JJAP Online
14th Conf. (1982 Int.) Solid State Devices, Tokyo, 1982
Japanese Journal of Applied Physics
Vol. 22 (1983) Suppl. 22-1
A-1: OPENING
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3-10 : (Invited) VLSI Technology Overviews and Trends
- S.M. Sze
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11-19 : (Invited) GaAs MIS Structures -- Hopeless or Promising?
- Harry C. Gatos, Jacek Lagowski and Thomas E. Kazior
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21-27 : (Invited) Epitaxial Silicide Films for Integrated Circuits and Future Devices
- Seijiro Furukawa and Hiroshi Ishiwara
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29-35 : (Invited) n-i-p-i Superlattices -- Novel Semiconductors with Tunable Properties
- Gottfried H. Döhler
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37-41 : (Invited) Surface Acoustic Wave Devices on Silicon
- R. L. Gunshor, S. J. Martin and R. F. Pierret
A-2: LSI-1
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45-50 : (Invited) LSIs for Communication Uses
- Toshimasa Suzuki and Kotaro Kato
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51-54 : A 1 K bit Associative Memory LSI
- Tadanobu Nikaido, Takeshi Ogura, Shigetatsu Hamaguchi and Susumu Muramoto
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55-58 : New Dynamic RAM Cell Combined with Hi-C Structure
- Hideyuki Ozaki, Kazuhiro Shimotori, Kazuyasu Fujishima, Shin-ichi Satoh and Takao Nakano
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59-62 : Hot-Electron Trapping Effects of Short Channel 64 K Dynamic MOS RAM
- Michihiro Yamada, Heihachi Matsumoto, Toshifumi Kobayashi, Masaki Kumanoya, Makoto Taniguchi and Takao Nakano
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63-67 : Redundancy Techniques for Dynamic RAMs
- Katsuhiro Shimohigashi, Masamichi Ishihara and Shinji Shimizu
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69-73 : Soft Error Analysis of Fully Static MOS RAM
- Masahiko Yoshimoto, Kenji Anami, Hirofumi Shinohara, Yoshihiro Hirata, Tsutomu Yoshihara and Takao Nakano
A-3: LSI-2
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77-80 : The Dielectrically Isolated High Voltage IC Technology
- Yoshitaka Sugawara, Tatsuya Kamei and Yoshikazu Hosokawa
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81-84 : Novel Gate-Protection Devices for MOSFET's
- Isao Yoshida, Takeaki Okabe, Kazutoshi Ashikawa and Shigeo Ootaka
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85-88 : Compatible High and Low Voltage CMOS Devices Using SIMOX Technology
- Masahiro Akiya, Sadao Nakashima and Kotaro Kato
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89-93 : MNOS Retention-Endurance Characteristics Enhancement Using Graded Nitride Dielectric
- Yukun Hsia, Eden Mei and Kia L. Ngai
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95-98 : Diffusion Length Measurement Using Dynamic MOS RAM
- Masaki Kumanoya, Makoto Taniguchi, Michihiro Yamada, Toshifumi Kobayashi, Yasuji Nagayama and Takao Nakano
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99-102 : New Observation of Hot-Carrier Injection Phenomena
- Yoshinobu Nakagome, Eiji Takeda, Hitoshi Kume and Shojiro Asai
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103-108 : (Invited) “High-Performance Schottky-Barrier IR-CCD Image Sensors”
- Walter F. Kosonocky and Hammam Elabd
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109-112 : High Density Frame Transfer Image Sensor
- G. A. Beck, M. G. Collet, J. A. A. van Gils, A. J. Klinkhamer, H. L. Peek, W. N. J. Ruis, J. G. van Santen, T. F. Smit and G. T. J. Vandormael
A-4: LSI-3 AND JUNCTION DEVICES
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115-119 : New Linearity Error Correction Technology for A/D and D/A Converter LSI
- Y. Akazawa, Y. Matsuya and A. Iwata
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121-124 : A 10 Bit All-Parallel A/D Converter
- Michihiro Inoue, Toyoki Takemoto, Hideaki Sadamatsu, Akira Matsuzawa, Kunitoshi Aono and Kazuhiko Tsuji
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125-128 : High Speed Bipolar ECL Devices Using a Vertically Isolated Self-Aligned Transistor
