Jpn. J. Appl. Phys. 43 (2004) pp. 5044-5046 |Previous Article| |Next Article| |Table of Contents|
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Progress in Electron Beam Mastering of 100 Gbit/inch2 Density Disc
Optical System Development Group, HENC, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
1Manufacturing Eng. Dev., Ctr., MSNC, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
2Advanced Technology Div., JEOL Ltd., 3-1-2 Musashino, Akishima-shi, Tokyo 196-8558, Japan
(Received December 8, 2003; accepted February 18, 2004; published July 29, 2004)
We developed an electron beam recorder (EBR) capable of recording master discs under atmospheric conditions using a novel differential pumping head. Using the EBR and optimized fabrication process for Si-etched discs with reactive ion etching (RIE), a bottom signal jitter of 9.6% was obtained from a 36 Gbit/inch2 density disc, readout using a near-field optical pickup with an effective numerical aperture (NA) of 1.85 and a wavelength of 405 nm. We also obtained the eye patterns from a 70 Gbit/inch2 density disc readout using an optical pickup with a 2.05 NA and the same wavelength, and showed almost the same modulation ratio as the simulation value. Moreover, the capability of producing pit patterns corresponding to a 104 Gbit/inch2 density is demonstrated.
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