Jpn. J. Appl. Phys. 36 (1997) pp. 5815-5819  |Next Article|  |Table of Contents|
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X-Ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method

Masaaki Ichiki, Jun Akedo, Andreas Schroth , Ryutaro Maeda and Yuichi Ishikawa

(Received May 7, 1997; accepted for publication July 4, 1997)

A lead zirconate titanate ( Pb(Zr, Ti)O₃, PZT) thick film was produced using the Jet Molding System which was developed from a gas deposition method. Some of the characteristics of the deposited lead zirconate titanate were determined by X-ray diffraction, scanning electron microscopy and atomic force microscopy. The dielectric constant was determined to be 760 after 500° C and 10 min of heat treatment for nonpolarized sample. Through scanning electron microscope observation, some properties of the deposition of ultrafine particles of PZT were determined. A joining of the deposited particles could be observed, which means a kind of sintering was caused by the deposition process. Crystal structure analysis was carried out using X-ray diffraction for structural comparison before and after deposition. The perovskite structure of PZT was proved to be retained during the deposition process.

URL: http://jjap.jsap.jp/link?JJAP/36/5815/
DOI: 10.1143/JJAP.36.5815

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