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Jpn. J. Appl. Phys. 42 (2003) pp. 5960-5962  |Next Article|  |Table of Contents|
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Electro-Optical Properties of (Pb, La)(Zr, Ti)O3 Films Prepared by Aerosol Deposition Method

Masafumi Nakada, Keishi Ohashi, Maxim Lebedev1 and Jun Akedo1

Fundamental Research Laboratories, NEC Corporation, 34 Miyukigakoka, Tsukuba, Ibaraki 305-8501, Japan
1National Institutes of Advanced Industrial Science and Technology, 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan

(Received May 12, 2003; accepted for publication June 26, 2003)

Electro-optically active and highly transparent lanthanum-modified lead zirconate titanate [PLZT, Pb0.91La0.09(Zr0.65Ti0.35)O3] films over 1 µm thick were deposited directly on glass substrates using an aerosol deposition method. An optical transmittance of 70% at the wavelength of 800 nm was obtained for a 4.5-µm-thick PLZT film with a reflection loss of 20% at the film and substrate surfaces. A quadratic electro-optical response with a slim loop was observed, consistent with the expected bulk response. The quadratic electro-optical coefficient was 2.5×10-18 m2/V2, comparable to that of films deposited on buffer layers using a sol-gel method. These results indicate that aerosol deposition provides a superior method for depositing the layers of optical devices.

URL: http://jjap.jsap.jp/link?JJAP/42/5960/
DOI: 10.1143/JJAP.42.5960
KEYWORDS:aerosol deposition, PLZT, electro-optical effect, thick film, transparent film


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