Jpn. J. Appl. Phys. 29 (1990) pp. L1209-L1212 |Next Article| |Table of Contents|
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Letter
A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS
Shingo Ichimura,
Keisuke Goto1,
Kiyohide Kokubun,
Hazime Shimizu and
Shigeki Matsuura2
Electrotechnical Laboratory
1Nagoya Institute of Technology
2Hamamatsu Photonics, K.K.
(Received April 19, 1990; accepted for publication June 13, 1990)
A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.
URL:
http://jjap.jsap.jp/link?JJAP/29/L1209/
DOI: 10.1143/JJAP.29.L1209
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