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14th Conf. (1982 Int.) Solid State Devices, Tokyo, 1982
Japanese Journal of Applied Physics
Vol. 22 (1983) Suppl. 22-1


A-1: OPENING

3-10 : (Invited) VLSI Technology Overviews and Trends
S.M. Sze
11-19 : (Invited) GaAs MIS Structures -- Hopeless or Promising?
Harry C. Gatos, Jacek Lagowski and Thomas E. Kazior
21-27 : (Invited) Epitaxial Silicide Films for Integrated Circuits and Future Devices
Seijiro Furukawa and Hiroshi Ishiwara
29-35 : (Invited) n-i-p-i Superlattices -- Novel Semiconductors with Tunable Properties
Gottfried H. Döhler
37-41 : (Invited) Surface Acoustic Wave Devices on Silicon
R. L. Gunshor, S. J. Martin and R. F. Pierret

A-2: LSI-1

45-50 : (Invited) LSIs for Communication Uses
Toshimasa Suzuki and Kotaro Kato
51-54 : A 1 K bit Associative Memory LSI
Tadanobu Nikaido, Takeshi Ogura, Shigetatsu Hamaguchi and Susumu Muramoto
55-58 : New Dynamic RAM Cell Combined with Hi-C Structure
Hideyuki Ozaki, Kazuhiro Shimotori, Kazuyasu Fujishima, Shin-ichi Satoh and Takao Nakano
59-62 : Hot-Electron Trapping Effects of Short Channel 64 K Dynamic MOS RAM
Michihiro Yamada, Heihachi Matsumoto, Toshifumi Kobayashi, Masaki Kumanoya, Makoto Taniguchi and Takao Nakano
63-67 : Redundancy Techniques for Dynamic RAMs
Katsuhiro Shimohigashi, Masamichi Ishihara and Shinji Shimizu
69-73 : Soft Error Analysis of Fully Static MOS RAM
Masahiko Yoshimoto, Kenji Anami, Hirofumi Shinohara, Yoshihiro Hirata, Tsutomu Yoshihara and Takao Nakano

A-3: LSI-2

77-80 : The Dielectrically Isolated High Voltage IC Technology
Yoshitaka Sugawara, Tatsuya Kamei and Yoshikazu Hosokawa
81-84 : Novel Gate-Protection Devices for MOSFET's
Isao Yoshida, Takeaki Okabe, Kazutoshi Ashikawa and Shigeo Ootaka
85-88 : Compatible High and Low Voltage CMOS Devices Using SIMOX Technology
Masahiro Akiya, Sadao Nakashima and Kotaro Kato
89-93 : MNOS Retention-Endurance Characteristics Enhancement Using Graded Nitride Dielectric
Yukun Hsia, Eden Mei and Kia L. Ngai
95-98 : Diffusion Length Measurement Using Dynamic MOS RAM
Masaki Kumanoya, Makoto Taniguchi, Michihiro Yamada, Toshifumi Kobayashi, Yasuji Nagayama and Takao Nakano
99-102 : New Observation of Hot-Carrier Injection Phenomena
Yoshinobu Nakagome, Eiji Takeda, Hitoshi Kume and Shojiro Asai
103-108 : (Invited) “High-Performance Schottky-Barrier IR-CCD Image Sensors”
Walter F. Kosonocky and Hammam Elabd
109-112 : High Density Frame Transfer Image Sensor
G. A. Beck, M. G. Collet, J. A. A. van Gils, A. J. Klinkhamer, H. L. Peek, W. N. J. Ruis, J. G. van Santen, T. F. Smit and G. T. J. Vandormael

