Jpn. J. Appl. Phys. 43 (2004) pp. 5294-5296 |Previous Article| |Next Article| |Table of Contents|
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Fabrication of Half-Wave Plates with Subwavelength Structures
1CB Project, Canon. Inc., 20-2, Kiyohara-Kogyodanchi, Utsunomiya, Tochigi 321-3292, Japan
2Utsunomiya University, 7-1-2 Yoto, Utsunomiya, Tochigi 321-8585, Japan
(Received December 18, 2003; accepted April 28, 2004; published August 10, 2004)
Various optical elements with subwavelength structures are currently being developed. Because phase plates require a deep grating structure in which the line width is narrow and the aspect ratio is high, it has been difficult to develop half-wave plates. We have designed and developed λ/2 plates, and evaluated their optical characteristics. The fabricated phase plates have subwavelength gratings the depth of which is 1170 nm with a period of 260 nm. The phase plates achieved a phase retardation of 180 deg. at a wavelength of approximately 850 nm, and 90 deg. at the optical communication wavelength of approximately 1550 nm. The transmittance was approximately 70% around 850 nm and approximately 80% around 1550 nm.
KEYWORDS:subwavelength gratings, SWS, half-wave plate, quarter-wave plate, titanium oxide, optical communication
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