Jpn. J. Appl. Phys. 44 (2005) pp. 4211-4212 |Previous Article| |Next Article| |Table of Contents|
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Brief Communication
New Topographic Method of Detecting Microdefects Using Weak-Beam Topography with White X-Rays
Kentaro Kajiwara,
Shigeru Kimura and
Yoshinori Chikaura1
Materials Science Division, Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Mikazuki, Sayou, Hyogo 679-5198, Japan
1Graduate School of Engineering, Kyushu Institute of Technology, 1-1 Sensui, Tobata, Kitakyushu 804-8550, Japan
(Received January 26, 2005; accepted March 1, 2005; published June 10, 2005)
We describe a new topographic method of detecting microdefects in nearly perfect crystals. By this method, faint kinematical images of microdefects are observed with minimized dynamical background intensity using the interference effects of X-rays in a sample crystal. We demonstrate the capability of the method by observing “A-swirl” defects in floating-zone (FZ) silicon. The dynamical background intensity is markedly reduced, and weak kinematical images could be observed.
URL:
http://jjap.jsap.jp/link?JJAP/44/4211/
DOI: 10.1143/JJAP.44.4211
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