Jpn. J. Appl. Phys. 17 (1978) pp. 773-778  |Table of Contents|
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Chemical Vapor Deposition of Single-Crystalline ZnO Film with Smooth Surface on Intermediately Sputtered ZnO Thin Film on Sapphire

Shinzo Ohnishi, Yuji Hirokawa, Tadashi Shiosaki and Akira Kawabata

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