- T. Fujita, H. Sakai, K. Kawakita and T. Takemoto
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129-132 : Very Wide-Band Silicon Bipolar Monolithic Amplifiers
- Mamoru Ohara, Tsutomu Kamoto and Tetsushi Sakai
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133-136 : Modeling of the Bipolar Mode of Operation of Vertical JFET Devices
- Paolo Spirito and Gianfranco Vitale
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137-140 : Tapered Sidewall Schottky Diodes with Very Low Taper Angles
- Yearn-Ik Choi, Choong-Ki Kim and Young-Se Kwon
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141-144 : Precision Reactive Sputter Etching and Its Applications
- J. S. Lechaton, G. R. Srinivasan and S. P. Gaur
A-5: PROCESS TECHNOLOGY
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147-151 : (Invited) Silicide Contact for Shallow Junction Devices
- K. N. Tu
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153-156 : Electrical Activation and Deep Diffusion of Ion-Implanted Al and Ga in Si
- M. Tamura, K. Ohyu, K. Yagi and N. Natsuaki
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157-160 : Formation of Shallow p+n Junction by Low Temperature Annealing
- K. Yamada, M. Kashiwagi and K. Taniguchi
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161-166 : (Invited) Laser Photochemical Processing for Microelectronics
- D. J. Ehrlich, T. F. Deutsch, R. M. Osgood, Jr., and D. J. Silversmith
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167-170 : Sputtered Lead Silicate Glass Film for Multilevel Interconnections
- Kinya Kato, Keizo Shuto and Masahiko Hasegawa
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171-174 : Process Parameter Control in Optical Lithography
- Paolo Antognetti, Claudio Fasce and William Oldham
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175-178 : Sub-Micron Pattern Control Technology for Variable-Shaped EB Lithography
- Katumi Suzuki, Shinya Hasegawa, Yasuo Iida and Katsumi Mori
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179-182 : High Voltage Electron Beam Writing for Submicron Design Rule VLSI Fabrications
- Makoto Yoshimi, Minoru Takahashi, Katsuhiro Kawabuchi, Yoshihide Kato and Tadahiro Takigawa
A-6: SILICON CRYSTALS
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185-189 : (Invited) Controlled Oxygen Doping in Silicon
- M. Watanabe, T. Usami, S. Takasu, S. Matsuo and E. Toji
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191-196 : (Invited) Laser Annealing of Semiconductors
- C. W. White
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197-200 : Radiation Damage in MOS Devices Underlying an Electron Beam Annealed SOI Structure
- Shuichi Saitoh, Kohei Higuchi and Hidekazu Okabayashi
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201-204 : Lattice-Matched Epitaxial Growth of Semiconductor Films onto Insulator (Mixed Fluoride)/Si Structures
- Hiroshi Ishiwara and Tanemasa Asano
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205-208 : The Use of Selective Annealing for Growing Very Large Grains in Silicon on Insulator Films
- J. P. Colinge, E. Demoulin, D. Bensahel and G. Auvert
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209-209 : Characterization of Laser-Induced Epitaxial Si Crystal by Evaluating MOSFET's Fabricated in Grown Layers
- Masanobu Miyao, Makoto Ohkura, Iwao Takemoto, Masakazu Ichikawa, Masao Tamura and Takashi Tokuyama
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213-216 : Growth of Large Grained Silicon on Insulator by Electron Beam Annealing and Performance of MOS Devices
- Kenji Shibata, Yamichi Ohmura, Tomoyasu Inoue, Koichi Kato, Yasuhiro Horiike and Masahiro Kashiwagi
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217-221 : Evaluation and Control of Grain Boundaries in Laser-Recrystallized Polysilicon Islands for Device Fabrication
- Tadashi Nishimura, Akira Ishizu and Yoichi Akasaka
B-2: LD AND LED-1
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225-230 : (Invited) Dynamic-Single-Mode Semiconductor Lasers
