Jpn. J. Appl. Phys. 32 (1993) pp. 3330-3331 |Next Article| |Table of Contents|
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Study of Applicability of AC Photovoltaic Method and Photoconductive Decay Method Using Microwaves as Noncontact Methods for Bulk Lifetime Measurement
Masato Toda,
Yutaka Kitagawara and
Takao Takenaka
SEH Isobe R & D Center, Shin-Etsu Handotai Co., Ltd., 2-13-1 Isobe, Annaka-shi, Gunma 379-01
(Received February 13, 1992; accepted for publication April 17, 1993)
The applicability of the ac photovoltaic method and photoconductive decay method using microwaves (µ-PCD method) as bulk lifetime measurement methods were studied. Lifetimes measured by these two methods were compared with bulk lifetimes measured by the photoconductive decay method standardized by ASTM:F28-75. Lifetimes measured by the ac photovoltaic method were in good agreement with the bulk lifetimes of less than 3 ms for both n-type and p-type samples. However, lifetimes measured by the µ-PCD method were significantly lower than the bulk lifetimes. It is concluded that the ac photovoltaic method is a reliable noncontact method for the bulk lifetime measurement of the samples with bulk lifetimes less than 3 ms.
URL:
http://jjap.jsap.jp/link?JJAP/32/3330/
DOI: 10.1143/JJAP.32.3330
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