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11th Conf. (1979 Int.) Solid State Devices, Tokyo, 1979
Japanese Journal of Applied Physics
Vol. 19 (1980) Suppl. 19-1


A-0: Opening

3-11 : (Invited) Recent Progress and Potential of SIT
Jun-ichi Nishizawa
13-14 : (Invited) MOS Devices Fabricated by Electron Beam Lithography
H. N. Yu
15-22 : (Invited) Basic Technology for VLSI
Yasuo Tarui
23-31 : (Invited) Recent Progress in Semiconductor Laser Research and Development
Izuo Hayashi

A-1: Advanced Lithographys and Process

35-40 : (Invited) X-Ray Lithography
Shin-ichi Yamazaki and Toa Hayasaka
41-45 : (Invited) Electron Image Projection
P. J. Daniel and R. P. Kramer
47-50 : 1: 4 Demagnifying Electron Projection System
Takayuki Asai, Shin-ichi Ito, Toshio Eto and Masatoshi Migitaka
51-55 : Electron Beam Mask Fabrication for MOSLSI's with 1.5 µm Design Rule
Shinji Okazaki, Kozo Mochiji, Eiji Takeda and Yoji Maruyama
57-60 : Reactive Sputter Etching System with Floating Grid
Hikou Shibayama, Tetsuya Ogawa, Koichi Kobayashi and Tokushige Hisatsugu
61-64 : Low-frequency Low-noise Transistors Fabricated by Double Ion Implantation
K. Yagi, M. Tamura, Y. Yanagi, K. Inaniwa and T. Tokuyama
65-69 : Computer Aided Si-MOSFET Process Designing
Yasuo Ohno and Yuji Okuto
71-74 : Deposition of Silicon Nitride Films by High Rate Reactive Sputtering
Youichi Hoshi, Masahiko Naoe and Shun-ichi Yamanaka

A-2: MOS Devices/Basic Aspects

77-83 : (Invited) Physical Effects in Small Geometry MOS Transistors
John L. Moll and Edward Y. Sun
85-92 : (Invited) Non-Thermal Carrier Generation in MOS Structures
Susumu Kohyama, Tohru Furuyama, Shouichi Mimurat and Hisakazu Iizuka
93-97 : Design Limitations due to Substrate Currents and Secondary Impact lonization Electrons in NMOS LSI's
Jun-ichi Matsunaga, Susumu Kohyama, Masami Konaka and Hisakazu Iizuka
99-100 : Near Ideal Si-SiO2 Interfaces
L. A. Kasprzak and A. K. Gaind
101-102 : On Al-SiO2 Interfaces and Oxidation Temperatures
M. Av-Ron, M. Shatzkes, T. Distefano and R. Gdula
103-106 : Anodization of Silicon in RF Induced Oxygen Plasma
Vu Quoc Ho and Takuo Sugano
107-112 : P-Channel versus N-Channel in MOS-ICs of Submicron Channel Lengths
Luong Mo Dang, Hiroshi Iwai, Yoshio Nishi and Shinji Taguchi

A-3: Laser Annealing/SOS Devices

115-120 : (Invited) Mechanisms of Laser Annealing
J. M. Poate
121-128 : (Invited) Applications of Scanning CW Lasers and Electron Beams in Silicon Technology
J. F. Gibbons
129-132 : Short Channel MOS FET's Fabricated by Self-Aligned Ion Implantation and Laser Annealing
Masanobu Miyao, Mitsumasa Koyanagi, Hiroshi Tamura, Norikazu Hashimoto and Takashi Tokuyama
133-138 : Resistivity Reduction of Polycrystalline Silicon Film by Laser Annealing
Shinji Onga, Susumu Kohyama, Kenji Shibata, Yoshihide Nagakubo and Hisakazu Iizuka
139-144 : Improvement in Electrical Properties of Laser Annealed Ion Implanted GaAs
M. H. Badawi, B. J. Sealy, K. G. Stephens and J. A. Akintunde
145-150 : (Invited) Is SOS Ready for VLSI?
J. Borel
151-154 : High Speed C-MOS IC Using Buried SiO2 Layers Formed by Ion Implantation
Katsutoshi Izumi, Masanobu Doken and Hisashi Ariyoshi
155-160 : Charge Pumping Memory with SOS-MOS Transistors
Nobuo Sasaki, Motoo Nakano and Takashi Iwai
161-165 : Electron-Hole Pair Generation at the Silicon-Sapphire Interface of SOS Devices
K. Lehovec and Shi-Tron Lin