A-4: LSI-3 AND JUNCTION DEVICES

115-119 : New Linearity Error Correction Technology for A/D and D/A Converter LSI
Y. Akazawa, Y. Matsuya and A. Iwata
121-124 : A 10 Bit All-Parallel A/D Converter
Michihiro Inoue, Toyoki Takemoto, Hideaki Sadamatsu, Akira Matsuzawa, Kunitoshi Aono and Kazuhiko Tsuji
125-128 : High Speed Bipolar ECL Devices Using a Vertically Isolated Self-Aligned Transistor
T. Fujita, H. Sakai, K. Kawakita and T. Takemoto
129-132 : Very Wide-Band Silicon Bipolar Monolithic Amplifiers
Mamoru Ohara, Tsutomu Kamoto and Tetsushi Sakai
133-136 : Modeling of the Bipolar Mode of Operation of Vertical JFET Devices
Paolo Spirito and Gianfranco Vitale
137-140 : Tapered Sidewall Schottky Diodes with Very Low Taper Angles
Yearn-Ik Choi, Choong-Ki Kim and Young-Se Kwon
141-144 : Precision Reactive Sputter Etching and Its Applications
J. S. Lechaton, G. R. Srinivasan and S. P. Gaur

A-5: PROCESS TECHNOLOGY

147-151 : (Invited) Silicide Contact for Shallow Junction Devices
K. N. Tu
153-156 : Electrical Activation and Deep Diffusion of Ion-Implanted Al and Ga in Si
M. Tamura, K. Ohyu, K. Yagi and N. Natsuaki
157-160 : Formation of Shallow p+n Junction by Low Temperature Annealing
K. Yamada, M. Kashiwagi and K. Taniguchi
161-166 : (Invited) Laser Photochemical Processing for Microelectronics
D. J. Ehrlich, T. F. Deutsch, R. M. Osgood, Jr., and D. J. Silversmith
167-170 : Sputtered Lead Silicate Glass Film for Multilevel Interconnections
Kinya Kato, Keizo Shuto and Masahiko Hasegawa
171-174 : Process Parameter Control in Optical Lithography
Paolo Antognetti, Claudio Fasce and William Oldham
175-178 : Sub-Micron Pattern Control Technology for Variable-Shaped EB Lithography
Katumi Suzuki, Shinya Hasegawa, Yasuo Iida and Katsumi Mori
179-182 : High Voltage Electron Beam Writing for Submicron Design Rule VLSI Fabrications
Makoto Yoshimi, Minoru Takahashi, Katsuhiro Kawabuchi, Yoshihide Kato and Tadahiro Takigawa

A-6: SILICON CRYSTALS

185-189 : (Invited) Controlled Oxygen Doping in Silicon
M. Watanabe, T. Usami, S. Takasu, S. Matsuo and E. Toji
191-196 : (Invited) Laser Annealing of Semiconductors
C. W. White
197-200 : Radiation Damage in MOS Devices Underlying an Electron Beam Annealed SOI Structure
Shuichi Saitoh, Kohei Higuchi and Hidekazu Okabayashi
201-204 : Lattice-Matched Epitaxial Growth of Semiconductor Films onto Insulator (Mixed Fluoride)/Si Structures
Hiroshi Ishiwara and Tanemasa Asano
205-208 : The Use of Selective Annealing for Growing Very Large Grains in Silicon on Insulator Films
J. P. Colinge, E. Demoulin, D. Bensahel and G. Auvert
209-209 : Characterization of Laser-Induced Epitaxial Si Crystal by Evaluating MOSFET's Fabricated in Grown Layers
Masanobu Miyao, Makoto Ohkura, Iwao Takemoto, Masakazu Ichikawa, Masao Tamura and Takashi Tokuyama
213-216 : Growth of Large Grained Silicon on Insulator by Electron Beam Annealing and Performance of MOS Devices
Kenji Shibata, Yamichi Ohmura, Tomoyasu Inoue, Koichi Kato, Yasuhiro Horiike and Masahiro Kashiwagi
217-221 : Evaluation and Control of Grain Boundaries in Laser-Recrystallized Polysilicon Islands for Device Fabrication
Tadashi Nishimura, Akira Ishizu and Yoichi Akasaka

