Jpn. J. Appl. Phys. 43 (2004) pp. 5044-5046  |Previous Article| |Next Article|  |Table of Contents|
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Progress in Electron Beam Mastering of 100 Gbit/inch² Density Disc

Minoru Takeda, Motohiro Furuki, Masanobu Yamamoto, Masataka Shinoda, Kimihiro Saito, Yuichi Aki¹, Hiroshi Kawase¹, Mitsuru Koizumi², Toshiaki Miyokawa², Masao Mutou² and Nobuo Handa²

(Received December 8, 2003; accepted February 18, 2004; published July 29, 2004)

We developed an electron beam recorder (EBR) capable of recording master discs under atmospheric conditions using a novel differential pumping head. Using the EBR and optimized fabrication process for Si-etched discs with reactive ion etching (RIE), a bottom signal jitter of 9.6% was obtained from a 36 Gbit/inch² density disc, readout using a near-field optical pickup with an effective numerical aperture (NA) of 1.85 and a wavelength of 405 nm. We also obtained the eye patterns from a 70 Gbit/inch² density disc readout using an optical pickup with a 2.05 NA and the same wavelength, and showed almost the same modulation ratio as the simulation value. Moreover, the capability of producing pit patterns corresponding to a 104 Gbit/inch² density is demonstrated.

URL: http://jjap.jsap.jp/link?JJAP/43/5044/
DOI: 10.1143/JJAP.43.5044

References | Citing Articles (3)

1. M. Furuki, M. Takeda, M. Yamamoto, M. Shinoda, K. Saito, Y. Aki, H. Kawase, M. Koizumi, T. Miyokawa and M. Mutou: Tech. Dig. Optical Data Storage Topical Meet. (2003) p. 62.
2. M. Shinoda, K. Saito, T. Ishimoto, T. Kondo, A. Nakaoki, M. Furuki, M. Takeda and M. Yamamoto: Tech. Dig. Optical Data Storage Topical Meet. (2003) p. 120.
3. F. Yokogawa, S. Miyanabe, M. Ogasawara, H. Kuribayashi, Y. Tomita and K. Yamamoto: Jpn. J. Appl. Phys. 39 (2000) 819[JSAP].