A-4: LSI Devices

169-173 : Yield Modeling of Bipolar Integrated Circuits
Helmuth Murrmann and Ditmar Kranzer
175-180 : A High Speed Schottky 4 k-Bit PROM Using Diffused Eutectic Aluminum Process (Deap)
Toshitaka Fukushima, Kouji Ueno and Kazuo Tanaka
181-185 : A New Transistor Structure for High Speed Bipolar LSI
Hiromi Sakurai, Yoichi Akasaka, Kenji Murakami, Koichi Kijima and Hidefumi Nakata
187-191 : A Single-Chip Speech Synthesizer for the PARCOR CODEC
Norio Miyahara, Shin-ichiro Yamada, Michihiro Yamane, Kazuyuki Saito, Eisuke Arai and Manabu Sunazawa
193-202 : Adaptive Wafer Scale Integration
Yukun Hsia, Gareth C. C. Chang and F. Dennis Erwin
203-208 : A 3000-Gate CMOS Masterslice LSI
Mitsumasa Ashida, Ryusuke Hoshikawa, Nobutake Matsumura, Jun-ichi Ishii, Hiroaki Ichikawa, Yoshihide Sugiura and Katsuyuki Inayosh

A-5: Memory Devices

209-212 : Analysis and Design of the Taper Isolated Dynamic RAM Threshold Transistor for VLSI dRMs
P. K. Chatterjee, G. W. Taylor and J. E. Leiss
213-217 : Buried J-FET Powered Static RAM Cell
Osamu Minato, Yoshio Sakai, Toshiaki Masuhara and Toshio Sasaki
219-224 : Effects of High Temperature Hydrogen Annealing on n-Channel Si-Gate MNOS Devices
Yuji Yatsuda, Shin-ichi Minami, Ryuji Kondo, Takaaki Hagiwara and Yokichi Itoh
225-229 : N-Channel High Speed Nonvolatile Static RAM Utilizing MNOS Capasitors
Shozo Saito, Yukimasa Uchida and Norio Endo
231-237 : Dynamic Injection MNOS Memory Devices
Ryuji Kondo, Yuji Yatsuda, Mitsumasa Koyanagi and Yokichi Itoh
239-243 : High-Speed Nonvolatile MNOS/CMOS RAM
Gary Derbenwick, William Dodson and Ralph Sokel
245-248 : MNOS Traps and Tailored Trap Distribution Gate Dielectric MNOS
Yukun Hsia and K. L. Ngai
249-250 : Scanning Acoustic Microscopy for Study of Interfaces in Solid-State Devices
C. S. Tsai, J. K. Wang and C. C. Lee

A-6: Charge Transfer Devices/SIT and other Devices

253-257 : (Invited) The Buried Channel CCD: an Inherently Reliable Technology
G. F. Amelio and N. W. Chanoski
259-263 : A New Multiplex Input Technique for High Density CCD Memory
Kazuyasu Fujishima, Michihiro Yamada, Tetsuo Tada, Satoshi Takano, Masahiro Yoneda and Yoshimi Gamou
265-268 : CCD Analog-Analog Correlator with Four-FET Bridge Multipliers
Jay P. Sage and Arthur M. Cappon
269-272 : Reduced Geometry GaAs CCD for High Speed Signal Processing
I. Deyhimy, J. S. Harris, Jr., R. C. Eden and R. J. Anderson
273-277 : Static Induction Transistor Memory
Jun-ichi Nishizawa, Takashige Tamamushi, Tadahiro Ohmi, Terumoto Nonaka and Yasunori Mochida
279-282 : Static Induction Transistor Logic
Jun-ichi Nishizawa, Terumoto Nonaka and Yasunori Mochida
283-287 : 2 GHz, High Power Silicon SIT's
Toshio Shino, Hisao Kamo, Kiyoshi Aoki and Susumu Okano
289-293 : Bipolar Mode Static Induction Transistor
Jun-ichi Nishizawa, Tadahiro Ohmi, Yasunori Mochida and Takeshi Matsuyama
295-300 : Stationary and Transient Thermal Simulation and Its Use in Power IC Design
P. Antognetti, G. R. Bisio, F. Curatelli and S. Palara
301-304 : A New Majority Carrier Diode -- The Camel Diode
J. M. Shannon
305-308 : A 100 W Static Induction Transistor Operating at 1 GHz
Yasuya Kajiwara, Masao Aiga, Yukio Higaki, Mari Kato, Yoshinori Yukimoto and Kiyoshi Shirahata
309-312 : A New Transistor with Improved Safe Operating Area
Hisao Kondo and Yoshinori Yukimoto

