Jpn. J. Appl. Phys. 16 (1977) pp. 1483-1484  |Next Article|  |Table of Contents|
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Short Note

Autodoping Effect of Antimony-Arsenic Simultaneous Diffusion in Silicon

Yoshihiro Tsunoda

(Received April 21, 1977)

URL: http://jjap.jsap.jp/link?JJAP/16/1483/
DOI: 10.1143/JJAP.16.1483

References | Citing Articles (2)

1. S. R. Bhola and A. Mayer: RCA Rev. 24 (1963) 511.
2. T. Abe, T. Kato and Y. Nishi: Jpn. J. Appl. Phys. 3 (1964) 161[JSAP].
3. E. F. Cave and B. R. Czorny: RCA Rev. 24 (1963) 523.
4. R. Nuttal: J. Electrochem. Soc. 111 (1964) 317.
5. C. R. Crowell, H. B. Shore and E. E. Labate: J. Appl. Phys. 36 (1965) 3843[AIP Scitation].