Jpn. J. Appl. Phys. 33 (1994) pp. 2107-2112  |Next Article|  |Table of Contents|
|Full Text PDF (2166K)| |Buy This Article|

Fabrication and Evaluation of Flexible Microgripper

Yoshihiko Suzuki

(Received December 22, 1993; accepted for publication February 19, 1994)

A new concept of a microgripper using Lorentz force actuation and electrothermal bimorph actuation is presented here. Design, theoretical consideration, fabrication process and characterization results are presented. Many free-standing fingers, ranging from 200 µ m to 1000 µ m in length, have been fabricated successfully by the micromachining process. We have observed the low driving voltage performance and the flexible finger motion of the flexible microgripper (FMG) under the microscope. A 210 µ m deflection of a 1000-µm-long finger was obtained at the input voltage of 1 V.

URL: http://jjap.jsap.jp/link?JJAP/33/2107/
DOI: 10.1143/JJAP.33.2107

References | Citing Articles (7)

1. M. Mehregany, K. J. Gabriel and W. S. Trimmer: IEEE Trans. Electron Devices 35 (1988) 719[CrossRef].
   
2. L. Y. Chen, Z. L. Zhang, J. J. Yao, D. C. Thomas and N. C. MacDonald: Proc. IEEE Micro Electro Mechanical Systems Workshop, Salt Lake City, 1990 (IEEE, Salt Lake City, 1990) p. 82.
   
3. C. J. Kim, A. P. Pisano, R. S. Muller and M. G. Lim: Proc. IEEE Solid-State Sensors and Actuator Workshop, Hilton Head Island, 1990 (IEEE, Hilton Head Island, 1990) p. 48.
   
4. C. J. Kim A. P. Pisano and R. S. Muller: J. Microelectromech. Syst. 1 (1992) 31.
   
5. W. Beneke and W. Riethuller: Proc. IEEE Micro Electro Mechanical Systems Workshop, Salt Lake City, 1989 (IEEE, Salt Lake City, 1989) p. 116.
   
6. W. Riethuller and W. Benke: IEEE Trans. Electron Devices 35 (1988) 758[CrossRef].
   
7. S. P. Timoshenko: J. Opt. Soc. Am. 11 (1925) 233.
   
8. S. P. Timoshenko: Elements of Strength of Materials (Krieger, Malabar, 1984) through J. Vac. Sci. & Technol A 8 (1990) 3386[AIP Scitation].