- Yasuharu Suematsu and Shigehisa Arai
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231-234 : Low Threshold Current 1.3 µm InGaAsP Buried Crescent Lasers
- Ryoichi Hirano, Etsuji Oomura, Hideyo Higuchi, Yasushi Sakakibara, Hirohumi Namizaki and Wataru Susaki
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235-238 : Threshold Condition and Design of Surface Emitting GaInAsP/InP Injection Lasers
- Haruhisa Soda, Yoshihiro Motegi and Kenichi Iga
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239-242 : InGaAsP/InP Laser Diodes Mounted on Semi-Insulating SiC Ceramics
- Shinji Tsuji, Ken-ichi Mizuishi, Yoshinori Nakayama, Makoto Shimaoka and Motohisa Hirao
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243-247 : Comparison of Defect Formation in InGaAsP/InP and GaAlAs/GaAs
- Osamu Ueda, Satoshi Komiya, Shigenobu Yamakoshi, Itsuo Umebu and Kenzo Akita
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249-252 : GaP Green LED Degradation Associated with P-Type Electrode Formation Process
- A. Yahata, M. Kawachi, Y. Iizuka and T. Beppu
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253-256 : Ion-Beam Techniques in Processing of GaAs Lasers
- Carsten Lindström and Peter Tihanyi
B-3: NOVEL DEVICES
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259-262 : Monolithic Hot Electron Transistors in Silicon with FT>1 GHz
- J. M. Shannon and J. A. G. Slatter
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263-266 : Lateral Unidirectional Bipolar-Type Insulated-Gate Transistors
- Yasuhisa \=Omura
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267-270 : A New Short Channel MOSFET with an Atomic-Layer-Doped Impurity-Profile (ALD-MOSFET)
- Ken Yamaguchi, Yasuhiro Shiraki, Yoshifumi Katayama and Yoshimasa Murayama
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271-274 : Rotating MNOS with an Electrode on Diamond Stylus
- Soichi Iwamura and Yasuaki Nishida
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275-278 : A Novel Integrated Optical Bistable Device
- Junji Yumoto, Hiroyoshi Yajima, Satoshi Ishihara, Jun-ichi Shimada and Masato Nakajima
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279-282 : Monolithic Integrated Device for Light Amplification
- Akio Sasaki, Ken-ichi Matsuda, Yuichiro Kimura, and Shigeo Fujita
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283-286 : Characteristics of Double-Heterostructure Lasers in Strong Magnetic Fields
- Y. Arakawa, H. Sakaki, M. Nishioka, G. Kido and N. Miura
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287-290 : Tunable Photo- and Electroluminescence from GaAs Doping Superlattices
- K. Ploog, H. Jung, H. Künzel, and P. Ruden
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291-294 : Heterojunction Effect on Spectral and Frequency Responses in InP/InGaAsP/InGaAs APD
- Kazuhito Yasuda, Tatsunori Shirai, Yutaka Kishi, Susumu Yamazaki and Takao Kaneda
B-4: LD AND LED-2
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297-301 : Effect of Nonuniformity in Temperature Distribution in a Stripe-Geometry Double-Heterostructure Laser
- H. C. Hsieh and G. Y. Lee
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303-306 : Saturable Inter-Valence-Band Absorptions in 1.3 µm-InGaAsP Lasers
- Masamichi Yamanishi, Ikuo Suemune, Kazuhiro Nonomura and Nobuo Mikoshiba
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307-310 : Internal Loss of InGaAsP/InP Buried Crescent (λ=1.3 µm) Laser
- Hideyo Higuchi, Hirofumi Namizaki, Etsuji Oomura, Ryoichi Hirano, Yasushi Sakakibara, Wataru Susaki and Kyoichiro Fujikawa
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311-314 : Carrier Density Dependent Lifetime and Output Nonlinearity of InGaAsP LED's
- Norihiko Kamata, Satoshi Hirose and Takeshi Kamiya
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315-320 : (Invited) InGaAsP Visible Laser Crystal
- Hisatsune Watamabe and Akira Usui
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321-324 : Visible GaAlAs Laser with a Buried-Convex Waveguide Structure
- Katsuhito Shima, Kiyoshi Hanamitsu, Kiyohide Wakao, Nobuyuki Takagi, Haruhiko Tabuchi and Masahito Takusagawa
