Jpn. J. Appl. Phys. 18 (1979) pp. 201-202 |Next Article| |Table of Contents|
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Short Note
Discharges in a Magnetron-Type Cold Cathode Ion Gun for the Sputter Etching Apparatus
Kentaro Yoshida and
Takashi Yamada
Faculty of Engineering, Kobe University
(Received July 10, 1978)
URL:
http://jjap.jsap.jp/link?JJAP/18/201/
DOI: 10.1143/JJAP.18.201
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