Jpn. J. Appl. Phys. 41 (2002) pp. 1379-1385  |Next Article|  |Table of Contents|
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Fluorinated Polyimide Waveguide Fabricated Using Replication Process with Antisticking Layer

Tsuyoshi Shioda

(Received November 28, 2001; accepted for publication December 17, 2001)

A new replication process with an antisticking layer was demonstrated using a fluorinated polyimide. A thin silicon-oxide coating was introduced on the top of the mold as the antisticking layer, which could significantly improve the separation between the mold and the fluorinated polyimide film without degrading the optical property. A stripe with the height and width less than 50 µm was completely replicated into a fluorinated polyimide film with an accuracy of less than 1 µm. A single-and a multimode waveguide film were fabricated using a cladding film with grooves formed by our replication process. The multimode waveguide exhibited very low optical propagation losses of 0.30 dB/cm and 0.36 dB/cm at the wavelengths of 1.31 µm and 0.85 µm, respectively.

URL: http://jjap.jsap.jp/link?JJAP/41/1379/
DOI: 10.1143/JJAP.41.1379

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