Jpn. J. Appl. Phys. 29 (1990) pp. L176-L178  |Next Article|  |Table of Contents|
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Letter

A Soft X-Ray Microscope Using an Imaging Detector

Soichi Inoue, Yoji Ogawa, Katsunobu Ueda¹, Mitsuo Sumiya¹, Tadahiro Takigawa and Sadao Aoki²

(Received September 27, 1989; accepted for publication December 6, 1989)

An X-ray microscope, consisting of a Wolter-type mirror and an imaging detector, was constructed. The configuration of the mirror was optimized by the ray-tracing procedure. The resolution of the imaging detector was estimated to be better than 1 µm from the spot diagram of the electron lenses. A photocathode made of a CsI layer as a photoemitter and a SiN_x membrane as a support for the CsI layer is presented. The fundamental performance of the X-ray microscope has been evaluated, and its resolution has been estimated to be better than 2 µm.

URL: http://jjap.jsap.jp/link?JJAP/29/L176/
DOI: 10.1143/JJAP.29.L176

References

1. V. H. Wolter: Ann. Phys. 10 (1952) 94[CrossRef].
2. F. Polack: Rev. Sci. Instrum. 52 (1981) 207[AIP Scitation].
3. S. Aoki and Y. Sakayanagi: The New York Academy of Science (1980) 158.
4. B. L. Henke, J. P. Knauer and K. Premaratne: J. Appl. Phys. 52 (1981) 1509[AIP Scitation].