Jpn. J. Appl. Phys. 34 (1995) pp. 5132-5135  |Next Article|  |Table of Contents|
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Structural Control of Epitaxially Grown Sputtered PbTiO₃ Thin Films

Kiyotaka Wasa, Yohko Haneda, Toshifumi Satoh¹, Hideaki Adachi¹, Shigenori Hayashi¹, Kentaro Setsune¹

(Received May 8, 1995; accepted for publication June 19, 1995)

Microstructures of sputtered PbTiO₃ films on SrTiO₃ substrates have been studied. It is known that the epitaxial PbTiO₃ films include microstructures. It was found that the formation of these microstructures was strongly influenced by the off-stoichiometry of the sputtered films and substrate surface microstructures. Sputtering under the stoichiometric condition on miscut (001)SrTiO₃ led to the growth of ultrathin single-crystal PbTiO₃ films 10-100 nm thick with continuous structure; under the off-stoichiometric condition the sputtered films comprised microstructures with screwlike dislocation. The ultrathin films exhibited lattice distortion which modified their ferroelectric properties.

URL: http://jjap.jsap.jp/link?JJAP/34/5132/
DOI: 10.1143/JJAP.34.5132

References | Citing Articles (7)

1. K. Wasa, T. Satoh, K. Tabata, H. Adachi, Y. Yabuuchi and K. Setsune: J. Mater. Res. 9 (1994) 2959.
   
2. K. Wasa: Bull. Mater. Sci. India 16 (1993) 643.
   
3. H. Adachi, T. Mitsuyu, O. Yamazaki and K. Wasa: Proc. 9th Symp. Ion Source and Ion Assisted Technology, Kyoto, 1985, p. 373.
   
4. K. Wasa, T. Satoh, H. Adachi, K. Setsune and S. Trolier-McKinstry: Proc. the 3rd Int. Symp. Sputtering & Plasma Processes, Tokyo, 1995, p. 83.
   
5. K. Wasa, T. Satoh, K. Tabata, H. Adachi and K. Setsune: Appl. Phys. Commun. 13 (1994) 205.
   
6. G. A. Rossetti, Jr., L. Cross and K. Kushida: Appl. Phys. Lett. 59 (1991) 2524[AIP Scitation].
   
7. B. S. Kwak, A. Erbil, B. J. Wilkens, J. D. Budai, M. F. Chisholm and L. A. Boatner: Phys. Rev. Lett. 68 (1992) 3733[APS].
   
8. J. S. Speck, A. Seifert, W. Pompe and R. Ramesh: J. Appl. Phys. 76 (1994) 477[AIP Scitation].
   
9. C. B. Eom, R. J. Cava, R. M. Fleming, J. M. Phillips, R. B. van Dover, J. H. Marshall, J. W. P. Hsu, J. J. Krajewski and W. F. Peck, Jr.: Science 258 (1992) 1766[Science].
   
10. K. Wasa, T. Satoh and K. Tabata: Proc. 1994 MRS Fall Meeting, Boston, 1994, I2-2.14.
    
11. K. Uchino, E. Sadanaga and T. Hirose: J. Am. Ceram. Soc. 72 (1989) 1555[CrossRef].