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Japanese Journal of Applied Physics

Volume 51, Number 6, June 2012

Special Issue: Microprocesses and Nanotechnology

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• Review paper
• Lithography and metrology
• Resist materials and processing
• Nanocarbon
• Nanodevices
• Nanofabrication
• Nanomaterials
• Nano tools
• Nanoimprint, nanoprint, and rising lithography
• Bio MEMS, lab on a chip
• Microsystem technology and MEMS

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Review paper

06FA01 : Potential of Directed- and Self-Assembled Molecular Nanowires for Optoelectronic Functional Devices

Yutaka Wakayama, Nobuya Hiroshiba, Ryoma Hayakawa, Toyohiro Chikyow, and Kenji Kobayashi
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (2013K)]

Lithography and metrology

06FB01 : Patterning of Spiral Structure on Optical Fiber by Focused-Ion-Beam Etching

Harutaka Mekaru and Takayuki Yano
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (928K)]

06FB02 : Electron Beam Lithography of 15× 15 nm² Pitched Nanodot Arrays with a Size of Less than 10 nm Using High Development Contrast Salty Developer

Takuya Komori, Hui Zhang, Takashi Akahane, Zulfakri Mohamad, You Yin, and Sumio Hosaka
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (632K)]

06FB03 : Extreme Ultraviolet Process Optimization for Contact Layer of 14 nm Node Logic and 16 nm Half Pitch Memory Devices

Shih-En Tseng and Alek Chen
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1942K)]

06FB04 : Effect on Critical Dimension Performance for Carbon Contamination of Extreme Ultraviolet Mask Using Coherent Scattering Microscopy and In-situ Contamination System

Jonggul Doh, Sangsul Lee, Jaewook Lee, Seongchul Hong, Chang Young Jeong, Dong Gun Lee, Seong-Sue Kim, and Jinho Ahn
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (997K)]

06FB05 : Maskless Lithographic Fine Patterning on Deeply Etched or Slanted Surfaces, and Grayscale Lithography, Using Newly Developed Digital Mirror Device Lithography Equipment

Wataru Iwasaki, Toshihiro Takeshita, Yao Peng, Hiroaki Ogino, Hiromasa Shibata, Yuji Kudo, Ryutaro Maeda, and Renshi Sawada
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (743K)]

06FB06 : Optimized Multigrid Strategy for Accurate Flare Modeling with Three-Dimensional Mask Effect in Extreme-Ultraviolet Lithography

Junhwan Lee, Sangheon Lee, Changreol Kim, Yongdae Kim, Sangpyo Kim, and Ohyun Kim
Published June 20, 2012 (10 pages)
[Abstract] [Full Text PDF (2222K)]

06FB07 : Ion-Beam-Induced Luminescence Analysis as Diagnostic Tool for Microstructure Patterning on Diamond by Proton Beam Writing

Wataru Kada, Akihito Yokoyama, Masashi Koka, Katsuyoshi Takano, Takahiro Satoh, and Tomihiro Kamiya
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1097K)]

06FB08 : Defect Characterization of an Extreme-Ultraviolet Mask Using a Coherent Extreme-Ultraviolet Scatterometry Microscope

Tetsuo Harada, Masato Nakasuji, Akifumi Tokimasa, Takeo Watanabe, Youichi Usui, and Hiroo Kinoshita
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1150K)]

06FB09 : Development of Coherent Extreme-Ultraviolet Scatterometry Microscope with High-Order Harmonic Generation Source for Extreme-Ultraviolet Mask Inspection and Metrology

Masato Nakasuji, Akifumi Tokimasa, Tetsuo Harada, Yutaka Nagata, Takeo Watanabe, Katsumi Midorikawa, and Hiroo Kinoshita
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1061K)]

06FB10 : Photoresist Shrinkage Caused by Single-Line Scan of Electron Beam

Takeyoshi Ohashi and Junichi Tanaka
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1019K)]

06FB11 : Study on Image Drift Induced by Charging during Observation by Scanning Electron Microscope

Nobuhiro Okai and Yasunari Sohda
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1017K)]

06FB12 : Defect Inspection Technique Using Surface Plasmon Resonance

Hiroyuki Kashiwagi, Ikuo Yoneda, Keiko Morishita, Ryoji Yoshikawa, Takashi Hirano, and Tetsuro Nakasugi
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (945K)]

Resist materials and processing

06FC01 : Lower Limit of Line Edge Roughness in High-Dose Exposure of Chemically Amplified Extreme Ultraviolet Resists

Takahiro Kozawa
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (321K)]

06FC02 : Sensitivity of Process Parameters on Pattern Formation of Litho–Cure–Litho–Etch Process

Sang-Kon Kim
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (573K)]

06FC03 : Optimization of Ge–Sb–Sn–O Films for Thermal Lithography of Submicron Structures

Jhewn-Kuang Chen, Jing-Wen Lin, Jung-Po Chen, and Kuo-Chi Chiu
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1273K)]

06FC04 : Characterization of Fogging and Develop-Loading Effects in Electron-Beam Direct-Writing Technology

Jun-ichi Kon, Yoshinori Kojima, Yasushi Takahashi, Takashi Maruyama, and Shinji Sugatani
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (678K)]

