Jpn. J. Appl. Phys. 28 (1989) pp. 1529-1529  |Next Article|  |Table of Contents|
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Electric Probe Measurements in an ECR Plasma CVD Apparatus

Kouun Shirai, Takashi Iizuka and Shun-ichi Gonda

URL: http://jjap.jsap.jp/link?JJAP/28/1529/
DOI: 10.1143/JJAP.28.1529

Original Paper :

• Japanese Journal of Applied Physics 28 (1989) pp. 897-902 :

  Electric Probe Measurements in an ECR Plasma CVD Apparatus

  Kouun Shirai, Takashi Iizuka and Shun-ichi Gonda