Jpn. J. Appl. Phys. 16 (1977) pp. 509-514 |Next Article| |Table of Contents|
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Superconducting Transition Temperature of Nb–Ge Thin Films Prepared by Co-Evaporation
Yoshinobu Tarutani and
Mitsuhiro Kudo
Central Research Laboratory, Hitachi Ltd.
(Received September 17, 1976)
Nb–Ge thin films are prepared by co-evaporating Nb and Ge. Dependences of the superconducting critical temperature Tc the lattice parameter ao and the resistivity on preparation conditions are studied. As the substrate temperature lowers from 1000 to 800°C, ao remains constant but Tc is lowered. Lowering the deposition rate results in a decrease in ao and an increase in Tc. Tc stays constant for the film thickness d larger than 2000 Å and is lowered for d smaller than 2000 Å. Especially, Tc is less than 4.2 K when d is smaller than 50 Å. The lattice parameter of the stoichiometric Nb3Ge is estimated to be 5.127 Å by extrapolating the ao's of single phase Nb–Ge thin films. A morphological study of Nb–Ge thin films is made by transmission electron microscopy. They consist of polycrystalline grains of about 500 Å in diameter.
URL:
http://jjap.jsap.jp/link?JJAP/16/509/
DOI: 10.1143/JJAP.16.509
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