Jpn. J. Appl. Phys. 10 (1971) pp. 976-986 |Next Article| |Table of Contents|
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Electrical Properties of Rutile (TiO2) Thin Film
Department of Electrical Engineering, School of Science and Engineering, Waseda University
(Received January 20, 1971)
Rutile thin films of Au(Ti, Al)–TiO2–Pt sandwich system were prepared on a substrate glass by evaporation of Ti metal and oxidation of it by heat treatment. Through AC and DC measurements, the capacitance obtained was about 2000 pF/mm2, the dielectric constant was estimated as 60∼110, tan
δ was 1∼10%, the conductivity was about 10-13Ω-1cm-1 and the electrical strength was 5∼10 V (0.3∼0.5 MV/cm), respectively. In the micro-sec- and micro-sec-pulse conduction measurement, the relation of current and time became I∝t-n, in which the value of n was 0.7∼0.8. The polarity effect on the current was considered to be due to the work functions of electrodes. The current carrier was estimated to be electronic from the measurement of photoconduction and the polarity effect in the pulse conduction.
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