Jpn. J. Appl. Phys. 44 (2005) pp. 3385-3387  |Previous Article| |Next Article|  |Table of Contents|
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Fabrication and Characterization of Sub-100 µm Diameter Gallium Phosphide Solid Immersion Lens Arrays

Matthew Lang, Tom D. Milster, Takahisa Minamitani1, Gregg Borek1 and David Brown1

University of Arizona Optical Sciences Center, 1630 E University Blvd., Tucson, AZ 85721 USA
1MEMS Optical Inc., 205 Import Circle, Huntsville, AL 35806 USA

(Received November 22, 2004; accepted February 25, 2005; published May 24, 2005)

Fabrication and testing of a sub-100 µm gallium phosphide solid immersion lens is described with suitable sphericity (<160 nm deviation) to a marginal ray angle of 42° for NA up to 2.2 inside the material.

URL: http://jjap.jsap.jp/link?JJAP/44/3385/
DOI: 10.1143/JJAP.44.3385
KEYWORDS:solid immersion lens, lithography, gallium phosphide, phase-shifting interferometry


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