06FC05 : Study of Development Processes for ZEP-520 as a High-Resolution Positive and Negative Tone Electron Beam Lithography Resist

Mohammad Ali Mohammad, Kirill Koshelev, Taras Fito, David Ai Zhi Zheng, Maria Stepanova, and Steven Dew
Published June 20, 2012 (8 pages)
[Abstract] [Full Text PDF (817K)]

06FC06 : In situ Dissolution Analysis of Ultrathin Extreme Ultraviolet Resists

Julius J. Santillan and Toshiro Itani
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1733K)]

Nanocarbon

06FD01 : Graphene Growth from Spin-Coated Polymers without a Gas

Satoru Suzuki, Yusuke Takei, Kazuaki Furukawa, Gregory Webber, Shinichi Tanabe, and Hiroki Hibino
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1020K)]

06FD02 : Epitaxy of Graphene on 3C-SiC(111) Thin Films on Microfabricated Si(111) Substrates

Takayuki Ide, Yusuke Kawai, Hiroyuki Handa, Hirokazu Fukidome, Masato Kotsugi, Takuo Ohkochi, Yoshiharu Enta, Toyohiko Kinoshita, Akitaka Yoshigoe, Yuden Teraoka, and Maki Suemitsu
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (578K)]

06FD03 : Carrier Transport Properties of the Field Effect Transistors with Graphene Channel Prepared by Chemical Vapor Deposition

Ryota Negishi, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, and Yoshihiro Kobayashi
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (442K)]

06FD04 : Three-Dimensional Force Sensing Device Using Carbon Nanofiber Polymer Composites: Design and Fabrication

Fuh-Yu Chang, Chia-Ming Liu, Tse-Min Chen, Chia-Ming Chen, Yu-Hsien Lin, and Shu-Jiuan Huang
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (797K)]

06FD05 : Amorphous Carbon Deposited by a Novel Aerosol-Assisted Chemical Vapor Deposition for Photovoltaic Solar Cells

Nurfadzilah Ahmad, Dayana Kamaruzzaman, and Mohamad Rusop
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (811K)]

06FD06 : Microscopic Raman Mapping of Epitaxial Graphene on 4H-SiC(0001)

Ryong-Sok O, Atsushi Iwamoto, Yuki Nishi, Yuya Funase, Takahiro Yuasa, Takuro Tomita, Masao Nagase, Hiroki Hibino, and Hiroshi Yamaguchi
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (709K)]

06FD07 : Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

Akihiro Fujimoto, Makoto Okada, Yuji Kang, Masahito Niibe, Shinji Matsui, Tsuneo Suzuki, and Kazuhiro Kanda
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (537K)]

06FD08 : Immunosensors Based on Graphene Field-Effect Transistors Fabricated Using Antigen-Binding Fragment

Shogo Okamoto, Yasuhide Ohno, Kenzo Maehashi, Koichi Inoue, and Kazuhiko Matsumoto
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (718K)]

06FD09 : Identification of Graphene Layer Numbers from Color Combination Contrast Image for Wide-Area Characterization

Shaharin Fadzli Abd Rahman, Abdul Manaf Hashim, and Seiya Kasai
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (818K)]

06FD10 : Improvement in Film Quality of Epitaxial Graphene on SiC(111)/Si(111) by SiH₄ Pretreatment

Shota Sanbonsuge, Shunsuke Abe, Hiroyuki Handa, Ryota Takahashi, Kei Imaizumi, Hirokazu Fukidome, and Maki Suemitsu
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (825K)]

06FD11 : Carbon Nanotube-Based Floating Gate Memories with High-k Dielectrics

Yusuke Fujii, Takahiro Ohori, Yasuhide Ohno, Kenzo Maehashi, Koichi Inoue, and Kazuhiko Matsumoto
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (506K)]

06FD12 : Direct Synthesis of Graphene on SiO₂ Substrates by Transfer-Free Processes

Kenta Gumi, Yasuhide Ohno, Kenzo Maehashi, Koichi Inoue, and Kazuhiko Matsumoto
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (1587K)]

06FD13 : Magnetic Properties of Iron on Strained Graphene: Density Functional Theory Study

Minho Lee, Heechae Choi, Dong Su Yoo, and Yong-Chae Chung
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (461K)]

06FD14 : Configuration Dependency of Attached Epoxy Groups on Graphene Oxide Reduction: A Molecular Dynamics Simulation

Kyung-Han Yun, Yubin Hwang, Minho Lee, Heechae Choi, Dong Su Yoo, Eung-Kwan Lee, Sung Beom Cho, and Yong-Chae Chung
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (1101K)]

06FD15 : Fine Patterning of Inkjet-Printed Single-Walled Carbon-Nanotube Thin-Film Transistors

Yuki Nobusa, Yuki Takagi, Shota Gocho, Satoki Matsuzaki, Kazuhiro Yanagi, and Taishi Takenobu
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (1250K)]

06FD16 : Formation of Graphene Nanofin Networks on Graphene/SiC(0001) by Molecular Beam Epitaxy

Fumihiko Maeda and Hiroki Hibino
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1053K)]

