Jpn. J. Appl. Phys. 40 (2001) pp. 7007-7012  |Next Article|  |Table of Contents|
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Quantitative Analysis of Hydrogen in Amorphous Films of Hydrogenated Carbon Nitride

Yoshiaki Ohkawara, Shigeo Ohshio, Tsuneo Suzuki, Haruhiko Ito, Kiyoshi Yatsui and Hidetoshi Saitoh

(Received July 2, 2001; accepted for publication September 13, 2001)

The amorphous phase of hydrogenated carbon nitride, a-CN_x:H (0 ≦x ≦1), films may have clusters consisting of a mixture of sp²- and sp³-hybridized materials with cluster sizes of 0.2–2 nm. The hydrogen termination limits the size of the carbon and carbon nitride clusters. It also influences the mechanical properties of the sample. In this experiment, the relationship between the hydrogen content and the mechanical properties of carbon and related materials was investigated using elastic recoil detection analysis (ERDA), nanoindentation techniques and Raman spectroscopy. The samples were classified into three categories of hardness: mechanically soft a-CN_x:H (hardness: 1–8 GPa), mechanically hard a-CN_x:H (8–30 GPa) and hard hydrogenated amorphous carbon (a-C:H) (more than 30 GPa). The hydrogen contents of the sample were 10–50 at.%, 5–40 at.%, and less than 3 at.% for soft a-CN_x:H, hard a-CN_x:H and hard a-C:H, respectively.

URL: http://jjap.jsap.jp/link?JJAP/40/7007/
DOI: 10.1143/JJAP.40.7007
KEYWORDS:plasma CVD, carbon nitride, amorphous, carbon, DLC, ERDA, nanoindentation, hardness, IR spectroscopy, Raman scattering spectroscopy

References | Citing Articles (24)

1. N. Wada, P. J. Gaczi and S. A. Solin: J. Non-Cryst. Solids. 35&36 (1980) 543.
2. J. Robertson and E. P. O'Reilly: Phys. Rev. B 35 (1987) 2946[APS].
3. M. A. Tamor and C. H. Wu: J. Appl. Phys. 67 (1990) 1007[AIP Scitation].
4. A. Grill, V. Patel and B. S. Meyerson: J. Electrochem. Soc. 138 (1991) 2362.
5. S. Kumar: Appl. Phys. Lett. 58 (1991) 1836[AIP Scitation].
6. D. Tanaka, S. Ohshio and H. Saitoh: Jpn. J. Appl. Phys. 39 (2000) 6008[JSAP].
7. H. Saitoh, T. Inoue and S. Ohshio: Jpn. J. Appl. Phys. 37 (1998) 4983[JSAP].
8. Y. Ohkawara, S. Ohshio, T. Suzuki, H. Ito, K. Yatsui and H. Saitoh: Jpn. J. Appl. Phys. 40 (2001) 3359[JSAP].
9. D. Tanaka, S. Ohshio, J. Nishino and H. Saitoh: Jpn. J. Appl. Phys. 35 (1996) L1452[JSAP].
10. N. M. Keulen: J. Am. Ceram. Soc. 76 (1993) 904[CrossRef].
11. A. Grill and V. Patel: Diamond & Relat. Mater. 2 (1993) 1519.
12. A. Chambers, C. Park, R. Terry, K. Baker and N. M. Rodriguez: J. Phys. Chem. B 102 (1998) 4253[CrossRef].
13. P. Hammer, N. M. Victoria and F. Alvarez: J. Non-Cryst. Solids 227–230 (1998) 645[CrossRef].
14. J. Hu, P. Yang and C. M. Lieber: Phys. Rev. B 57 (1998) 3185[APS].
15. J. Hu, P. Yang and C. M. Lieber: Appl. Surf. Sci. 127–129 (1998) 569[CrossRef].