B-2: LD AND LED-1

225-230 : (Invited) Dynamic-Single-Mode Semiconductor Lasers
Yasuharu Suematsu and Shigehisa Arai
231-234 : Low Threshold Current 1.3 µm InGaAsP Buried Crescent Lasers
Ryoichi Hirano, Etsuji Oomura, Hideyo Higuchi, Yasushi Sakakibara, Hirohumi Namizaki and Wataru Susaki
235-238 : Threshold Condition and Design of Surface Emitting GaInAsP/InP Injection Lasers
Haruhisa Soda, Yoshihiro Motegi and Kenichi Iga
239-242 : InGaAsP/InP Laser Diodes Mounted on Semi-Insulating SiC Ceramics
Shinji Tsuji, Ken-ichi Mizuishi, Yoshinori Nakayama, Makoto Shimaoka and Motohisa Hirao
243-247 : Comparison of Defect Formation in InGaAsP/InP and GaAlAs/GaAs
Osamu Ueda, Satoshi Komiya, Shigenobu Yamakoshi, Itsuo Umebu and Kenzo Akita
249-252 : GaP Green LED Degradation Associated with P-Type Electrode Formation Process
A. Yahata, M. Kawachi, Y. Iizuka and T. Beppu
253-256 : Ion-Beam Techniques in Processing of GaAs Lasers
Carsten Lindström and Peter Tihanyi

B-3: NOVEL DEVICES

259-262 : Monolithic Hot Electron Transistors in Silicon with FT>1 GHz
J. M. Shannon and J. A. G. Slatter
263-266 : Lateral Unidirectional Bipolar-Type Insulated-Gate Transistors
Yasuhisa \=Omura
267-270 : A New Short Channel MOSFET with an Atomic-Layer-Doped Impurity-Profile (ALD-MOSFET)
Ken Yamaguchi, Yasuhiro Shiraki, Yoshifumi Katayama and Yoshimasa Murayama
271-274 : Rotating MNOS with an Electrode on Diamond Stylus
Soichi Iwamura and Yasuaki Nishida
275-278 : A Novel Integrated Optical Bistable Device
Junji Yumoto, Hiroyoshi Yajima, Satoshi Ishihara, Jun-ichi Shimada and Masato Nakajima
279-282 : Monolithic Integrated Device for Light Amplification
Akio Sasaki, Ken-ichi Matsuda, Yuichiro Kimura, and Shigeo Fujita
283-286 : Characteristics of Double-Heterostructure Lasers in Strong Magnetic Fields
Y. Arakawa, H. Sakaki, M. Nishioka, G. Kido and N. Miura
287-290 : Tunable Photo- and Electroluminescence from GaAs Doping Superlattices
K. Ploog, H. Jung, H. Künzel, and P. Ruden
291-294 : Heterojunction Effect on Spectral and Frequency Responses in InP/InGaAsP/InGaAs APD
Kazuhito Yasuda, Tatsunori Shirai, Yutaka Kishi, Susumu Yamazaki and Takao Kaneda

B-4: LD AND LED-2

297-301 : Effect of Nonuniformity in Temperature Distribution in a Stripe-Geometry Double-Heterostructure Laser
H. C. Hsieh and G. Y. Lee
303-306 : Saturable Inter-Valence-Band Absorptions in 1.3 µm-InGaAsP Lasers
Masamichi Yamanishi, Ikuo Suemune, Kazuhiro Nonomura and Nobuo Mikoshiba
307-310 : Internal Loss of InGaAsP/InP Buried Crescent (λ=1.3 µm) Laser
Hideyo Higuchi, Hirofumi Namizaki, Etsuji Oomura, Ryoichi Hirano, Yasushi Sakakibara, Wataru Susaki and Kyoichiro Fujikawa
311-314 : Carrier Density Dependent Lifetime and Output Nonlinearity of InGaAsP LED's
Norihiko Kamata, Satoshi Hirose and Takeshi Kamiya
315-320 : (Invited) InGaAsP Visible Laser Crystal
Hisatsune Watamabe and Akira Usui
321-324 : Visible GaAlAs Laser with a Buried-Convex Waveguide Structure
Katsuhito Shima, Kiyoshi Hanamitsu, Kiyohide Wakao, Nobuyuki Takagi, Haruhiko Tabuchi and Masahito Takusagawa
325-328 : Highly Reliable GaAlAs Visible-Light-Emitting MCSP Lasers
Takashi Kajimura, Yasutoshi Kashiwada, Hirobumi Ouchi and Kunio Aiki
329-332 : Buried Facet BMH AlGaAs Laser
Masaki Okajima, Yukio Watanabe, Hiroko Nagasaka and Nawoto Motegi

