Jpn. J. Appl. Phys. 42 (2003) pp. 3695-3697 |Next Article| |Table of Contents|
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Standing Microcoil Actuator Array
Center for International Research on Micromechatronics (CIRMM), Institute of Industrial Science (IIS), The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
1Department of Mechano-Informatics, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
(Received December 19, 2002; accepted for publication January 27, 2003)
A standing microcoil actuator array fabricated for driving three-dimensional out-of-plane structures is proposed. Since the microcoil structures have a magnetic thin-film layer, they can be erected on the substrate when a vertical magnetic field is applied to them. Additionally they can be actuated when a current is applied to the coil structure. In this paper, we have demonstrated the driving of a microslit on the standing microcoil actuator array. It could achieve parallel motion to the substrate at the frequency from DC to 1 kHz.
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