Jpn. J. Appl. Phys. 44 (2005) pp. 4211-4212 |Previous Article| |Next Article| |Table of Contents|
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New Topographic Method of Detecting Microdefects Using Weak-Beam Topography with White X-Rays
Materials Science Division, Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Mikazuki, Sayou, Hyogo 679-5198, Japan
1Graduate School of Engineering, Kyushu Institute of Technology, 1-1 Sensui, Tobata, Kitakyushu 804-8550, Japan
(Received January 26, 2005; accepted March 1, 2005; published June 10, 2005)
We describe a new topographic method of detecting microdefects in nearly perfect crystals. By this method, faint kinematical images of microdefects are observed with minimized dynamical background intensity using the interference effects of X-rays in a sample crystal. We demonstrate the capability of the method by observing “A-swirl” defects in floating-zone (FZ) silicon. The dynamical background intensity is markedly reduced, and weak kinematical images could be observed.
- J. E. A. Miltat and D. K. Bowen: J. Appl. Crystallogr. 8 (1975) 657.
- J. Chikawa, Y. Asaeda and I. Fujimoto:
J. Appl. Phys. 41 (1970) 1922[AIP Scitation].
- N. Kato: Acta Crystallogr., Sect. A 36 (1980) 770.
- Y. Chikaura, S. Iida, S. Kawado, K. Mizuno, S. Kimura, J. Matsui, M. Umeno, T. Ozaki, T. Shimura, Y. Suzuki, K. Izumi, K. Kawasaki, K. Kajiwara and T. Ishikawa:
J. Phys. D 34 (2001) A158[IoP STACKS].
- H. Föll and B. O. Kolbesen: Appl. Phys. 8 (1975) 319.