B-1: GaAs IC

315-318 : (Invited) LSI Prospects of GaAs FET's
R. Zuleeg
319-324 : MSI High Speed Low Power GaAs Integrated Circuits
S. I. Long, B. M. Welch, R. C. Eden, F. S. Lee and R. Zucca
325-328 : Low-Power, High-Speed Integrated Logic with GaAs MOSFET
Naoki Yokoyama, Takashi Mimura, Hirotsugu Kusakawa, Katsuhiko Suyama and Masumi Fukuta
329-333 : High Speed Enhancement-Mode GaAs MESFET Integrated Circuits
Takashi Mizutani, Naoki Kato, Satoru Ishida, Kazuyoshi Asai, Yutaka Sakakibara, Kazuhiko Komatsu and Masamichi Ohmori
335-338 : VLSI GaAs Tunnel Diode-FET Logic and Memory Cell
Kurt Lehovec
339-343 : Power GaAs MESFETs with a Graded Recess Structure
Asamitsu Higashisaka, Takashi Furutsuka, Yoichi Aono, Yoichiro Takayama and Fumio Hasegawa
345-348 : Flip-Chip Mounted GaAs Power FET with Improved Performances in X to Ku Band
Yasuo Mitsui, Michihiro Kobiki, Manabu Wataze, Mutsuyuki Otsubo, Takashi Ishii and Shigeru Mitsui

B-2: GaAs FET/LED and Detector

351-355 : Interface Effects on Drain Current Instability in GaAs MESFETs with Buffer Layer
Tomohiro Itoh and Hisayoshi Yanai
357-360 : Investigation on the Drift of GaAs MESFET's by High Frequency Parameters
Keiichi Ohata, Hitoshi Itoh and Fumio Hasegawa
361-364 : Tin Diffusion from Doped Oxides for Fabricating GaAs Microwave Devices
Norbert Arnold, Heinrich Daembkes and Klaus Heime
365-369 : A New Type GaAlAs Monolithic Lensed LED
Masayuki Abe, Osamu Hasegawa, Yasuaki Komatsu and Yoshikazu T\=oyama
371-375 : High-Brightness Green-Light-Emitting Thin-Film Electroluminescent Device
Kenji Okamoto and Yoshihiro Hamakawa
377-382 : Bright Pure Green Emission from N-free GaP LED's
Jun-ichi Nishizawa, Yasuo Okuno, Masayoshi Koike and Fumitoshi Sakurai
383-387 : pInxGa1-xSb-nGa1-yAlySb Heterojunction Photodiodes
Toshio Mizuki, Yoshimasa Sugimoto, Akira Tanaka and Tokuzo Sukegawa

B-3: Laser

391-3397 : (Invited) Mode Control in Semiconductor Lasers
Ryoichi Ito
399-402 : An Improved Etched Buried Heterostructure Laser with Reduced Threshold Current
Masaaki Ayabe, Osamu Matsuda, Masashi Dosen, Sumio Santa and Naozo Watanabe
403-409 : Partially Homogeneous Broadening and Saturation in Semiconductor Lasers
Hideya Gamo
411-414 : 1.5-1.6 µm Wavelength (100) GalnAsP/InP DH Lasers
Shigehisa Arai, Yoshio Itaya, Yasuharu Suematsu and Katsumi Kishino
415-423 : (Invited) Ga1-xAlxAs-GaAs Heterostructure Lasers Grown by Metalorganic Chemical Vapor Deposition
Russell D. Dupuis
425-429 : Catastrophic Optical Damage Generation Mechanism in (AlGa)As DH Lasers
Taibun Kamejima and Hiroo Yonezu
431-436 : Degradation Characteristics of Ga1-xAlxAs Visible Diode Lasers
Takashi Kajimura, Takao Kuroda, Shigeo Yamashita, Hideo Todokoro, Michiharu Nakamura and Jun-ichi Umeda
437-440 : Slow Degradation Mechanism of GaAlAs Light-Emitting Diodes
Kazuo Kondo, Shigenobu Yamakoshi, Shoji Isozumi and Toyoshi Yamaoka

