Jpn. J. Appl. Phys. 10 (1971) pp. 995-997  |Next Article|  |Table of Contents|
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Generation and Detection of Elastic Surface Waves with ZnO Film Transducers

Ritsuo Inaba, Koji Kajimura and Nobuo Mikoshiba

Electrotechnical Laboratory

(Received April 15, 1971)

Effects of various configurations of interdigital electrodes on the generation and detection of elastic surface waves are studied by using sputtered ZnO transducers. It is found that the insertion loss of ZnO film transducers decreases considerably when a metal film is plated between a substrate and a ZnO film on which interdigital electrodes are deposited.

URL: http://jjap.jsap.jp/link?JJAP/10/995/
DOI: 10.1143/JJAP.10.995


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References | Citing Articles (2)

  1. P. Schnitzler, L. Bergstein and L. Strauss: IEEE Trans. Sonics and Ultrasonics SU-17 (1970) 185.
  2. R. Inaba, T. Ishiguro and N. Mikoshiba: to be published in Jpn. J. Appl. Phys.

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