Jpn. J. Appl. Phys. 33 (1994) pp. 905-908  |Table of Contents|
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Fabrication of Less Than a 10 nm Wide Polycrystalline Silicon Nano Wire

Yasuo Wada, Tokuo Kure, Toshiyuki Yoshimura, Yoshimi Sudo, Takashi Kobayashi, Yasushi Goto and Seiichi Kondo

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