Jpn. J. Appl. Phys. 40 (2001) pp. 5551-5553  |Table of Contents|
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Low-Temperature Fabrication of Ir/Pb(Zr,Ti)O3/Ir Capacitors Solely by Metalorganic Chemical Vapor Deposition

Hironori Fujisawa, Kentaro Kita, Masaru Shimizu and Hirohiko Niu

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