Jpn. J. Appl. Phys. 20 (1981) pp. 1771-1772  |Next Article|  |Table of Contents|
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Characteristics of a Modified High Frequency Ion Source

Mutsuo Yamashita

(Received January 16, 1981; accepted for publication July 18, 1981)

URL: http://jjap.jsap.jp/link?JJAP/20/1771/
DOI: 10.1143/JJAP.20.1771

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4. K. Yagi, S. Tamura and T. Tokuyama: Jpn. J. Appl. Phys. 16 (1977) 245[JSAP].