06FD17 : Graphene Converted from the Photoresist Material on Polycrystalline Nickel Substrate

Hyonik Lee, Seulah Lee, Juree Hong, Sang Geun Lee, Jae-Hong Lee, and Taeyoon Lee
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (490K)]

06FD18 : Continuous Electron Doping of Single-Walled Carbon Nanotube Films Using Inkjet Technique

Satoki Matsuzaki, Yuki Nobusa, Ryo Shimizu, Kazuhiro Yanagi, Hiromichi Kataura, and Taishi Takenobu
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (483K)]

06FD19 : One-Step Liquid-Phase Synthesis of Carbon Nanotubes: Effects of Substrate Materials on Morphology of Carbon Nanotubes

Kiyofumi Yamagiwa, Yusuke Ayato, and Jun Kuwano
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (875K)]

06FD20 : In-situ Observation of Current-Pulse-Induced Curling of Graphene Edges and Carbon-Cages Production

Takuya Nishijima, Ryuichi Ueki, Emi Kano, and Jun-ichi Fujita
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (817K)]

06FD21 : Process Optimization for Synthesis of High-Quality Graphene Films by Low-Pressure Chemical Vapor Deposition

Dongheon Lee, Kihwan Lee, Saebyuk Jeong, Juhyun Lee, Bosik Choi, Jeongsoo Lee, and Ohyun Kim
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (1853K)]

06FD22 : Recovery Force of Carbon Nanotube Shape Memory

Shotaro Itaya, Kaori Hirahara, and Yoshikazu Nakayama
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (296K)]

06FD23 : Low-Temperature Synthesis of Single-Walled Carbon Nanotubes in a High Vacuum Using Pt Catalyst in Alcohol Gas Source Method

Naoya Fukuoka, Yoshihiro Mizutani, Shigeya Naritsuka, Takahiro Maruyama, and Sumio Iijima
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (380K)]

06FD24 : Evaluation of Graphene Thin Films by Surface Plasmon Resonance

Kohei Murasaki, Yuki Anno, Seiji Akita, and Takayuki Arie
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (626K)]

06FD25 : Temperature Dependent Resistance of Multi-Wall Carbon Nanotube

Eiji Kawabe, Shotaro Itaya, Kaori Hirahara, and Yoshikazu Nakayama
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (591K)]

06FD26 : Electric Field Enhancement by Laser Light Focused at Electrode Edges for Controlled Positioning of Carbon Nanotubes

Toru Takahashi, Takuya Yabumoto, Ryuji Inori, Takako Okada, Seiji Akita, and Takayuki Arie
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (764K)]

06FD27 : Optimization of Source/Drain Doping Level of Carbon Nanotube Field-Effect Transistors to Suppress OFF-State Leakage Current while Keeping Ideal ON-State Current

Berrin Pinar Algul and Ken Uchida
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (586K)]

06FD28 : In-situ Observation of Surface Graphitization of Gallium Droplet and Concentration of Carbon in Liquid Gallium

Ryuichi Ueki, Takuya Nishijima, Takeshi Hikata, Soichiro Ookubo, Risa Utsunomiya, Teruaki Matsuba, and Jun-ichi Fujita
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (791K)]

Nanodevices

06FE01 : Single-Photon Detection by a Simple Silicon-on-Insulator Metal–Oxide–Semiconductor Field-Effect Transistor

Wei Du, Hiroshi Inokawa, Hiroaki Satoh, and Atsushi Ono
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (575K)]

06FE02 : Single-String Carbon Nanotube Field Effect Transistors Fabricated by Two-Step Dielectrophoresis

Tae Geun Kim, Jong Seung Hwang, Yun Seop Yu, Myung Gil Kang, and Sung Woo Hwang
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (887K)]

06FE03 : Characteristics of Gate-All-Around Hetero-Gate-Dielectric Tunneling Field-Effect Transistors

Jae Sung Lee, Woo Young Choi, and In Man Kang
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1534K)]

06FE04 : Effects of Aluminium Doping and Electrode Distance on the Performance of Aligned Zinc Oxide Nanorod Array-Based Ultraviolet Photoconductive Sensors

Mohamad Hafiz Mamat, Zuraida Khusaimi, Musa Mohamed Zahidi, Suriani Abu Bakar, Mohd Zamri Yusop, Masaki Tanemura, and Mohamad Rusop Mahmood
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (805K)]

06FE05 : Fabrication of Stacked Organic Electroluminescence Devices with a Combination of Spin Coating and Electrospray Deposition

Hideaki Anzai, Yuuki Watanabe, and Tetsuo Sakamoto
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (859K)]

06FE06 : Novel Protruded-Shape Unipolar Resistive Random Access Memory Structure for Improving Switching Uniformity through Excellent Conductive Filament Controllability

Kyung-Chang Ryoo, Sungjun Kim, Jeong-Hoon Oh, Sunghun Jung, Hongsik Jeong, and Byung-Gook Park
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1538K)]

06FE07 : Regression Analysis for Transport Electron Scattering Caused by Structural Defects in InSb Quantum Wells: Application of Matthiessen’s Formula

Tetsuya D. Mishima and Michael B. Santos
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (547K)]