B-5: GaAs IC

335-339 : High-Speed E/D GaAs ICs with Closely-Spaced FET Electrodes
Takashi Furutsuka, Tsutomu Tsuji, Fumiaki Katano, Mikio Kanamori, Asamitsu Higashisaka and Yoichiro Takayama
341-344 : An MSI GaAs Integrated Circuit Using Ti/W Silicide Gate Technology
Katsuhiko Suyama, Haruo Shimizu, Shigeru Yokogawa, Yoshiro Nakayama and Akihiro Shibatomi
345-348 : 500 Gates GaAs Gate Array
Nobuyuki Toyoda, Toshiyuki Terada, Masao Mochizuki, Katsue Kanazawa and Akimichi Hojo
349-353 : Recent Advances in GaAs Digital IC Technology
R. Zucca, F. S. Lee, B. M. Welch, G. R. Kaelin, Y. D. Shen and R. P. Vahrenkamp
355-356 : (Invited) High Electron Velocity for High Frequency Transistors
L. F. Eastman
357-363 : (Invited) Analyses of 2D Electron Transport at a GaAs/AlGaAs Interface
Masataka Inoue, Satoshi Hiyamizu, Minoru Inayama and Yoshio Inuishi
365-369 : MOCVD GaAlAs Hetero-Buffer GaAs Low-Noise MESFETs
Keiichi Ohata, Hiroshi Terao, Haruo Sunakawa and Yoichiro Takayama
371-372 : UHF/L Band Low-Noise Dual-Gate GaAs FETs
Cheng Siqi and Xia Xianqi

B-6: III-V DEVICE TECHNOLOGY

375-380 : (Invited) Heterojunction Bipolar Transistors
J. S. Harris, Jr., P. M. Asbeck and D. L. Miller
381-384 : N+ Self-Aligned MESFET for GaAs LSIs
Kimiyoshi Yamasaki, Kazuyoshi Asai and Katsuhiko Kurumada
385-388 : Chemical Vapor Deposition and Characterization of a Phosphorus-Nitride (P3N5) Gate Insulator for an Inversion-Mode InP MISFET
Yukihiro Hirota, Takeshi Kobayashi and Yoshitaka Furukawa
389-392 : Inter facial Trapping and MIS Device Stability on InP
Derek Lile, Marylin Taylor and Larry Meiners
393-396 : Design Considerations of Coupling Capacitors in GaAs Integrated Circuits
Alec Livingstone and David Welbourn
397-400 : Electrical Properties of Mo/III-V Compounds Schottky Barriers
M. S. Lin, W. H. Su, J. C. Lou and T. F. Lei
401-404 : Implantation into an AlGaAs/GaAs Heterostructure
Hidetoshi Nishi, Tsuguo Inada, Junji Saito, Tomonori Ishikawa and Satoshi Hiyamizu
405-409 : GaAs P-N Junction Formation by Carbon Ion Implantation
Yoh Mita, Noriaki Tsukada, Masafumi Hashimoto, Shigeru Semura and Sumio Sugata

C-2: CRYSTALS/JPSEPHSON JUNCTION

413-418 : (Invited) Growth of Undoped Semi-Insulating GaAs Single Crystal
Tsuguo Fukuda
419-425 : (Invited) Characterization of Semi-Insulating GaAs Substrates for GaAs ICs
Shintaro Miyazawa and Yasushi Nanishi
427-430 : Characterization of Computer Controlled GaP Single Crystals
Masayuki Watanabe, Jisaburo Ushizawa, Shoichi Washizuka and Yoshihiro Kokubun
431-435 : Modified Schottky Barrier Heights by Interfacial Doped Layers: MBE Al on GaAs
S. J. Eglash, Shihong Pan, Dang Mo, W. E. Spicer and D. M. Collins
437-442 : (Invited) Recent Advances in Josephson Material and Device
Hisao Hayakawa
443-446 : Hysteresis Loop in Current-Voltage Curve for BaPb0.7Bi0.3O3 Josephson Junction Array in a Microwave Field
Minoru Ito, Yoichi Enomoto and Toshiaki Murakami
447-450 : A Josephson Full Adder Circuit Using Four-Junction Logic (4JL) Gates
Hiroshi Nakagawa, Eiichi Sogawa, Susumu Takada and Hisao Hayakawa

