Jpn. J. Appl. Phys. 27 (1988) pp. L619-L621  |Next Article|  |Table of Contents|
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Letter

Preparation of Ba2YCu3Ox Superconducting Films by Laser Evaporation and Rapid Laser Annealing

Toshiharu Minamikawa, Yasuto Yonezawa, Shigeru Otsubo,1 Toshihiro Maeda,1 Akihiro Moto,1 Akiharu Morimoto1 and Tatsuo Shimizu1

Industrial Research Institute of Ishikawa Prefecture
1Department of Electronics, Faculty of Technology, Kanazawa University

(Received February 9, 1988; accepted for publication March 22, 1988)

A Ba2YCu3Ox superconducting film was prepared by laser evaporation and rapid laser annealing followed by 450°C furnace annealing in flowing O2. This is the first report on the preparation of a superconducting film by laser annealing. This technique supplies the first step in the preparation of superconducting films on various kinds of substrates without a prolonged high-temperature treatment.

URL: http://jjap.jsap.jp/link?JJAP/27/L619/
DOI: 10.1143/JJAP.27.L619
KEYWORDS:Ba2YCu3Ox, superconducting films, laser evaporation, rapid laser annealing, low-temperature furnace annealing, SrTiO3, X-ray diffraction, Raman scattering


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