06FE08 : Channel Recessed One Transistor Dynamic Random Access Memory with SiO₂/Si₃N₄/SiO₂ Gate Dielectric

Jin-Kwon Park, Jong-Heon Yang, and Won-Ju Cho
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (835K)]

06FE09 : Design Guideline of Si-Based L-Shaped Tunneling Field-Effect Transistors

Sang Wan Kim, Woo Young Choi, Min-Chul Sun, Hyun Woo Kim, and Byung-Gook Park
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (760K)]

06FE10 : Experimental Test of Landauer’s Principle at the Sub-k_B T Level

Alexei O. Orlov, Craig S. Lent, Cameron C. Thorpe, Graham P. Boechler, and Gregory L. Snider
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (577K)]

06FE11 : Collision-Based Computing Using Single-Electron Circuits

Shunsuke Hayashi and Takahide Oya
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (953K)]

06FE12 : Heterojunction Photodiodes Based on Honeycomb Structures for Ultraviolet Detection

Shu-Yi Tsai, Jian-Hong Lee, and Min-Hsiung Hon
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (454K)]

06FE13 : Speed Enhancement of WSi₂ Nanocrystal Memory with Barrier-Engineered Si₃N₄/HfAlO Tunnel Layer

Dong Uk Lee, Hyo Jun Lee, Eun Kyu Kim, Hee-Wook You, and Won-Ju Cho
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (979K)]

06FE14 : Vertical-Electrical-Field-Induced Control of the Exciton Fine Structure Splitting in GaAs Island Quantum Dots for the Generation of Polarization-Entangled Photons

Mohsen Ghali, Keita Ohtani, Yuzo Ohno, and Hideo Ohno
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (526K)]

06FE15 : Photocurrent Measurements on a Quantum Cascade Laser Device by Fourier Transform Infrared Microscope

Eli Christopher I. Enobio, Hiroki Sato, Keita Ohtani, Yuzo Ohno, and Hideo Ohno
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (317K)]

06FE16 : Control Theory of Near-Field Optical Energy Transfer in One-Dimensional Waveguide Consisting of Metallic Nanoparticles by Vibrating External Field

Shin Tanaka, Hironori Hattori, Shimpei Hidaka, Nguyen Duy Vy, and Takuya Iida
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (684K)]

06FE17 : Design and Characterization of Plasmonic Terahertz Wave Detectors Based on Silicon Field-Effect Transistors

Hee Cheol Hwang, Kibog Park, Wook-Ki Park, Seong-Tae Han, and Kyung Rok Kim
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1411K)]

06FE18 : Characterization of Low-Frequency Noise in Etched GaAs Nanowire Field-Effect Transistors Having SiN_x Gate Insulator

Toru Muramatsu, Kensuke Miura, Yuta Shiratori, Zenji Yatabe, and Seiya Kasai
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1181K)]

06FE19 : Fabrication and Characterization of NOR-Type Tri-Gate Flash Memory with Improved Inter-Poly Dielectric Layer by Rapid Thermal Oxidation

Takahiro Kamei, Yongxun Liu, Takashi Matsukawa, Kazuhiko Endo, Shinichi O’uchi, Junichi Tsukada, Hiromi Yamauchi, Yuki Ishikawa, Tetsuro Hayashida, Kunihiro Sakamoto, Atsushi Ogura, and Meishoku Masahara
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1532K)]

06FE20 : Extraction Method for Substrate-Related Components of Vertical Junctionless Silicon Nanowire Field-Effect Transistors and Its Verification on Radio Frequency Characteristics

Sunhae Shin, In Man Kang, and Kyung Rok Kim
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1452K)]

06FE21 : Carrier Transport Mechanisms of the Programming and Retention Characteristics for TaN–Al₂O₃–Si₃N₄–SiO₂–Si Flash Memory Devices

Dong Hun Kim, Joo Hyung You, Dea Uk Lee, Tae Whan Kim, and Keun Woo Lee
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (394K)]

Nanofabrication

06FF01 : Experimental Study of Floating-Gate-Type Metal–Oxide–Semiconductor Capacitors with Nanosize Triangular Cross-Sectional Tunnel Areas for Low Operating Voltage Flash Memory Application

Yongxun Liu, Ruofeng Guo, Takahiro Kamei, Takashi Matsukawa, Kazuhiko Endo, Shinichi O’uchi, Junichi Tsukada, Hiromi Yamauchi, Yuki Ishikawa, Tetsuro Hayashida, Kunihiro Sakamoto, Atsushi Ogura, and Meishoku Masahara
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (2094K)]

06FF02 : Evaluation of Chemical Bonding Features and Resistance Switching Behaviors of Ultrathin Si Oxide Dielectric Sandwiched Between Pt Electrodes

Akio Ohta, Yuta Goto, Shingo Nishigaki, Hideki Murakami, Seiichiro Higashi, and Seiichi Miyazaki
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1197K)]

06FF03 : Thickness-Dependent Characteristics of Aluminium-Doped Zinc Oxide Nanorod-Array-Based, Ultraviolet Photoconductive Sensors

