun-Sook Jang, Zheng-Gang Piao, Sung-Chul Lim, and Mi-Ae Jeong
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (341K)]

Growth of GaN and related materials

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01AF01 : Growth of Less Bowed GaN Epitaxial Layers on Sapphire Substrates by Formation of Low-Temperature GaN Buffer Layer with Columnar Microstructure
Keon-Hun Lee, In Su Shin, Sung Hyun Park, Dae Young Moon, Minhwa Kim, Jinsub Park, Yasushi Nanishi, and Euijoon Yoon
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (871K)]
01AF02 : Gallium Nitride Film Growth Using a Plasma Based Migration Enhanced Afterglow Chemical Vapor Deposition System
K. Scott A. Butcher, Brad W. Kemp, Ilian B. Hristov, Penka Terziyska, Peter W. Binsted, and Dimiter Alexandrov
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (766K)]
01AF03 : Selective Growth of Microscale GaN Pyramids on Apex of GaN Pyramids
Dong Wan Jo, Jin Eun Ok, Wy il Yun, Hun Soo Jeon, Gang Suok Lee, Se Gyo Jung, Seon Min Bae, Hyung Soo Ahn, and Min Yang
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (548K)]
01AF04 : Crystal Orientation of GaN Nanostructures Grown on Al2O3 and Si(111) with a Zr Buffer Layer
Minji Kim, Min Jeong Shin, Hunsoo Jeon, Hyung Soo Ahn, Sam Nyung Yi, Seok-Cheol Choi, Sang-Geul Lee, Young Moon Yu, and Nobuhiko Sawaki
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (494K)]
01AF05 : A Detailed Investigation of the Growth Conditions of Gallium Nitride Nanorods by Hydride Vapor Phase Epitaxy
Min Jeong Shin, Min Ji Kim, Hun Soo Jeon, Hyung Soo Ahn, Sam Nyung Yi, Yoon Huh, Young-Moon Yu, and Nobuhiko Sawaki
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (685K)]
01AF06 : Investigation of GaN Solution Growth Processes on Ga- and N-Faces by Molecular Dynamics Simulation
Takahiro Kawamura, Yoshihiro Kangawa, Koichi Kakimoto, Shigeo Kotake, and Yasuyuki Suzuki
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (915K)]
01AF07 : Effect of Growth Temperature on Structural Quality of InAlN Layer Lattice Matched to GaN Grown by Metal Organic Chemical Vapor Deposition
Junki Ichikawa, Yusuke Sakai, Zhitao Chen, Kazuhisa Fujita, and Takashi Egawa
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (1280K)]

