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Jpn. J. Appl. Phys. 43 (2004) pp. L1154-L1155  |Previous Article| |Next Article|  |Table of Contents|
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Letter

Ion-Induced Secondary Electron Emission Coefficient (γ) from MgO Protective Layer with Microscopic Surface Structures in Alternating Current Plasma Display Panels

Jun Seok Oh and Eun Ha Choi

Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University, Seoul 139-701, Korea

(Received April 22, 2004; revised June 16, 2004; accepted July 12, 2004; published August 12, 2004)

We have investigated the influence of microscopic surface structures of the MgO protective layer on the ion-induced secondary electron emission coefficient in alternating-current plasma display panels (AC-PDPs). The microscopic surface structures of the MgO protective layer have been formed by using a mesh mask with an electron beam evaporation method. The ion-induced secondary electron emission coefficient γ of the MgO protective layer with mesh-patterned microscopic surface structures has been measured by the γ-FIB (focused ion beam) system. It is found that the MgO protective layer with microscopic surface structures has a higher γ than those without any surface structures.

URL: http://jjap.jsap.jp/link?JJAP/43/L1154/
DOI: 10.1143/JJAP.43.L1154
KEYWORDS:microscopic surface structures of MgO protective layer, ion-induced secondary electron emission coefficient, γ-FIB

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