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Jpn. J. Appl. Phys. 21 (1982) pp. 688-695  |Table of Contents|
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Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO3

Kikuo Tominaga, Satoshi Iwamura, Yoshihiro Shintani and Osamu Tada

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  20. Japanese Journal of Applied Physics 41 (2002) 6174
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  23. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 19 (2001) 2382
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