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325-328 : Highly Reliable GaAlAs Visible-Light-Emitting MCSP Lasers
- Takashi Kajimura, Yasutoshi Kashiwada, Hirobumi Ouchi and Kunio Aiki
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329-332 : Buried Facet BMH AlGaAs Laser
- Masaki Okajima, Yukio Watanabe, Hiroko Nagasaka and Nawoto Motegi
B-5: GaAs IC
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335-339 : High-Speed E/D GaAs ICs with Closely-Spaced FET Electrodes
- Takashi Furutsuka, Tsutomu Tsuji, Fumiaki Katano, Mikio Kanamori, Asamitsu Higashisaka and Yoichiro Takayama
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341-344 : An MSI GaAs Integrated Circuit Using Ti/W Silicide Gate Technology
- Katsuhiko Suyama, Haruo Shimizu, Shigeru Yokogawa, Yoshiro Nakayama and Akihiro Shibatomi
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345-348 : 500 Gates GaAs Gate Array
- Nobuyuki Toyoda, Toshiyuki Terada, Masao Mochizuki, Katsue Kanazawa and Akimichi Hojo
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349-353 : Recent Advances in GaAs Digital IC Technology
- R. Zucca, F. S. Lee, B. M. Welch, G. R. Kaelin, Y. D. Shen and R. P. Vahrenkamp
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355-356 : (Invited) High Electron Velocity for High Frequency Transistors
- L. F. Eastman
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357-363 : (Invited) Analyses of 2D Electron Transport at a GaAs/AlGaAs Interface
- Masataka Inoue, Satoshi Hiyamizu, Minoru Inayama and Yoshio Inuishi
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365-369 : MOCVD GaAlAs Hetero-Buffer GaAs Low-Noise MESFETs
- Keiichi Ohata, Hiroshi Terao, Haruo Sunakawa and Yoichiro Takayama
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371-372 : UHF/L Band Low-Noise Dual-Gate GaAs FETs
- Cheng Siqi and Xia Xianqi
B-6: III-V DEVICE TECHNOLOGY
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375-380 : (Invited) Heterojunction Bipolar Transistors
- J. S. Harris, Jr., P. M. Asbeck and D. L. Miller
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381-384 : N+ Self-Aligned MESFET for GaAs LSIs
- Kimiyoshi Yamasaki, Kazuyoshi Asai and Katsuhiko Kurumada
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385-388 : Chemical Vapor Deposition and Characterization of a Phosphorus-Nitride (P3N5) Gate Insulator for an Inversion-Mode InP MISFET
- Yukihiro Hirota, Takeshi Kobayashi and Yoshitaka Furukawa
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389-392 : Inter facial Trapping and MIS Device Stability on InP
- Derek Lile, Marylin Taylor and Larry Meiners
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393-396 : Design Considerations of Coupling Capacitors in GaAs Integrated Circuits
- Alec Livingstone and David Welbourn
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397-400 : Electrical Properties of Mo/III-V Compounds Schottky Barriers
- M. S. Lin, W. H. Su, J. C. Lou and T. F. Lei
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401-404 : Implantation into an AlGaAs/GaAs Heterostructure
- Hidetoshi Nishi, Tsuguo Inada, Junji Saito, Tomonori Ishikawa and Satoshi Hiyamizu
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405-409 : GaAs P-N Junction Formation by Carbon Ion Implantation
- Yoh Mita, Noriaki Tsukada, Masafumi Hashimoto, Shigeru Semura and Sumio Sugata
C-2: CRYSTALS/JPSEPHSON JUNCTION
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413-418 : (Invited) Growth of Undoped Semi-Insulating GaAs Single Crystal
- Tsuguo Fukuda
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419-425 : (Invited) Characterization of Semi-Insulating GaAs Substrates for GaAs ICs
- Shintaro Miyazawa and Yasushi Nanishi
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427-430 : Characterization of Computer Controlled GaP Single Crystals
- Masayuki Watanabe, Jisaburo Ushizawa, Shoichi Washizuka and Yoshihiro Kokubun
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431-435 : Modified Schottky Barrier Heights by Interfacial Doped Layers: MBE Al on GaAs