C-3: SENSORS

453-456 : Fabrication and Properties of a-Si: H Photoreceptor and Its Application to Laser Beam Printer
Yoshikazu Nakayama, Toshiya Natsuhara, Masao Nakano, Nobuyuki Yamamoto and Takao Kawamura
457-460 : Contact-Type Linear Sensor Using Amorphous Si Diode Array
Kiyoshi Ozawa, Nobuyoshi Takagi, Koichi Hiranaka, Shintaro Yanagisawa and Kunihiko Asama
461-464 : Single-Tube Color Imager Using Hydrogenated Amorphous Silicon
Sachio Ishioka, Yoshinori Imamura, Yukio Takasaki, Chushiro Kusano, Tadaaki Hirai and Saburo Nobutoki
465-468 : Integrated Pyroelectric Infrared Sensor Using PbTiO3 Thin Film
Masanori Okuyama, Hiroyuki Seto, Motohiro Kojima, Yasushi Matsui and Yoshihiro Hamakawa
469-472 : High Temperature and High Pressure pH Sensors with Sputtered Iridium Oxide Films
Teruaki Katsube, Imants R. Lauks, Jan van der Spiegel and Jay N. Zemel
473-478 : (Invited) Polyacetylene: A Typical Semiconducting and Metallic Polymer
Hideki Shirakawa

C-4: THIN FILM DEVICES

481-485 : (Invited) Silicon TFTs for Flat Panel Displays
François Morin
487-491 : (Invited) Amorphous Silicon Transistors and Integrated Circuits
Masakiyo Matsumura
493-496 : Electrical Properties of Polycrystalline Silicon MOSFETs on Glass
Yasuhisa Oana, Hidenori Kotake, Nobuo Mukai and Kyozoh Ide
497-500 : A 10×10 Polycrystalline-Silicon Thin-Film Transistor Matrix for Liquid-Crystal Display
Makoto Matsui, Jun-ichi Owada, Yasuhiro Shiraki, Eiichi Maruyama and Hideaki Kawakami
501-504 : Fast Switching Array using Liquid Crystal for Electrophotographic Printer
Akihiko Sugimura, Yasuhiro Ueda, Kohsuke Moriwaki, Nobuyuki Yamamoto and Takao Kawamura
505-509 : High Rate and Low Radiation Damage Film Deposition by Compressed Magnetic Field (CMF) Magnetron Sputtering
Tomonobu Hata, Junji Kawahara and Keiji Toriyama
511-514 : Film Growth of GaN on a c-Axis Oriented ZnO Film Using Reactive Ionized-Cluster Beam Technique and Its Application to Thin Film Devices
Kakuei Matsubara and Toshinori Takagi

C-5: SOLAR CELLS

517-521 : Characterization of Film and Junction Qualities in a-Si Solar Cells
Shuichi Nonomura, Hiroaki Okamoto, Hirotsugu Kida, Kouji Fukumoto and Yoshihiro Hamakawa
523-526 : Photo-Conductive, Low Impurity-Diffusive, Heat-Resisting a-Si Formed by Glow-Discharged Decomposition of SiF2 and H2 Mixture
Hideki Matsumura and Seijiro Furukawa
527-534 : (Invited) Recent Progress of the Amorphous Silicon Solar Cell Technology
Yoshihiro Hamakawa
535-538 : A Screen Printed CdS/CuInSe2 Solar Cell
Francisco J. Garcia and Maharaj S. Tomar

C-6: CHARACTERIZATION

541-546 : (Invited) Function-Testing of Passivated LSI's with Stroboscopic Scanning Electron Microscope
K. Ura and H. Fujioka
547-551 : (Invited) Auger Recombination Study in Silicon Using a Tunneling Technique
R. M. Swanson
553-556 : Dislocation Generation due to Stress Induced by Oxidation in Si Grooves
Yukio Takano and Hirotsugu Kozuka
557-560 : Contactless Measurement of Wafer Lifetime by Free Carrier Infrared Absorption
Terunori Warabisako, Tadashi Saitoh, Teruaki Motooka and Takashi Tokuyama
561-564 : Simulation and Modeling of Boron Diffusion in Pilicon
Shuang-Fa Guo, Tze-Yh Chu and Liang-Bi Chang
565-567 : A New Method for Measuring Noise Figure of Microwave Transistor
Cao Yulu

