Jpn. J. Appl. Phys. 28 (1989) pp. 1450-1454  |Next Article|  |Table of Contents|
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Structural and Mechanical Properties of Cr₂CO Films

Tetsuo Kado and Yukio Noda¹

(Received April 6, 1989; accepted for publication June 17, 1989)

Thin films of chromium oxycarbide(Cr₂CO) were prepared on SUS 304 stainless steel and slide glass by plasma decomposition of hexacarbonylchromium with hydrogen carrier gas. The structure of the film was investigated in detail by X-ray diffraction. It was found that the structure of Cr₂CO was fcc and that the (111) plane was highly oriented on the substrate surface. The characteristics of Vickers hardness, electric conductivity and deposition rate strongly correlated to the X-ray intensity of the particular Bragg scattering.

URL: http://jjap.jsap.jp/link?JJAP/28/1450/
DOI: 10.1143/JJAP.28.1450

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