- S. J. Eglash, Shihong Pan, Dang Mo, W. E. Spicer and D. M. Collins
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437-442 : (Invited) Recent Advances in Josephson Material and Device
- Hisao Hayakawa
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443-446 : Hysteresis Loop in Current-Voltage Curve for BaPb0.7Bi0.3O3 Josephson Junction Array in a Microwave Field
- Minoru Ito, Yoichi Enomoto and Toshiaki Murakami
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447-450 : A Josephson Full Adder Circuit Using Four-Junction Logic (4JL) Gates
- Hiroshi Nakagawa, Eiichi Sogawa, Susumu Takada and Hisao Hayakawa
C-3: SENSORS
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453-456 : Fabrication and Properties of a-Si: H Photoreceptor and Its Application to Laser Beam Printer
- Yoshikazu Nakayama, Toshiya Natsuhara, Masao Nakano, Nobuyuki Yamamoto and Takao Kawamura
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457-460 : Contact-Type Linear Sensor Using Amorphous Si Diode Array
- Kiyoshi Ozawa, Nobuyoshi Takagi, Koichi Hiranaka, Shintaro Yanagisawa and Kunihiko Asama
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461-464 : Single-Tube Color Imager Using Hydrogenated Amorphous Silicon
- Sachio Ishioka, Yoshinori Imamura, Yukio Takasaki, Chushiro Kusano, Tadaaki Hirai and Saburo Nobutoki
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465-468 : Integrated Pyroelectric Infrared Sensor Using PbTiO3 Thin Film
- Masanori Okuyama, Hiroyuki Seto, Motohiro Kojima, Yasushi Matsui and Yoshihiro Hamakawa
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469-472 : High Temperature and High Pressure pH Sensors with Sputtered Iridium Oxide Films
- Teruaki Katsube, Imants R. Lauks, Jan van der Spiegel and Jay N. Zemel
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473-478 : (Invited) Polyacetylene: A Typical Semiconducting and Metallic Polymer
- Hideki Shirakawa
C-4: THIN FILM DEVICES
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481-485 : (Invited) Silicon TFTs for Flat Panel Displays
- François Morin
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487-491 : (Invited) Amorphous Silicon Transistors and Integrated Circuits
- Masakiyo Matsumura
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493-496 : Electrical Properties of Polycrystalline Silicon MOSFETs on Glass
- Yasuhisa Oana, Hidenori Kotake, Nobuo Mukai and Kyozoh Ide
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497-500 : A 10×10 Polycrystalline-Silicon Thin-Film Transistor Matrix for Liquid-Crystal Display
- Makoto Matsui, Jun-ichi Owada, Yasuhiro Shiraki, Eiichi Maruyama and Hideaki Kawakami
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501-504 : Fast Switching Array using Liquid Crystal for Electrophotographic Printer
- Akihiko Sugimura, Yasuhiro Ueda, Kohsuke Moriwaki, Nobuyuki Yamamoto and Takao Kawamura
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505-509 : High Rate and Low Radiation Damage Film Deposition by Compressed Magnetic Field (CMF) Magnetron Sputtering
- Tomonobu Hata, Junji Kawahara and Keiji Toriyama
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511-514 : Film Growth of GaN on a c-Axis Oriented ZnO Film Using Reactive Ionized-Cluster Beam Technique and Its Application to Thin Film Devices
- Kakuei Matsubara and Toshinori Takagi
C-5: SOLAR CELLS
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517-521 : Characterization of Film and Junction Qualities in a-Si Solar Cells
- Shuichi Nonomura, Hiroaki Okamoto, Hirotsugu Kida, Kouji Fukumoto and Yoshihiro Hamakawa
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523-526 : Photo-Conductive, Low Impurity-Diffusive, Heat-Resisting a-Si Formed by Glow-Discharged Decomposition of SiF2 and H2 Mixture
- Hideki Matsumura and Seijiro Furukawa
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527-534 : (Invited) Recent Progress of the Amorphous Silicon Solar Cell Technology
- Yoshihiro Hamakawa
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535-538 : A Screen Printed CdS/CuInSe2 Solar Cell
- Francisco J. Garcia and Maharaj S. Tomar
