Jpn. J. Appl. Phys. 42 (2003) pp. 6124-6127  |Next Article|  |Table of Contents|
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A Wireless Surface Acoustic Wave Temperature Sensor Using Langasite as Substrate Material for High-Temperature Applications

Shou-Qi Wang, Jiro Harada and Satoshi Uda

Electronics Device R&D Center, Mitsubishi Materials Corporation, 2270 Yokoze, Chichibu, Saitama 368-8503, Japan

(Received May 12, 2003; accepted for publication June 19, 2003)

A wireless surface acoustic wave (SAW) temperature sensor was produced using langasite single crystal as a piezoelectric substrate. The properties of both solid-electrode and split-electrode interdigital transducers (IDTs) were studied by fitting the admittance curves. A miniature antenna was used and the impedance matching technique between the antenna and the IDT was investigated. The temperature characteristic in the temperature range of 20–700°C was measured. The results showed that both the SAW chip and the antenna functioned in this temperature range.

URL: http://jjap.jsap.jp/link?JJAP/42/6124/
DOI: 10.1143/JJAP.42.6124


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