Mohamad Hafiz Mamat, Nurul Izzah Ishak, Zuraida Khusaimi, Musa Mohamed Zahidi, Mohd Hanapiah Abdullah, Salina Muhamad, Nor Diyana Md Sin, and Mohamad Rusop Mahmood
Published June 20, 2012 (8 pages)
[Abstract] [Full Text PDF (1079K)]

06FF04 : Epitaxial-Template Structure Utilizing Ge-on-Insulator Stripe Arrays with Nanospacing for Advanced Heterogeneous Integration on Si Platform

Abdul Manaf Hashim, Mohamad Anisuzzaman, Shunpei Muta, Taizoh Sadoh, and Masanobu Miyao
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1131K)]

06FF05 : Microfabrication of Si-Based High-Index-Contrast-Grating Structure by Thermal Nanoimprint Lithography and Cl₂/Xe-Inductively Coupled Plasma Etching

Akihiro Matsutani, Yuuki Hashidume, Hideo Ohtsuki, and Fumio Koyama
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (648K)]

06FF06 : Fabrication of Nanocone Subwavelength Antireflection Structures on Quartz Substrates

Yu-Hsiang Tang, Mao-Jung Huang, Jien-Yin Su, and Ming-Hua Shiao
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1029K)]

06FF07 : Electronic State Formation by Surface Atom Removal on a MoS₂ Surface

Nagisa Kodama, Tsuyoshi Hasegawa, Tohru Tsuruoka, Christian Joachim, and Masakazu Aono
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (566K)]

06FF08 : Pattern Transfer Characterization after Double-Level Lithography for a Fabrication of the Three-Dimensional Aluminum Titanium Carbide Air Bearing Surface of the Hard Disk Slider

Patama Pholprasit, Nithi Atthi, Thawat Thammabut, Wutthinan Jeamsaksiri, Charndet Hruanun, Amporn Poyai, and Rardchawadee Silapunt
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (961K)]

06FF09 : Simple Fabrication of Nickel Micropatterning under Ambient Condition: Use of Pen-Type Nanolithography and Electroless Plating

Miki Onoue and Hirobumi Ushijima
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (757K)]

06FF10 : Fabrication of 5-nm-Sized Nanodots Using Self-Assembly of Polystyrene–Poly(dimethylsiloxane)

Miftakhul Huda, Jing Liu, You Yin, and Sumio Hosaka
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (757K)]

06FF11 : Additional Electrochemical Treatment Effects on the Switching Characteristics of Anodic Porous Alumina Resistive Switching Memory

Shintaro Otsuka, Ryouta Takeda, Saeko Furuya, Tomohiro Shimizu, Shouso Shingubara, Nobuyuki Iwata, Tadataka Watanabe, Yoshiki Takano, and Kouichi Takase
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (865K)]

06FF12 : Silver Embedded Nanomesas as Enhanced Single Quantum Dot Emitters in the Telecommunication C Band

Jae-Hoon Huh, Claus Hermannstädter, Kouichi Akahane, Nahid A. Jahan, Masahide Sasaki, and Ikuo Suemune
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (624K)]

06FF13 : Alignment and Use of Self-Assembled Peptide Nanotubes as Dry-Etching Mask

Karsten B. Andersen, Jaime Castillo-León, Tanya Bakmand, and Winnie E. Svendsen
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (504K)]

06FF14 : Molecular Dynamics Study on Enhanced Cu Coverage of Trench Filling with Low-Index Ta Surfaces

Rong-Tai Hong and Jaw-Yen Yang
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (942K)]

06FF15 : Two-Color Photoexcitation in a GaNAs/AlGaAs Quantum Well Solar Cell

Martin Elborg, Masafumi Jo, Yi Ding, Takeshi Noda, Takaaki Mano, and Kazuaki Sakoda
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (315K)]

06FF16 : Influence of Rapid Thermal Annealing and Substrate Terrace Width on Self-Organizing Formation of Periodic Straight Nanogroove Array on NiO(111) Epitaxial Thin Film

Ryosuke Yamauchi, Geng Tan, Daishi Shiojiri, Koji Koyama, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
Published June 20, 2012 (2 pages)
[Abstract] [Full Text PDF (1422K)]

Nanomaterials

06FG01 : Characterization of ZnO Tetrapods Prepared by a Simple Oxidation of Zn Plate in Air Atmosphere

Du-han Bae and Geun-Hyoung Lee
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (661K)]

06FG02 : Fabrication and Electrochemical Characterization of Nanoporous Silicon Electrode for Amperometric Urea Biosensor

Donghwa Yun, Min-Jung Song, Sungwoo Hwang, and Suk-In Hong
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (386K)]

06FG03 : Photoluminescence and X-ray Absorption Fine Structure Analysis of Sm-Doped TiO₂ Thin Films

Junpei Sakurai, Susumu Harako, Takuya Ohtsuki, Shuji Komuro, Norie Hirao, Rei Kasahara, and Xinwei Zhao
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (772K)]

06FG04 : Photodissolution Suppression and Photocatalytic Activity Improvement through Crystallinity Improvement of ZnO Nanocrystalline Thin Films

Rei Kasahara, Susumu Harako, Shuji Komuro, and Xinwei Zhao
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (668K)]

