Jpn. J. Appl. Phys. 20 (1981) pp. L665-L668 |Next Article| |Table of Contents|
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Letter
Determination of the Optical Constants of Thin Films Using Photoacoustic Spectroscopy
Satoshi Yamasaki,
Hideyo Okushi,
Akihisa Matsuda,
Hidetoshi Oheda,
Nobuhiro Hata and
Kazunobu Tanaka
Electrotechnical Laboratory
(Received June 29, 1981; accepted for publication August 10, 1981)
We have theoretically derived the photoacoustic signal of thin films accounting for the multiple-reflection effect, and presented the simple analytical procedure for determining the detailed information on the thermal parameters of the material. The PAS has been employed on a-Si:H films and the optical absorption spectra down to 1 cm-1 were obtained, which is crucially discussed in comparison with the data by the transmission method.
URL:
http://jjap.jsap.jp/link?JJAP/20/L665/
DOI: 10.1143/JJAP.20.L665
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