Jpn. J. Appl. Phys. 16 (1977) pp. 2047-2048  |Next Article|  |Table of Contents|
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Short Note

Synthesis of SiC Films by Plasma Deposition Process

Hideo Yoshihara, Hidefumi Mori and Mikiho Kikuchi

(Received August 5, 1977)

URL: http://jjap.jsap.jp/link?JJAP/16/2047/
DOI: 10.1143/JJAP.16.2047

References | Citing Articles (3)

1. J. M. Harris, H. C. Gatos and A. F. Witt: J. Electrochem. Soc. 118 (1971) 335.
2. K. Wasa, T. Nagai and S. Hayakawa: Thin Solid Films 31 (1976) 235.
3. Y. Murayama, T. Takao and M. Matsumoto: Abstract of the 36th Autumn Meeting of the Japan Society of Applied Physics, 1975, p. 334.