Jpn. J. Appl. Phys. 43 (2004) pp. 5609-5613  |Previous Article| |Next Article|  |Table of Contents|
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Cooling of Microspot by Microdroplets

Fu-Chu Chou, Shih-Chin Gong1, Cheng-Ru Chung, Ming-Wen Wang2 and Chi-Yuan Chang

Department of Mechanical Engineering, National Central University, Jhong-Li 320, Taiwan
1Intelligent Sensor Systems Division, Asia Pacific Microsystems, Inc., No. 2, R&D Rd. VI, Science-Based Industrial Park, Hsinchu 300, Taiwan
2Department of Mechanical Engineering, Oriental Institute of Technology, Pan-Chiao, Taipei Hsien 220, Taiwan

(Received January 6, 2004; accepted April 27, 2004; published August 10, 2004)

In this work, we explored a novel technique using microdroplets to cool hot microspots in advanced microelectronic devices. A hot floating membrane 150 µm ×150 µm is used both as a hot microspot and a thermal microsensor in the experiment. Microdroplet of pure water is ejected from the inkjet head onto the hot microspot. The evaporation time of a microdroplet decreased with increasing microspot temperature, and the temperature decrease due to microdroplet cooling increased with increasing microspot temperature. The microspot temperature can be maintained constant without flooding with cooling liquid when microdroplets are ejected continuously at an optimal frequency.

DOI: 10.1143/JJAP.43.5609
KEYWORDS:cooling technique, microspots, microdroplets

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