Nitride optical/electronic devices and other compound semiconductor devices

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01AG01 : Ultraviolet Light Emitting Diode with High Quality Epilayer Grown by Hydride Vapor Phase Epitaxy
Hunsoo Jeon, Gang Seok Lee, Se-Gyo Jung, Seon Min Bae, Min Jeong Shin, Kyoung Hwa Kim, Min Yang, Sam Nyung Yi, Hyung Soo Ahn, Young-Moon Yu, Yoon Huh, Suck-Whan Kim, Hong-Ju Ha, and Nobuhiko Sawaki
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (510K)]
01AG02 : Characterization of GaN-Based Light Emitting Diodes Grown on 4-in. Si(111) Substrate
Youhua Zhu, Arata Watanabe, Lin Lu, Zhitao Chen, and Takashi Egawa
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (329K)]
01AG03 : Micro-Square-Array InGaN-Based Light-Emitting Diode with an Insulated Ga2O3 Layer through a Photoelectrochemical Process
Chia-Feng Lin, Chun-Min Lin, and Ren-Hao Jiang
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (665K)]
01AG04 : Further Improvement in the Light Output Power of InGaN-Based Light Emitting Diodes by Patterned Sapphire Substrate with KOH Wet-Chemical Etching on Sidewall
Chun-Fu Tsai, Yan-Kuin Su, and Chun-Liang Lin
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (777K)]
01AG05 : Enhancement of Light Extraction Efficiency of InGaN Light-Emitting Diodes with an Air-Hole-Array Structure
Chia-Feng Lin, Yu-Chieh Huang, Sy-Hann Chen, Guei-Miao Wang, and Zong-Zhe Yang
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (473K)]
01AG06 : Nonphosphor White Light Emitting Diodes by Mixed-Source Hydride Vapor Phase Epitaxy
Gang Seok Lee, Hunsoo Jeon, Se-Gyo Jung, Seon Min Bae, Min Jung Shin, Kyoung Hwa Kim, Sam Nyung Yi, Min Yang, Hyung Soo Ahn, Young-Moon Yu, Suck-Whan Kim, Hong-Ju Ha, and Nobuhiko Sawaki
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (507K)]
01AG07 : Design and Fabrication of AlN/GaN Heterostructures for Intersubband Technology
Tommy Ive, Kristian Berland, Martin Stattin, Fredrik Fälth, Per Hyldgaard, Anders Larsson, and Thorvald G. Andersson
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (482K)]
01AG08 : Recent Progresses in GaN Power Rectifier
Daniel Alquier, Frederic Cayrel, Olivier Menard, Anne-Elisabeth Bazin, Arnaud Yvon, and Emmanuel Collard
Published January 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1102K)]
01AG09 : Growth and Device Properties of AlGaN/GaN High-Electron Mobility Transistors on a Diamond Substrate
Kazuyuki Hirama, Makoto Kasu, and Yoshitaka Taniyasu
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (983K)]
01AG10 : Numerical Design of SiO2 Bridges in Stretchable Thin Film Transistors
Byung-Jae Kim, Kyung-Yea Park, Jong-Hyun Ahn, and Youn-Jea Kim
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (716K)]

Nanocarbon materials

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01AH01 : Applications of Carbon Nanotubes Grown by Chemical Vapor Deposition
John Robertson, Guofang Zhong, C. Santiago Esconjauregui, Bernhard C. Bayer, Can Zhang, Martin Fouquet, and Stephan Hofmann
Published January 20, 2012 (8 pages)
[Abstract] [Full Text PDF (2014K)]
01AH02 : Fabrication and Electrochemical Characterization of Carbon Nanosheets by Microwave Plasma-Enhanced Chemical Vapor Deposition
Zhipeng Wang, Mao Shoji, and Hironori Ogata
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (622K)]
01AH03 : Growth Characteristics of Carbon Nanotubes on Oxidized Catalyst under Low-Pressure Condition
Daiki Sawaguchi, Hideki Sato, Koichi Hata, Hideto Miyake, Kazuo Iida, and Kazumasa Hiramatsu
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (581K)]
01AH04 : Direct Growth of Carbon Nanotubes on ZnO(0001) Substrate Surface using Alcohol Gas Source Method in High Vacuum
Takayasu Iokawa, Tomoyuki Tsutsui, Shigeya Naritsuka, and Takahiro Maruyama
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (626K)]
01AH05 : Epitaxial Graphene on Si(111) Substrate Grown by Annealing 3C-SiC/Carbonized Silicon
Hare Ram Aryal, Kazuhisa Fujita, Kazuya Banno, and Takashi Egawa
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (629K)]
01AH06 : Fabrication of Graphene-Based Electrochemical Capacitors
Chien-Te Hsieh, Shu-Min Hsu, and Jia-Yi Lin
Published January 20, 2012 (7 pages)
[Abstract] [Full Text PDF (864K)]
01AH07 : Interaction of Ethylene Carbonate and Graphene Chip: Density Functional Theory Study
Shigeaki Abe, Fumio Watari, and Hiroto Tachikawa
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (423K)]

