Jpn. J. Appl. Phys. 42 (2003) pp. 2872-2875  |Next Article|  |Table of Contents|
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A Single Zone Azimuth Calibration for Rotating Compensator Multichannel Ellipsometry

Ilsin An, Jaeho Lee, Kyoung-Yoon Bang, Ok-Kyung Kim and Hye-Keun Oh

(Received July 17, 2002; revised manuscript revised November 18, 2002; accepted for publication December 24, 2002)

A rotating compensator type spectroscopic ellipsometry (RCSE) equipped with a multichannel detector was developed. For accurate data reduction, the azimuth of each optical element should be determined with respect to the plane of incidence. In this paper, we present a spectroscopic single-zone phase calibration method for RCSE utilizing multichannel measurements. With this method, the azimuth of the polarizer could be determined as accurately as in the two-zone phase method, but the time required for calibration process was reduced by half.

URL: http://jjap.jsap.jp/link?JJAP/42/2872/
DOI: 10.1143/JJAP.42.2872

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