C-6: CHARACTERIZATION
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541-546 : (Invited) Function-Testing of Passivated LSI's with Stroboscopic Scanning Electron Microscope
- K. Ura and H. Fujioka
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547-551 : (Invited) Auger Recombination Study in Silicon Using a Tunneling Technique
- R. M. Swanson
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553-556 : Dislocation Generation due to Stress Induced by Oxidation in Si Grooves
- Yukio Takano and Hirotsugu Kozuka
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557-560 : Contactless Measurement of Wafer Lifetime by Free Carrier Infrared Absorption
- Terunori Warabisako, Tadashi Saitoh, Teruaki Motooka and Takashi Tokuyama
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561-564 : Simulation and Modeling of Boron Diffusion in Pilicon
- Shuang-Fa Guo, Tze-Yh Chu and Liang-Bi Chang
-
565-567 : A New Method for Measuring Noise Figure of Microwave Transistor
- Cao Yulu
PANEL DISCUSSION
LATE NEWS
-
581-582 : A Low-Voltage Alterable Metal-Oxide-Nitride-Oxide-Semiconductor Memory with Nano-Meter Thick Gate Insulators (NM-MONOS)
- Eiichi Suzuki, Yutaka Hayashi, Kenichi Ishii and Hisato Hiraishi
-
583-584 : Device Applications of Direct Gap Group IV Semiconductors
- C. H. L. Goodman
-
585-586 : A Practical Limitation of the Precision in Silicon n-MOS Devices as the Quantum Standard Resistor
- K. Yoshihiro, J. Kinoshita, K. Inagaki, C. Yamanouchi, K. Shida, T. Igarashi, J. Moriyama and S. Kawaji
-
587-588 : AlGaAs/GaAs Monolithic LED/Amplifier Circuit Fabricated by Molecular Beam Epitaxy
- O. Wada, T. Sanada, H. Hamaguchi, T. Fujii, S. Hiyamizu and T. Sakurai
-
589-590 : MOCVD Grown (AlGa)As Lasers in the Visible Wavelength Region Shorter than 780 nm
- O. Matsuda, H. Sato, J. Ogawa, Y. Mori, K. Kaneko and N. Watanabe
-
591-592 : Inversion-Mode In0.53Ga0.47As MIS FET for IC Applications
- D. Fritzsche, E. Kuphal and G. Weimann
-
593-594 : InP High Mobility Enhancement MISFETs Using Anodically Grown Al2O3-Native Oxids/InP Interface
- Takayuki Sawada, Hideo Ohno and Hideki Hasegawa
-
595-596 : Comparison of Deep Energy Levels in HB and LEC Undoped Bulk GaAs
- Naotaka Iwata, Fumio Hasegawa, Norio Yamamoto and Yasuo Nannichi
-
597-598 : High Speed Resistor Coupled Josephson Logic
- J. Sone, T. Yoshida, S. Tahara and H. Abe
-
599-600 : A New Simple Configuration for a Wide Margin Josephson Adder using High Gain Direct Coupled Logic Gates
- Kohji Hohkawa, Junsaku Nitta and Akira Ishida
-
601-602 : A 64-Bit Josephson Memory Circuit
- H. Suzuki, H. Shibayama, M. Kosugi, I. Hanyu, T. Igarashi, H. Hoko, T. Nakamura, S. Hasuo and T. Yamaoka
-
603-604 : Control of Silicon Crystal Growth on an Amorphous Planar Substrate by Metallic Film Patterning
- Hidefumi Mori
-
605-606 : Lateral-Epitaxy of CVD a-Si over SiO2 Stripe-Area by Furnace-Annealing
- Yasuo Kunii, Michiharu Tabe and Kenji Kajiyama
-
607-608 : Recrystallization of Silicon-on-Insulator Structures by an Electron-Beam with Fast Sinusoidal X- and Slow Linear Y-Scans
- H. Ishiwara, M. Nakano, H. Yamamoto and S. Furukawa
-
609-610 : Degradation Mechanisms on Mo or Mo-silicide/n+ -Si Ohmic Contacts on High Temperature Annealing
- Kohei Higuchi, Masaru Kanamori and Hidekazu Okabayashi
-
611-612 : Lithography Experiments Using Synchrotron Radiation from ETL Storage Ring
- Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura and Hideo Onuki
-
613-614 : Simulation of Light Scattering and Determination of the MTF of Positive Photoresists using the Monte Carlo Method
- Makoto Nakase
-
615-616 : Profiles of Laser Etched Grooves in Iron Garnet Films
- Koji Ando, Takashi Okuda, Yuko Yokoyama and Naoki Koshizuka
-
617-618 : Novel Amorphous Silicon Solar Cells Prepared by Photochemical Vapor Deposition
- Tadashi Saitoh, Shinichi Muramatsu, Sunao Matsubara and Masatoshi Migitaka
-
619-619 : Low Threshold Short Visible Wavelength CW Single Quantum-Well-DH Lasers by MO-CVD
- C. Lindström, R. D. Burnham and D. R. Scifres
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