Jpn. J. Appl. Phys. 34 (1995) pp. 5124-5131 |Next Article| |Table of Contents|
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Optical Properties of Ba2NaNb5O15 Film Fabricated by RF Magnetron Sputtering Method
Yoichiro Masuda,
Hiroshi Masumoto1,
Yuuki Kidachi,
Akira Watadzu1,
Akira Baba,
Takashi Goto1,
Toshio Hirai1
Department of Electrical Engineering, Faculty of Engineering, Hachinohe Institute of Technology, 88-1 Ohbiraki, Myoh, Hachinohe, Aomori 031, Japan
^1Institute for Material Research, Tohoku University, 2-2-1 Katahira, Aobaku, Sendai, Miyagi 980, Japan
(Received May 22, 1995; accepted for publication July 3, 1995)
Tungsten-bronze-type Ba2NaNb5O15 (BNN) thin films were deposited on fused-quartz and Si substrates. The deposition ratio (Ba:Na:Nb) and rate of the films depend on the sputtering conditions. The dielectric constant and dielectric loss factor are 889 and 0.029, respectively, at room temperature. The leakage current density is about 100 mA/cm2 at 1 MV/cm. The remanent polarization and coercive field are 2.39 µ C/cm2 and 8.33 kV/cm, respectively, and the second-harmonic generation coefficient d is about 2.54×10-13 m/V. Moreover, Raman scattering of the BNN films is discussed.
URL:
http://jjap.jsap.jp/link?JJAP/34/5124/
DOI: 10.1143/JJAP.34.5124
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