B-4: Optoelectronic Devices

443-449 : (Invited) Materials and Devices for Long Wavelength Optical Communication
Yoshihiko Mizushima
451-454 : Thin Film Optical Circuit Fabrication Using a CO2 Laser
Hiroshi Terui and Morio Kobayashi
455-458 : A Coupled-Waveguide TE/TM Mode Splitter
Osamu Mikami
459-464 : Metal-Semiconductor-Metal Photodetector for High-Speed Optoelectronic Circuits
Takayuki Sugeta, Tsuneo Urisu, Seizo Sakata and Yoshihiko Mizushima
465-469 : Signal Processing with Nonlinear Integrated Optics
R. Normandin and G. I. Stegeman

B-5: Compound Semiconductor Device Technology

473-477 : A New Heat Treatment Technique for No Thermal Conversion of Semi-Insulating GaAs Wafers
Toshio Tanaka, Saburo Takamiya, Makoto Ishii and Wataru Susaki
479-482 : Characterization of InxGa1-xAs1-yPy Epitaxial Layers and Relation to Lattice Matching
Akiyoshi Tamura, Koji Oka, Masataka Inoue, Junji Shirafuji and Yoshio Inuishi
483-487 : Selective Plasma Oxidation of GaAs -- A Study of the Interface Properties
R. P. H. Chang
489-493 : Low Temperature Alloyed Contact Formation in Various Metal-Semiconductor Couples
Motohiro Iwami, Su Chol Kim, Wako Kammura and Akio Hiraki
495-500 : Ion Implantation Study of HgCdTe
L. O. Bubulac, W. E. Tennant, S. H. Shin, C. C. Wang, M. Lanir, E. R. Gertner and E. D. Marshall
501-505 : Quantitative Analysis of Semiconductor Materials with Secondary Ion Mass Spectrometer
Masaharu Oshima, Izumi Kawashima and Shizuka Yoshii
507-511 : Magnetooptical Properties of MnBi Films Prepared by lonized-Cluster Beam Deposition Technique
Toshinori Takagi, Kakuei Matsubara, Naoto Kondo, Kenichi Fujii and Hiroshi Takaoka
513-517 : Operation and Stability of SnO2 Gas Sensors
Peter Tischer, Hans Pink and Ludwig Treitinger

B-6: Solar Cells and Amorphous Devices

521-526 : Preparation and Characterization of Reactively-Sputtered Amorphous Si: H Films
S. Iizima, H. Okushi, A. Matsuda, S. Yamasaki, K. Nakagawa, M. Matsumura and K. Tanaka
527-532 : Ion Implanted Grating Type Si Solar Cells
Huey-liang Hwang, Ru-shyah Tang, Joseph J. Loferski and Ying-Chuan Yang
533-538 : High Efficiency Silicon Solar Cells Using Minority Carrier MIS Structures
R. B. Godfrey and M. A. Green
539-544 : Efficient Solar Cells from Metallurgical-Grade Silicon
Terunori Warabisako, Tadashi Saitoh, Ekyo Kuroda, Haruo Itoh, Nobuo Nakamura and Takashi Tokuyama
545-550 : Design Parameters of a-Si: H High-Voltage Photovoltaic Cells
Hiroaki Okamoto, Yoshiteru Nitta and Yoshihiro Hamakawa
551-556 : Si and GaAs SIS Heterostructure Solar Cells Using Spray-Deposited ITO
P. P. Sharma, T. C. Anthony, S. Ashok, S. J. Fonash and L. L. Tongson
557-561 : High-Efficiency GaAs MOS Solar Cells by Anodization in Active Region
Hideki Hasegawa, Shinichi Tamori and Takayuki Sawada
563-566 : High Efficiency AlxGa1-xAs-GaAs Solar Cells with High Open-Circuit Voltage and High Fill Factor
Susumu Yoshida, Kotaro Mitsui, Takao Oda, Toshio Sogo and Kiyoshi Shirahata
567-571 : A Comparative Study of Cu2S-ZnxCd1-xS and Cu2S-CdS Thin Film Solar Cells Prepared by Solid State Reaction
M. S. Tomar and F. J. Garcia
573-577 : Amorphous Silicon Image Pickup Devices
Yoshinori Imamura, Saburo Ataka, Yukio Takasaki, Chushiro Kusano, Sachio Ishioka, Tadaaki Hirai and Eiichi Maruyama
579-583 : High Density Video Signal Recording in a New Amorphous Chalcogenide Thin Film
Motoyasu Terao, Kazuo Shigematsu, Masahiro Ojima, Yoshio Taniguchi, Shinkichi Horigome and Seiji Yonezawa

