Jpn. J. Appl. Phys. 22 (1983) pp. 761-761 |Next Article| |Table of Contents|
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Short Note
An Etchant for InP Native Oxide
Felix Schmitt and
Nobuhiko Susa
Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
(Received December 23, 1982; accepted for publication February 13, 1983)
URL:
http://jjap.jsap.jp/link?JJAP/22/761/
DOI: 10.1143/JJAP.22.761
References
- A. Yamamoto and C. Uemura:
Electron. Lett. 18 (1982) 63[AIP Scitation].
- T. Sawada and H. Hasegawa:
Electron. Lett. 18 (1982) 742[AIP Scitation].
- K. M. Geib and C. W. Wilmsen:
J. Vac. Sci. & Technol. 17 (1980) 952[AIP Scitation].
- T. Ota and Y. Horikoshi:
Jpn. J. Appl. Phys. 18 (1979) 989[JSAP].
- H. Hasegawa and H. L. Hartnagel: J. Electrochem. Soc. 123 (1976) 713.