06FG05 : Differential-Mode Biosensor Using Dual Extended-Gate Metal–Oxide–Semiconductor Field-Effect Transistors

Jinhyeon Choi, Hee Ho Lee, Jungil Ahn, Sang-Ho Seo, and Jang-Kyoo Shin
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (851K)]

06FG06 : Hydrothermal Synthesis of Silicon-Based Hollow Nanostructures

Satoru Sonae, Masato Ara, and Hirokazu Tada
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (499K)]

06FG07 : Utilization of Size-Controlled Squid Ink Particles as Enhancer for the Porosity of Titania Electrode in Dye-Sensitized Solar Cell

Toshihiko Matsuura, Takamine Kato, Ken-ichi Minato, and Takashi Ueno
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (623K)]

06FG08 : Synthesis of TiO₂ Nanowires via Hydrothermal Method

Asiah Mohd Nor, Mohd Faizal Achoi, Mohamad Hafiz Mamat, Musa Mohamed Zabidi, Saifollah Abdullah, and Mohamad Rusop Mahmood
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (911K)]

06FG09 : Effect of Solvent on the Dielectric Properties of Nanocomposite Poly(methyl methacrylate)-Doped Titanium Dioxide Dielectric Films

Lyly Nyl Ismail, Nik Noor Hafizah Nik Mohamad, Muhamad Salleh Shamsudin, Habibah Zulkefle, Mohd Hanapiah Abdullah, Sukreen Hana Herman, and Mohamad Rusop
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (915K)]

06FG10 : Simple Fabrication of Two-Dimensional Self-Assemblies Consisting of Gold and Silver Nanoparticles at an Air/Toluene Interface and Their Surface-Enhanced Raman Scattering Activity

Kosuke Sugawa and Yoshimasa Tanoue
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (914K)]

06FG11 : Fast Formation of Conductive Material by Simultaneous Chemical Process for Infilling Through-Silicon Via

Jin Kawakita and Toyohiro Chikyow
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (630K)]

06FG12 : Carrier Transport Mechanisms of Organic Bistable Devices Fabricated Utilizing Hybrid C₆₀/Poly(methyl methacrylate) Nanocomposites

Chan Ho Yoo, Seong Hoon Ko, and Tae Whan Kim
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (456K)]

06FG13 : Effect of Potassium Chloride Concentration on the Structural and Optical Properties of ZnO Nanorods Grown on Glass Substrates Coated with Indium Tin Oxide Film

Hee Yeon Yang, Young Soo No, Jin Young Kim, and Tae Whan Kim
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (276K)]

06FG14 : Oxygen Vacancy Chain Formation in TiO₂ under External Strain for Resistive Switching Memory

Dong Su Yoo, Kiyong Ahn, Sung Beom Cho, Minho Lee, and Yong-Chae Chung
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (537K)]

06FG15 : Optical Studies of GaAs Nanowires Grown on Trenched Si(001) Substrate by Cathodoluminescence

Ling Lee, Kun-Feng Chien, Wen-Chung Fan, Wu-Ching Chou, Chih-Hsin Ko, Cheng-Hsien Wu, You-Ru Lin, Cheng-Tien Wan, Clement H. Wann, Chao-Wei Hsu, Yung-Feng Chen, and Yan-Kuin Su
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (398K)]

Nano tools

06FH01 : Highly Sensitive Detection of Target Biomolecules on Cell Surface Using Gold Nanoparticle Conjugated with Aptamer Probe

Hyonchol Kim, Hideyuki Terazono, Masahito Hayashi, Hiroyuki Takei, and Kenji Yasuda
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (539K)]

06FH02 : Theoretical Study of Mechanical Control of Micro- and Nano-Mechanical Systems by Cavity-Induced Radiation Force

Nguyen Duy Vy, Ryu Ooka, and Takuya Iida
Published June 20, 2012 (3 pages)
[Abstract] [Full Text PDF (462K)]

Nanoimprint, nanoprint, and rising lithography

06FJ01 : Large-Area Nanotemplate Process and Its Application to Roll Imprint

Jun-Hyuk Choi, Soon-Won Lee, Ji-Hye Lee, Dae-Geun Choi, Jun-Ho Jeong, and Eung-Sug Lee
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (756K)]

06FJ02 : Imprinted Pattern Profile-Dependent Optical Properties of Metal Nanostructures

Jun-Hyuk Choi, Seong-Je Park, Ji-Hye Lee, Chul-Hyun Kim, Jun-Ho Jeong, Dae-Geun Choi, Eung-Sug Lee, and Jong-Ryul Jeong
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (742K)]

06FJ03 : Transfer Printing Method to Obtain Polarized Light Emission in Organic Light-Emitting Device

Hee Yeon Noh, Chang-sub Park, Ji-Sub Park, Shin-Won Kang, and Hak-Rin Kim
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (872K)]

06FJ04 : Silica/Ultraviolet-Cured Resin Nanocomposites for Replica Molds in Ultraviolet Nanoimprinting

Cheol Min Yun, Shimpei Kudo, Koichi Nagase, Shoichi Kubo, and Masaru Nakagawa
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (647K)]

06FJ05 : Morphological Changes in Ultraviolet-Nanoimprinted Resin Patterns Caused by Ultraviolet-Curable Resins Absorbing Pentafluoropropane