C-2: Josephson Devices

587-589 : Experimental Integrated Microwave Circuits with Josephson Junctions
Tapio Wiik, Hannu Ronkainen and Tor Stubb
591-594 : Fabrication of High Quality NbN/Pb Josephson Junction
Fujitoshi Shinoki, Susumu Takada, Shin Kosaka and Hisao Hayakawa
595-599 : Fabrication of DC-SQUIDs and Their Characteristics for Digital Applications
Shinya Hasuo, Hideo Suzuki and Koichi Dazai
601-605 : Fabrication of Josephson Weak Links Using Electron Beam Lithography and Ion-Etching, and Proposal of a New Single Flux Quantum Logic
Hirotaka Tamura, Yoichi Okabe and Takuo Sugano
607-611 : Current Injection Logic Gate with Four Josephson Junctions
Susumu Takada, Shin Kosaka and Hisao Hayakawa

C-3: Crystal Technology

615-620 : (Invited) Advances in Silicon Crystal Properties
D. Huber and E. Sirtl
621-625 : Electrical Characterization of Micro Defects in Silicon Crystal
Kenji Ikuta, Yutaka Matsuoka and Hidetoshi Takaoka
627-630 : Impurity Content Determination in Si by Exciton Decays
R. B. Hammond and R. N. Silver
631-635 : Characterization of Residual Impurities in Highly Pure Si Crystals by Photoluminescence Technique
Michio Tajima, Atsushi Yusa and Takao Abe
637-640 : Ion Implanted Silicon Molecular Beam Epitaxy (I2 Si MBE)
Yusuke Ota
641-645 : Doping Profile Control in Si MBE Film with Sb Ion Doping
Hideo Sugiura
647-651 : Silicon Epitaxy by Plasma Dissociation of Silane
Setsu Suzuki, Hiroshi Takai, Hidekazu Okuda and Tadatsugu Itoh
653-654 : (Invited) Horizontal Pulling of Silicon Single Crystals
B. Kudo
655-658 : Polycrystalline Silicon Ribbons Made by Rapid Quenching Methods
Noboru Tsuya, Toshio Takeuchi, Ken Ichi Arai, Kenji Ohmori, Atsuko Ebina, Tadashi Takahashi, Akihiko Kuroiwa and Teruhiko Ojima

C-5: Acoustic Devices

661-665 : (Invited) Integrated Acoustooptical Circuits for Real-Time Wideband Signal Processing
Chen S. Tsai
667-674 : (Invited) Surface-Acoustic-Wave Devices for Spread-Spectrum Communication
John H. Cafarella
675-679 : Tunable Surface-Acoustic-Wave Generator on a Monolithic MIS Structure
Kazuo Tsubouchi, Shoichi Minagawa, Takeshi Okamoto and Nobuo Mikoshiba
681-682 : Large Angle Acoustic Beam Steering in Acoustically Anisotropic Crystal
E. G. Lean and W. H. Chen
683-685 : Surface Acoustic Solitons
J. F. Ewen, R. L. Gunshor and V. H. Weston
687-690 : Observation of the Effective Diffraction of Submillimeter Radiation on the Electronic Waves in n-InSb
Valery Proklov, Vladimir Mirgorodsky, Evgeny Ushatkin, Yury Gulyaev and Vyacheslav Meriakri

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