Jpn. J. Appl. Phys. 13 (1974) pp. 1636-1639  |Next Article|  |Table of Contents|
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Determination of the Spot Size by Using the Intensity Distribution in the Accelerating Lens System of Scanning Electron Microscope

Katsuhiro Kuroda and Tatsuro Suzuki

(Received May 13, 1974)

The intensity distribution on the specimen was computed by using the pupil function in terms of electron wave optics, and the spot size (defined as 80% of the total electron beam spread) was precisely obtained from this intensity distribution. From the computer simulation data the following results were obtained. (1) The spot size determined by the conventional method was generally over-estimated. (2) The difference in the optimum aperture size determined by the conventional method and by the electron wave optical method was of very small order of magnitude.

URL: http://jjap.jsap.jp/link?JJAP/13/1636/
DOI: 10.1143/JJAP.13.1636

References

1. A. V. Crewe and J. Wall: J. Mol. Biol. 48 (1970) 375.
2. L. Marton: Advances in Electron and Electron Physics (Academic press, 1956) Vol. XXI.
3. O. Scherzer: J. Appl. Phys. 20 (1949) 20[AIP Scitation].
4. E. Zeitler and M. G. R. Thomson: Optik 31 (1970) 258.
5. Y. Uchikawa and S. Maruse: J. Electron Microscopy 19 (1970) 12.
6. Y. Uchikawa and S. Maruse: Jpn. J. Appl. Phys. 8 (1969) 1359[JSAP].
7. K. Kuroda and T. Suzuki: Jpn. J. Appl. Phys. 11 (1972) 1390[JSAP].
8. K. Kuroda and T. Suzuki: J. Appl. Phys. 45 (1974) 1436[AIP Scitation].
9. K. Kuroda, H. Ebisui and T. Suzuki: J. Appl. Phys. 45 (1974) 2336[AIP Scitation].
10. K. Kuroda and T. Suzuki: Appl. Phys. Lett. 25 (1974) 23[AIP Scitation].
11. M. J. D. Powell: Comput. J. 7 (1964) 155.