Shu Kaneko, Kei Kobayashi, Yoshitaka Tsukidate, Hiroshi Hiroshima, Shinji Matsui, and Masaru Nakagawa
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (474K)]

06FJ06 : Impact of Resist Shrinkage and Its Correction in Nanoimprint Lithography

Akira Horiba, Masaaki Yasuda, Hiroaki Kawata, Makoto Okada, Shinji Matsui, and Yoshihiko Hirai
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1144K)]

06FJ07 : Simulation of Resist Filling Properties under Condensable Gas Ambient in Ultraviolet Nanoimprint Lithography

Yoshinori Nagaoka, Ryosuke Suzuki, Hiroshi Hiroshima, Naoki Nishikura, Hiroaki Kawata, Noboru Yamazaki, Takuya Iwasaki, and Yoshihiko Hirai
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (740K)]

06FJ08 : Step and Repeat Ultraviolet Nanoimprinting under Pentafluoropropane Gas Ambient

Shuso Iyoshi, Makoto Okada, Tetsuya Katase, Katsuhiko Tone, Kei Kobayashi, Shu Kaneko, Yuichi Haruyama, Masaru Nakagawa, Hiroshi Hiroshima, and Shinji Matsui
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1143K)]

06FJ09 : Effective Linewidth Measurement of 45-nm-Half-Pitch Ultraviolet Nanoimprint Lithography Patterns by Scanning Electron Microscope Inspection and Extremely Shallow Si Etching

Kenta Suzuki, Sung-Won Youn, Qing Wang, Hiroshi Hiroshima, and Yasushiro Nishioka
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1190K)]

06FJ10 : Throughput of Ultraviolet Nanoimprint in Pentafluoropropane Using Spin Coat Films under Thin Residual Layer Conditions

Hiroshi Hiroshima and Kenta Suzuki
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1079K)]

Bio MEMS, lab on a chip

06FK01 : Microchip-Based Organophosphorus Detection Using Bienzyme Bioelectrocatalysis

Yong Duk Han, Chi Yong Jeong, Jun Hee Lee, Dae-Sik Lee, and Hyun C. Yoon
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (857K)]

06FK02 : Improvement of Electrical Stimulation Protocol for Simultaneous Measurement of Extracellular Potential with On-Chip Multi-Electrode Array System

Tomoyuki Kaneko, Fumimasa Nomura, Akihiro Hattori, and Kenji Yasuda
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (844K)]

06FK03 : Importance of Thickness in Human Cardiomyocyte Network for Effective Electrophysiological Stimulation Using On-Chip Extracellular Microelectrodes

Tomoyo Hamada, Fumimasa Nomura, Tomoyuki Kaneko, and Kenji Yasuda
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1176K)]

06FK04 : Effect of Microscale Surface Geometry of Electrodes on Performance of Microbial Fuel Cells

Tomonori Kano, Eiichi Suito, Koichi Hishida, and Norihisa Miki
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1107K)]

06FK05 : Extended Depth of Field Optics for Precise Image Analysis in Microfluidic Flow Cytometry

Akihiro Hattori and Kenji Yasuda
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (492K)]

06FK06 : Quantitative Evaluation of Closed-Loop-Shaped Cardiomyocyte Network by Using Ring-Shaped Electrode

Fumimasa Nomura, Tomoyuki Kaneko, Tomoyo Hamada, Akihiro Hattori, and Kenji Yasuda
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (463K)]

06FK07 : Measurement of Nonlinear Mechanical Properties of Surfactant-Added Poly(dimethylsiloxane)

Hea Teak Kim and Ok Chan Jeong
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (690K)]

06FK08 : Cell-Sorting System with On-Chip Imaging for Label-Free Shape-Based Selection of Cells

Hideyuki Terazono, Masahito Hayashi, Hyonchol Kim, Akihiro Hattori, and Kenji Yasuda
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1094K)]

06FK09 : Photochemically Induced Crystallization of Proteins Accelerated on Two-Dimensional Gold Gratings

Keiko Tawa, Susumu Haruta, Tetsuo Okutsu, and Junji Nishii
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (638K)]

06FK10 : Sensitive Fluorescence Microscopy of Neurons Cultured on a Plasmonic Chip

Chikara Yasui, Keiko Tawa, Chie Hosokawa, Junji Nishii, Hiroyuki Aota, and Akira Matsumoto
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (997K)]

06FK11 : Parallelization of Catalytic Packed-Bed Microchannels with Pressure-Drop Microstructures for Gas–Liquid Multiphase Reactions

Sunao Murakami, Kenichiro Ohtaki, Sohei Matsumoto, and Tomoya Inoue
Published June 20, 2012 (2 pages)
[Abstract] [Full Text PDF (416K)]

Microsystem technology and MEMS

06FL01 : New Laser-Scan Exposure System for Delineating Precise Helical Patterns onto Sub-50-μmWires

Toshiyuki Horiuchi and Ryosuke Sasaki
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (763K)]

06FL02 : Vibration Analysis of Original Shape Quartz Resonator for High Quality Factor Realization

