Jpn. J. Appl. Phys. 29 (1990) pp. 2847-2850  |Next Article|  |Table of Contents|
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Photodisplacement Measurement by Interferometric Laser Probe

Hiroyuki Takamatsu, Yoshiro Nishimoto and Yasuhide Nakai¹

(Received July 4, 1990; accepted for publication October 20, 1990)

A highly sensitive optical heterodyne interferometer was developed for the purpose of measuring the photodisplacement of a sample induced by the absorption of modulated light. The sensitivity is 1 pm in the 1 Hz bandwidth, sufficient to measure the photodisplacement. A good correlation was obtained between the amplitude of the photodisplacement and the subsurface structures of aluminum thin-film samples. The experimental results revealed that this technique is applicable to thickness measurement and to imaging of subsurface structures for opaque thin films.

URL: http://jjap.jsap.jp/link?JJAP/29/2847/
DOI: 10.1143/JJAP.29.2847

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