Jpn. J. Appl. Phys. 29 (1990) pp. 2180-2185  |Next Article|  |Table of Contents|
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Water Vapor Effects on Titanium Diffusion into LiNbO₃ Substrates

Toshinori Nozawa, Hiroshi Miyazawa and Shintaro Miyazawa¹

(Received June 21, 1990; accepted for publication August 29, 1990)

This paper describes experimental studies on titanium diffusion into Z-cut LiNbO₃ substrates as a function of water vapor content in the diffusion atmosphere of oxygen and argon. LiNbO₃ crystal characteristics were found to depend mainly on water vapor content, while Ti-diffusion characteristics were found to be affected not only by water vapor content but also by the type of carrier gas. This study has important implications for the successful fabrication of Ti-diffused LiNbO₃ waveguides; for oxygen carrier gas, a small amount of water vapor should be introduced, while for argon carrier gas, a medium amount of water vapor should be introduced.

URL: http://jjap.jsap.jp/link?JJAP/29/2180/
DOI: 10.1143/JJAP.29.2180

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