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Jpn. J. Appl. Phys. 34 (1995) pp. 5136-5140  |Next Article|  |Table of Contents|
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Characteristic Change due to Argon Ion Etching and Heat Treatment of (Pb, La)TiO3 Thin Films Fabricated by Multiple Cathode Sputtering

Hiroshi Maiwa, Noboru Ichinose1, Kiyoshi Okazaki

Department of Materials Science and Ceramic Technology, Faculty of Engineering, Shonan Institute of Technology, 1-1-25 Tsujido-Nishikaigan, Fujisawa, Kanagawa 251, Japan ^1Department of Materials Science and Engineering, School of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169, Japan

(Received May 18, 1995; accepted for publication June 26, 1995)

The ferroelectric properties of (Pb, La)TiO3 thin films fabricated by multiple cathode rf-magnetron sputtering were investigated. After argon ion etching of the (Pb, La)TiO3 thin films, the reduction of Pb-O bonds, shift of hysteresis loop on the E-axis and the decrease of remanent polarization was induced. After heat treatment at 700° C in N2, squareness and saturation of the loop worsened, and remanent polarization decreased. After reheat treatment of the films at 400° C for 1 h, the coercive field decreased, and the squareness of the loop was improved. These results were discussed from the viewpoint of the behavior of space charge.

URL: http://jjap.jsap.jp/link?JJAP/34/5136/
DOI: 10.1143/JJAP.34.5136


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