Hiroshi Oigawa, Yuuya Sakano, Jing Ji, Daisuke Yamazaki, and Toshitsugu Ueda
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (744K)]

06FL03 : Transparent Solar Concentrator for Flat Panel Display

Chia-Hung Yeh, Fuh-Yu Chang, Hong-Tsu Young, Tsung-Yen Hsieh, and Chia-Hsiung Chang
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1218K)]

06FL04 : High Quality Factor 80 MHz Microelectromechanical Systems Resonator Utilizing Torsional-to-Transverse Vibration Conversion

Masaya Kiso, Mitsuhiro Okada, Hideaki Fujiura, Hideo Miyauchi, Kazuya Niki, Hiroshi Tanigawa, and Kenichiro Suzuki
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1626K)]

06FL05 : Electrowetting Lens Employing Hemispherical Cavity Formed by Hydrofluoric Acid, Nitric Acid, and Acetic Acid Etching of Silicon

June Kyoo Lee, Ju Chan Choi, Won Ick Jang, Hak-Rin Kim, and Seong Ho Kong
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (5310K)]

06FL06 : Lamé-Mode Octagonal Microelectromechanical System Resonator Utilizing Slanting Shape of Sliding Driving Electrodes

Tadashi Okamoto, Hiroshi Tanigawa, and Kenichiro Suzuki
Published June 20, 2012 (7 pages)
[Abstract] [Full Text PDF (1276K)]

06FL07 : Thermal–Photovoltaic Hybrid Solar Generator Using Thin-Film Thermoelectric Modules

Mizue Mizoshiri, Masashi Mikami, and Kimihiro Ozaki
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1186K)]

06FL08 : Frequency Stability of a Closed-Loop Oscillator Using Micro-Electro-Mechanical Cantilever Resonator Against Temperature Fluctuation

Tsuyoshi Ikehara, Mitsuo Konno, Sunao Murakami, and Takashi Mihara
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (687K)]

06FL09 : Implementation of Complementary Metal–Oxide–Semiconductor Microelectromechanical Systems Lorentz Force Two Axis Angular Actuator

Chih-Ming Sun, Chung-Lin Wu, Chuanwei Wang, Chun-I Chang, Ming-Chuen Yip, and Weileun Fang
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (939K)]

06FL10 : High-Sensitivity Fiber-Optic Fabry–Perot Interferometer Temperature Sensor

Xuefeng Li, Shuo Lin, Jinxing Liang, Hiroshi Oigawa, and Toshitsugu Ueda
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (663K)]

06FL11 : Demonstration of Vibrational Braille Code Display Using Large Displacement Micro-Electro-Mechanical Systems Actuators

Junpei Watanabe, Hiroaki Ishikawa, Xavier Arouette, Yasuaki Matsumoto, and Norihisa Miki
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (823K)]

06FL12 : Micro-Electro-Mechanical-Systems-Based Micro-Ro-Boat Utilizing Steam as Propulsion Power

Ju Chan Choi, Young Chan Choi, June Kyoo Lee, and Seong Ho Kong
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1179K)]

06FL13 : Miniaturized Dual-Axis Electrolytic Tilt Sensor

Ju Chan Choi, Young Chan Choi, June Kyoo Lee, and Seong Ho Kong
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (889K)]

06FL14 : Magnetic Micro Actuator Using Interactive Force between Magnetic Elements

Kenji Hatama, Fujio Tsumori, Yang Xu, Hyungoo Kang, Toshiko Osada, and Hideshi Miura
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (927K)]

06FL15 : Simple Atmospheric-Pressure Nonthermal Plasma-Jet System for Poly(dimethylsiloxane) Bonding Process

Kangil Kim, Geunyoung Kim, Yeongtaek Oh, Tae-Gyu Park, Dong Chul Han, and Sang Sik Yang
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1036K)]

06FL16 : Design and Fabrication of Microelectromechanical Systems Probe Card with Vertical Trench Guide for Fine Pitch Probing

Bonghwan Kim, Chanseob Cho, Byeungleul Lee, Hyeon Cheol Kim, and Kukjin Chun
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (1225K)]

06FL17 : Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating

Takashi Ikegami, Michael P. Stocker, Kathleen Monaco, John T. Fourkas, and Shoji Maruo
Published June 20, 2012 (4 pages)
[Abstract] [Full Text PDF (674K)]

06FL18 : Square-Patterned Narrow-Band Infrared Emitter for Filter Less Infrared Gas Sensor

Jun Tae Song, Joong Hee Park, June Kyoo Lee, Ju Chan Choi, and Seong Ho Kong
Published June 20, 2012 (5 pages)
[Abstract] [Full Text PDF (921K)]

06FL19 : Effects of Specimen Dimensions on Adhesive Shear Strength between a Microsized SU-8 Column and a Silicon Substrate

Chiemi Ishiyama, Toshikazu Tasaki, Tso-Fu Mark Chan, and Masato Sone
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (589K)]

06FL20 : Fabrication of Nickel Microlens Dies Using Hemispherical Resist Patterns as Electroplating Molds

Hiroshi Ono and Toshiyuki Horiuchi
Published June 20, 2012 (6 pages)
[Abstract] [Full Text PDF (1369K)]

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