Plasma-surface interaction, surface modification/functionalization

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01AJ01 : Characterization of Damage of Al2O3/Ge Gate Stack Structure Induced with Light Radiation during Plasma Nitridation
Kusumandari, Wakana Takeuchi, Kimihiko Kato, Shigehisa Shibayama, Mitsuo Sakashita, Osamu Nakatsuka, and Shigeaki Zaima
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (631K)]
01AJ02 : Effects of Irradiation with Ions and Photons in Ultraviolet–Vacuum Ultraviolet Regions on Nano-Surface Properties of Polymers Exposed to Plasmas
Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, and Masaru Hori
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (761K)]
01AJ03 : Near Infrared Radiation from Heated Nanostructured Tungsten
Shin Kajita, Takanori Yokochi, Noriyasu Ohno, and Tomoyuki Kumano
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (606K)]
01AJ04 : Epoxy Resin Surface Functionalization Using Atmospheric Pressure Plasma Jet Treatment
Waleepan Sangprasert, Piyarat Nimmanpipug, Piriya Yavirach, Vannajan Sanghiran Lee, and Dheerawan Boonyawan
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (658K)]
01AJ05 : Influence of Pulse Rising Time on Plasma Irradiation Effect
Takahiro Yabuuchi and Shinji Yasui
Published January 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1223K)]
01AJ06 : Improvement of Thermoplastic Polyurethane Nonwoven Hydrophilicity by Atmospheric Pressure Plasma Treatment with He and N2 Mixed Gases
Ko-Shao Chen, Shu-Chuan Liao, Shen-Wei Lin, Tsui-Shan Hung, Shao-Hsuan Tsao, Hsin-Ming Wu, Norihiro Inagaki, and Wei-Yu Chen
Published January 20, 2012 (3 pages)
[Abstract] [Full Text PDF (522K)]
01AJ07 : Control of Super Hydrophobic and Super Hydrophilic Surfaces of Carbon Nanowalls Using Atmospheric Pressure Plasma Treatments
Hitoshi Watanabe, Hiroki Kondo, Makoto Sekine, Mineo Hiramatsu, and Masaru Hori
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (448K)]
01AJ08 : Plasma-Enhanced Surface Modification of Sprayed Carbon Nanotube Electrodes for Lithographically Integrated Biosensing System
Joon-Hyung Jin, Joon Hyub Kim, Jun-Yong Lee, Cheol Jin Lee, and Nam Ki Min
Published January 20, 2012 (4 pages)
[Abstract] [Full Text PDF (569K)]
01AJ09 : Plasma Nitridation of Hydrogenated Silicon Nitride Film
Chiung-Wei Lin, Ming-Hsien Yang, and Yeong-Shyang Lee
Published January 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1512K)]
01AJ10 : Resistance Switching in Ni/HfOx/Ni Nonvolatile Memory Device with CF4/O2 Plasma Post-treatment
Chiung-Hui Lai, Te-Shun Chang, Wen-Hsien Tzeng, and Kow-Ming Chang
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1388K)]
01AJ11 : Hardfacing of Bulk Nanophase Coatings
Uwe Reisgen, Boris Balashov, Lars Stein, and Christoph Geffers
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (4581K)]

Composit/functionally graded materials

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01AK01 : Effects of Dispersoids on Wear Behavior of Cu-Based Nanocomposite Containing SiO2 Nanoparticles
Hisashi Sato, Eri Miura-Fujiwara, and Yoshimi Watanabe
Published January 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1015K)]
01AK02 : White Photoluminescence from Carbon-Incorporated Silica Fabricated from Rice Husk
Yukari Ishikawa, Shinji Kawasaki, Yosuke Ishi, Koji Sato, and Akihiro Matsumura
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (475K)]
01AK03 : Determination of Creep Life of Glass Fiber/Phenol Composite Filled with Carbon Nanotubes by Four-Point Flexural Creep Test
Anchang Xu, Hiroshi Nozaki, Limin Bao, and Kiyoshi Kemmochi
Published January 20, 2012 (5 pages)
[Abstract] [Full Text PDF (597K)]
01AK04 : Experimental Study on Severe Plastic Deformation of Ti by Novel Equal-Channel Angular Pressing
Saifulnizan Jamian, Hisashi Sato, Eri Miura-Fujiwara, and Yoshimi Watanabe
Published January 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1975K)]

Nanoparticles

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01AL01 : Single-Step Synthesis of Al-Doped TiO2 Nanoparticles Using Non-Transferred Thermal Plasma Torch
Cheng-Yen Tsai, Hsing-Cheng Hsi, Hsunling Bai, Kuo-Shuh Fan, and Hung-Dar Sun
Published January 20, 2012 (6 pages)
[Abstract] [Full Text PDF (596K)]
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