Jpn. J. Appl. Phys. 30 (1991) pp. 2912-2915  |Next Article|  |Table of Contents|
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Electron-Impact Dissociation of Methane into CH₃ and CH₂ Radicals II. Absolute Cross Sections

Tohru Nakano, Hirotaka Toyoda and Hideo Sugai

(Received July 19, 1991; accepted for publication September 21, 1991)

The electron energy dependence of partial cross sections for dissociation of methane into CH₃ and CH₂ radicals has been reported in part I of this paper. In order to assign absolute values to these relative cross sections, two additional experiments were carried out. One was cross-section measurement for electron-impact nitrogen dissociation (N₂→N+N, N+N⁺) using threshold-ionization mass spectrometry. The other was the measurement of sticking coefficients of CH₃, CH₂, and atomic nitrogen. According to these measurements, the absolute partial cross sections for neutral dissociation were determined: maximum cross section is 1.4×10^-20 m² at 24 eV for CH₃ radical and 0.72×10^-20 m² at 18 eV for CH₂ radical.

URL: http://jjap.jsap.jp/link?JJAP/30/2912/
DOI: 10.1143/JJAP.30.2912

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