Jpn. J. Appl. Phys. 32 (1993) pp. 1303-1307  |Next Article|  |Table of Contents|
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Preparation and Characteristics of Capacitors with Organic Conductor as Solid Electrolyte by Ion-Assisted Evaporation

Jun Kyokane, Isao Isa¹ and Katsumi Yoshino²

(Received September 17, 1992; accepted for publication November 21, 1992)

Ion-beam-assisted deposition of organic materials has been proposed for obtaining high-quality thin films. As an example, organic thin films have been prepared by means of evaporation of 7,7,8,8-tetracyanoquinodimethane (TCNQ) complex on porous oxide Al plates under ion beam irradiation. A Solid electrolytic capacitor with a large capacitance and a good frequency response can be fabricated utilizing thin films obtained with this method as solid electrolyte.

URL: http://jjap.jsap.jp/link?JJAP/32/1303/
DOI: 10.1143/JJAP.32.1303

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