PANEL DISCUSSION

LATE NEWS

581-582 : A Low-Voltage Alterable Metal-Oxide-Nitride-Oxide-Semiconductor Memory with Nano-Meter Thick Gate Insulators (NM-MONOS)
Eiichi Suzuki, Yutaka Hayashi, Kenichi Ishii and Hisato Hiraishi
583-584 : Device Applications of Direct Gap Group IV Semiconductors
C. H. L. Goodman
585-586 : A Practical Limitation of the Precision in Silicon n-MOS Devices as the Quantum Standard Resistor
K. Yoshihiro, J. Kinoshita, K. Inagaki, C. Yamanouchi, K. Shida, T. Igarashi, J. Moriyama and S. Kawaji
587-588 : AlGaAs/GaAs Monolithic LED/Amplifier Circuit Fabricated by Molecular Beam Epitaxy
O. Wada, T. Sanada, H. Hamaguchi, T. Fujii, S. Hiyamizu and T. Sakurai
589-590 : MOCVD Grown (AlGa)As Lasers in the Visible Wavelength Region Shorter than 780 nm
O. Matsuda, H. Sato, J. Ogawa, Y. Mori, K. Kaneko and N. Watanabe
591-592 : Inversion-Mode In0.53Ga0.47As MIS FET for IC Applications
D. Fritzsche, E. Kuphal and G. Weimann
593-594 : InP High Mobility Enhancement MISFETs Using Anodically Grown Al2O3-Native Oxids/InP Interface
Takayuki Sawada, Hideo Ohno and Hideki Hasegawa
595-596 : Comparison of Deep Energy Levels in HB and LEC Undoped Bulk GaAs
Naotaka Iwata, Fumio Hasegawa, Norio Yamamoto and Yasuo Nannichi
597-598 : High Speed Resistor Coupled Josephson Logic
J. Sone, T. Yoshida, S. Tahara and H. Abe
599-600 : A New Simple Configuration for a Wide Margin Josephson Adder using High Gain Direct Coupled Logic Gates
Kohji Hohkawa, Junsaku Nitta and Akira Ishida
601-602 : A 64-Bit Josephson Memory Circuit
H. Suzuki, H. Shibayama, M. Kosugi, I. Hanyu, T. Igarashi, H. Hoko, T. Nakamura, S. Hasuo and T. Yamaoka
603-604 : Control of Silicon Crystal Growth on an Amorphous Planar Substrate by Metallic Film Patterning
Hidefumi Mori
605-606 : Lateral-Epitaxy of CVD a-Si over SiO2 Stripe-Area by Furnace-Annealing
Yasuo Kunii, Michiharu Tabe and Kenji Kajiyama
607-608 : Recrystallization of Silicon-on-Insulator Structures by an Electron-Beam with Fast Sinusoidal X- and Slow Linear Y-Scans
H. Ishiwara, M. Nakano, H. Yamamoto and S. Furukawa
609-610 : Degradation Mechanisms on Mo or Mo-silicide/n+ -Si Ohmic Contacts on High Temperature Annealing
Kohei Higuchi, Masaru Kanamori and Hidekazu Okabayashi
611-612 : Lithography Experiments Using Synchrotron Radiation from ETL Storage Ring
Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura and Hideo Onuki
613-614 : Simulation of Light Scattering and Determination of the MTF of Positive Photoresists using the Monte Carlo Method
Makoto Nakase
615-616 : Profiles of Laser Etched Grooves in Iron Garnet Films
Koji Ando, Takashi Okuda, Yuko Yokoyama and Naoki Koshizuka
617-618 : Novel Amorphous Silicon Solar Cells Prepared by Photochemical Vapor Deposition
Tadashi Saitoh, Shinichi Muramatsu, Sunao Matsubara and Masatoshi Migitaka
619-619 : Low Threshold Short Visible Wavelength CW Single Quantum-Well-DH Lasers by MO-CVD
C. Lindström, R. D. Burnham and D. R. Scifres

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