Jpn. J. Appl. Phys. 33 (1994) pp. 1823-1830  |Table of Contents|
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Novel Approach to Evaluation of Charging on Semiconductor Surface by Noncontact, Electrode-Free Capacitance/Voltage Measurement

Sadao Hirae, Motohiro Kohno, Hiroshi Okada, Hideaki Matsubara, Ikuyoshi Nakatani, Tatsufumi Kusuda and Takamasa Sakai

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