Jpn. J. Appl. Phys. 15 (1976) pp. 1381-1382  |Next Article|  |Table of Contents|
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Short Note

Ferroelectric PLZT Thin Films Fabricated by RF Sputtering

Katsuhiko Tanaka, Yasuyuki Higuma, Kiyoyuki Yokoyama, Taichi Nakagawa¹ and Yoshihiro Hamakawa

(Received April 27, 1976)

URL: http://jjap.jsap.jp/link?JJAP/15/1381/
DOI: 10.1143/JJAP.15.1381

References | Citing Articles (22)

1. G. H. Haertling and C. E. Land: J. Am. Ceram. Soc. 54 (1971) 1.
2. C. E. Land and P. D. Thacher: Proc. IEEE 57 (1969) 751.
3. M. Murata, K. Wakino, K. Tanaka and Y. Hamakawa: Materials Res. Bull. 11 (1976) 323.