Jpn. J. Appl. Phys. 30 (1991) pp. 2908-2911  |Next Article|  |Table of Contents|
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Electron-Impact Dissociation of Methane into CH₃ and CH₂ Radicals I. Relative Cross Sections

Tohru Nakano, Hirotaka Toyoda and Hideo Sugai

(Received July 19, 1991; accepted for publication September 21, 1991)

The abundances of primary neutral radicals CH₃ and CH₂ resulting from electron-impact dissociation of methane have been measured. This was accomplished with threshold-ionization mass spectrometry in a differentially pumped dual-electron-beam device. The relative partial cross sections for dissociation into CH₃ and CH₂ are reported for electron energies between 10 and 100 eV. A maximum cross section is found at 20-30 eV for both CH₃ and CH₂ radicals. At higher energies, the cross section decreases rather sharply, in particular for dissociation into the CH₂ radical.

URL: http://jjap.jsap.jp/link?JJAP/30/2908/
DOI: 10.1143/JJAP.30.2908

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