Jpn. J. Appl. Phys. 42 (2003) pp. 6124-6127 |Next Article| |Table of Contents|
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A Wireless Surface Acoustic Wave Temperature Sensor Using Langasite as Substrate Material for High-Temperature Applications
Electronics Device R&D Center, Mitsubishi Materials Corporation, 2270 Yokoze, Chichibu, Saitama 368-8503, Japan
(Received May 12, 2003; accepted for publication June 19, 2003)
A wireless surface acoustic wave (SAW) temperature sensor was produced using langasite single crystal as a piezoelectric substrate. The properties of both solid-electrode and split-electrode interdigital transducers (IDTs) were studied by fitting the admittance curves. A miniature antenna was used and the impedance matching technique between the antenna and the IDT was investigated. The temperature characteristic in the temperature range of 20–700°C was measured. The results showed that both the SAW chip and the antenna functioned in this temperature range.
- L. Reindl, G. Scholl, T. Ostertag, C. C. W. Ruppel, W.-E. Bulst and F. Seifert: Proc. IEEE Ultrasonics Symp. 1996, p. 363.
- R. Steindl, A. Pohl, L. Reindl, J. Hornsteiner, E. Riha and F. Seifert: Proc. Tempmeko 99, Netherlands, p. 424.
- W.-E. Bulst, G. Fischerauer and L. Reindl: IEEE Trans. Indust. Electron. 48 (2001) 265.
- Z. H. Chen, M. Takeuchi and K. Yamanouchi: IEEE Trans. Ultrason. Ferroelectr. & Freq. Control UFFC-39 (1992) 82.
- A. Bungo, C. Y. Jian, K. Yamaguchi, Y. Sawada, S. Uda and Y. P. Pisarevsky:
Jpn. J. Appl. Phys. 38 (1999) 3239[JSAP].